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Company-SemiStar

Refurbished and New Semiconductor Equipment, Spare Parts and Service

SemiStar Corp. supplies refurbished semiconductor equipment, spare parts, upgrade solutions and technical services for compound semiconductor fabs, universities, research institutes and semiconductor manufacturing facilities worldwide.

Our main equipment categories include RTP/RTA/RTO systems, plasma ashers, plasma etchers, RIE, ICP, DRIE, PECVD, LPCVD, ALD, sputter systems, evaporators, mask aligners, diffusion furnaces, metrology systems, SEM, wafer probers and semiconductor spare parts.

We also cooperate with selected OEM partners for new semiconductor equipment including X-ray inspection systems, plasma systems, diffusion furnaces, wafer carriers and semiconductor materials.

SemiStar has strong experience supporting compound semiconductor applications including GaAs, InP, GaN and SiC wafer and device manufacturing.

Our Core Business

Upgrade and Refurbishment Service for Heatpulse RTPs

Upgrade, refurbishment, controller modernization, engineering support, installation, startup assistance, process support, and worldwide technical service for AG Associates Heatpulse RTP systems sold by SemiStar Corp..

Refurbished Semiconductor Equipment

Supply of refurbished semiconductor equipment including RTP, plasma asher, etcher, RIE, ICP, DRIE, PECVD, sputter, evaporator, mask aligner, diffusion furnace, SEM, metrology and test equipment.

New Semiconductor Equipment

Sales and support of selected new semiconductor equipment including Rapid Thermal Processors, Plasma asher, etcher, RIE, ICP, DRIE, ALD, PECVD, PEALD, MOCVD, Ion Beam Milling Systems, diffusion furnaces, X-ray inspection systems, Spin Coater and Dip Coater.

Semiconductor Spare Parts, Carriers, Test Wafers

Semiconductor spare parts, replacement assemblies, refurbished modules, hard-to-find legacy components for semiconductor manufacturing equipment and substrate carriers, new test wafer  and semiconductor materials

Why SemiStar

  • Strong experience in compound semiconductor fabs (GaAs, InP, GaN, SiC)
  • Proven refurbishment and upgrade capability
  • Engineering-driven support
  • Global logistics and supply experience

Partnership Opportunities

We welcome partnerships with OEMs to represent and sell their new equipment in North America, and with distributors to expand the global reach of our refurbished and upgraded semiconductor equipment.

For OEM Partners

Expand your presence in North America through SemiStar’s established sales channels and technical support.

For Distributors

Partner with us to distribute refurbished and upgraded semiconductor equipment globally.

Looking for Equipment or Partnership?

Contact SemiStar today for solutions and cooperation opportunities.

Contact Us

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers