Main Maker

Tegal 901e Tegal 903e

Description

Model: Tegal 901e Tegal 903e plasma dry etch semiconductor process equipment

Original Equipment Manufacturer: Tegal Corp.

Condition: Refurbished with OEM specifications and warranty. Upgrade with new PC control  and/or new wafer transfer method are   available at extra cost. Installation is also optional.

Wafer Size: 3,4,5,6 inch capability

Gas Lines: 4

Manuals: Complete manuals.

Location: Morgan Hill,, CA, U.S.A.

Tegal 901e Tegal 903e plasma dry etch description for reference

The Tegal 901e Tegal 903e plasma dry etch semiconductor equipment were made by Tegal Corporation  and represents the Industry Standard in single-wafer Dry Etch of Polysilicon, Nitride, Silicon Oxide  and the mainstay of the highly successful plasma etch system.

The Tegal 901e Tegal 903e plasma dry etch semiconductor equipment are used by the semiconductor industry for integrated circuit fabrication. The Tegal 901e Tegal 903e plasma etcher plasma etch semiconductor equipment are used in one part of the sequence of manufacturing steps that transfer a pattern formed from a layer of photosensitive material, the photoresist, to a layer that makes up a permanent part of the finished device.

Wafers in the Tegal 901e Tegal 903e plasma dry etch semiconductor equipment are transported to a Reaction Chamber. A gas mixture is introduced into the Reaction Chamber, and the gas mixture is caused to become reactive by the application of radio frequency (RF) electromagnetic radiation. The reactive mixture, or plasma, etches away material that is not covered by the masking photoresist. The etch process is terminated at an appropriate time, the wafer is unloaded from the Reaction Chamber, and a new wafer is introduced. The cycle repeats.

The Tegal 901e Tegal 903e plasma dry etch semiconductor equipment Plasma/RlE etchers have been configured to take advantage of the characteristics of plasmas for etching various films. Each of the models in the 90Xe family have been optimized for specific etches of specific films. All models have the common ability to implement multi-step etch recipes using multiple process gases. An optical monitoring system provides a means for determining etch completion so that the etch process may be terminated.

Comparison Of Tegal® 901e Tegal® 903e

Tegal® 901e Tegal® 903e
Applications
  • Silicon Nitride
  • Plating Seed Layers
  • Thin Film Resistors
  • Photoresist
  • Descum
  • PRIST
  • Polyimide
  • Polyimide
  • Silicon Oxide
  • Contact/Via
  • Planarization
Pressure Range(mT) 0-1000 0-5000
Pressure Control 225 sccm UPC 2000 sccm UPC
MFC
  • 50 sccm O2
  • 60 sccm Argon
  • 25 sccm CFCl3
  • 100 sccm SF6
  • 15 sccm N2
  • 50 sccm CHF3
  • 15 sccm SF6
  • 200 sccm He
Upper Electrode
  • Gas inlet and outlet holes are contained in 1 piece
  • 429 inlet holes(0.031 dia)
  • 120 outlet holes(0.062 dia)
  • Coolant flows around outside diameter
  • Not anodized
  • Gas inlet and outlet holes are contained in separate pieces
  • 593 inlet holes(0.008 to 0.016 dia)
  • 60 outlet holes(0.130 dia)
  • Coolant flows around outside and through showerhead Showerhead is anodized (exhaust ring is not)
Pins Length (Inches) 1.79 2.125
Water Recirculators 1 1 or 2
Wafer Ring
  • Aluminum
  • Ceramic (99.5% Alumina)
  • Castillated
RF Cable to Chuck Different Length (26.25″) Different Length (16″)
Electrode Gap (mm) 38 6
Lower Electrode Not Anodized, Not Flat Aligned  Anodized, Flat Aligned

All the used equipment  trademarks belongs to the O.E.M. , the original equipment manufacturer. All rights reserved. 

Valid : It is only for end users and is subject to prior sale without notice. Appreciate your time!

SemiStar Corp. may provide certain information related to equipment offered for sale. Any and all such information is unverified and, therefore,  supplied for information purposes only without guarantees or warranties of any kind. This picture is representative of the STS available

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330 Tegal BES-530-8-PCB 8-Port/Channel Solenoid Valve Control Board
331 Tegal CC1147-00303 REAC Industrial/Laboratory Triode Split Assembly Unit
332 Tegal CC1326-00100 Chamber-Stripper For Parts As-Is
333 Tegal CC1327-00300 EZ Reactor Assembly HRE-PM1 6500 HRe
334 Tegal CD1039-00301 Industrial/Laboratory Endpoint Detector Assembly Unit
335 Tegal CD-1039-00303 Endpoint Detector Detection System Module/Plug-In
336 Tegal CD-1039-00303 Endpoint Detector Detection System Module/Plug-In
337 Tegal CD1039-00403 Wafer Etcher Plasma Chamber System Endpoint Detector Module
338 Tegal CD1043-00601 Industrial Wafer Etcher System Main Controller Module
339 Tegal CD1043-00601 Wafer Etcher Plasma Main Controller Module Chassis Frame
340 Tegal CD1043-00601RW Industrial/Lab Main Controller Assembly Module
341 TEGAL CD1298-02300 CON-MDL-VME-1HD CHASIS
342 Tegal CD1310-00104 Endpoint Module
343 Tegal CD1310-00300 Endpoint Module PM1 PM Tegal 6550 Etcher
344 Tegal CD1310-00300 Endpoint Module Tegal 6550 Etcher
345 Tegal CE00839 2 PINS WIDE 104ZA051 FEEDTHROUGH
346 Tegal CE00840 WDE 103 ZA053-600
347 Tegal CE00841 2 CTS FEMALE PLUG S 104 Z051-1
348 Tegal CE00842 4 CTS FEMALE PLUG S 103 Z053-1
349 Tegal CE00843 2 CTS MALE PLUG S 104 A051-130
350 Tegal CE00844 4 CTS MALE PLUG S 103 A053-130
351 Tegal CE00845 CABLE CLAMP E3 103.6/6.7 103.1
352 Tegal CE00845 CABLE CLAMP E3 104.3/6.7 + B I
353 Tegal CE1028-00303 AC Module Wafer Etcher 1/3/5/10/15A Power Controller Module
354 Tegal CE1028-00303 Industrial AC Module Wafer Processing Plug-In Assembly
355 Tegal CE1028-00304 AC Module Wafer Etcher 1/2/5/15A Power Controller Module
356 Tegal CE1028-00304 Industrial AC Module Wafer Processing Plug-In Assembly
357 Tegal CE1028-00304 Industrial/Laboratory AC Module Assembly Unit
358 Tegal CE1028-00401RW Industrial/Lab AC Module Assembly Unit
359 Tegal CE1029-00201 DC Module Wafer Etcher Power Supply Chassis Enclosure Frame
360 Tegal CE1029-00201 DC Module Wafer Etcher System -15/5/15/24V Power Supply PSU
361 Tegal CE1029-00201 DC Module Wafer Etcher System -15/5/15/24V Power Supply Unit
362 Tegal CE1029-00201 Industrial/Laboratory DC Module Assembly Unit
363 Tegal CE1029-00201 Industrial/Laboratory DC Power Module Plug-In Unit
364 Tegal CE1029W00840 Industrial/Laboratory DC Power Module Plug-In Assembly
365 Tegal CE1093-0030 Industrial Motor Controller Control Module/Unit/Plug-In
366 Tegal CE1093-00303 Industrial Motor Controller Module Plug-In Unit
367 Tegal CE1093-00303 Industrial Plug-In Motor Controller Module Assembly
368 Tegal CE1153-00102 Industrial/Lab PSVTN Module Assy w/Watlow 804 Controller Unit
369 Tegal CE1153-00102 Watlow 804 Temperature Controller Passivation Module PARTS
370 Tegal CE1153-00102RW PSVTN Watlow 804 Temperature Controller Passivation Module
371 Tegal CE1323-10101 AC Module Distribution
372 Tegal CE1323-10101 AC Module Distribution Unit 6500 HRe SW HTR 208 Working Spare
373 Tegal CE1354-00200 DC Power Supply Module
374 Tegal CG1041-00402RW Industrial Pressure Controller Module Assembly
375 Tegal CG1148-00602 Wafer Chamber Gass Delivery Valve UFC-1020 BCI3 MFC Assembly
376 Tegal CG1150-00205RN Industrial 8-Channel RWK Gas Controller Plug-In Module Unit
377 Tegal CG1150-00206 Industrial 8-Channel Plug-In Gas Controller Module Unit
378 Tegal CG1150-0020G Industrial 8-Channel Gas Controller Module
379 Tegal CM04345 POTENTIOMETER MONOTURN 10K 1 TURN BIAS MATCH
380 Tegal CM05136 O-RING KIT VAT PENDULUM THROTTLE VALVE PUMPING CHAMBER
381 Tegal CM05346 POT, 10K, 10 TURN, SOURCE MATCH (PKG 2)
382 Tegal CM05473 BELT TIMING BROOKS MX600 116GRV LOAD LOCK
383 Tegal Compact Air Products Water Chuck, Vacuum Pump
384 Tegal Control Unit
385 Tegal Corp 39-452-002A ARM UPPER LH DOOR T915
386 TEGAL CORP 39-453-001
387 TEGAL CORP 39-453-002
388 Tegal Corp 39-659-001 Screw Stud Standoff Aluminum 38   T915
389 Tegal Corp 39-958-001 TEGAL PULLEY TENSION DOOR T915
390 TEGAL CORP 40-575-002-C   RING, CHUCK FRONTLINE – 6″
391 TEGAL CORP 40-751-601-A   RING, 6″ WAFER CENTER STRIPPER
392 Tegal Corp 42-401-002 O-Ring, 235 V
393 Tegal Corp 42-402-001 Bracket Slide Front LH  T915
394 Tegal Corp 42-402-002 Bracket Slide Front RH T915
395 Tegal Corp 57-017-001 TEGAL PULLEY IDLER (BIG) DOOR T915
396 Tegal Corp 80-095-146 Transformer 220/115-24V  AC Module T9156-P-1623420
397 Tegal Corp 81-105-222 Sensor, Control(Platinum)Temperature TEGAL T915 RES-ASHER
398 Tegal Corp 99-196-003RW PCB  ATI-3  AUTO TUNE  T915
399 Tegal Corp 99-206-001 PCB AGCP-1 TEGAL 915
400 Tegal CP1037 CRT Program Terminal 13″ Wafer Etcher System Display Monitor PARTS
401 Tegal CR1031-00305 Industrial 100kHz Matching Network Plug-In Module Unit
402 Tegal CR1031-00305RW Industrial 100kHz Matching Network Plug-In Module Unit
403 Tegal CR1031-00306 Industrial/Laboratory 100kHz Matching Network Assembly
404 Tegal CR1040-00205EX Industrial RF Controller Plug-In Module Unit
405 Tegal CR1040-00205RW RF Controller Wafer Etcher Signal Generator Module PARTS
406 Tegal CR1087-20101RW RWK-RF Generator CR1087-20101RW – RF Plasma Model# T-502S
407 Tegal CR1296-00100 KHZ Controller CONT MTCH NTWK 500W 45 Tegal 6500 Etcher
408 Tegal CR1324-00100 RF Match Network Source Strip
409 Tegal CR1324-00400 RF Match Network Source Strip 6500 HRe
410 Tegal CR1325-00300 MHz Controller CONT MTCH NTWK STRIPPE
411 Tegal CR1330-10100 MHz Controller Cont 6550 RF Source Tegal 6550 Etcher
412 Tegal CR1338-10102 RF Match MTCH NTWK 450KHZ-ESC T Tegal 6550
413 Tegal CR1338-10102 RF Match MTCH NTWK 450KHZ-ESC T Tegal 6550
414 Tegal CR1350-00100 Source Reactor Module Process Chamber Tegal 6550 Etcher
415 Tegal CR1350-00100 Source Reactor Module Process Chamber Tegal 6550 Etcher Tool
416 Tegal CV00110 O-RING 699
417 Tegal CV00133 O-RING 178 01250
418 Tegal CV00134 O-RING 200 21313 G2 T47501 FPM
419 Tegal CV00136 O-RING 300 41145 COOLANT LOWER COOLING PLATE OUTER SOURCE
420 Tegal CV00137 O-RING 300 38500 COOLANT LOWER COOLING PLATE OUTER SOURCE
421 Tegal CV00325 O-RING 200 23100 COOLANT LOWER COOLING PLATE INNER SOURCE
422 Tegal CV00476 O-RING 0.138 X 0.609
423 Tegal CV00477 O-RING 0.139 X 0.734 CHEMRAZ
424 Tegal CV00481 O-RING 0.210 X 1.1
425 Tegal CV00482 O-RING CHEMRAZ 366C639 7.225 INCH X 0.210 INCH SC639
426 Tegal CV00507 O-RING 533
427 Tegal CV00508 O-RING 270
428 Tegal CV00527 O-RING TOR 240 00660 HE FEED ESCP SH
429 Tegal CV00528 O-RING 200 00570 HE FEED ESCP SH
430 Tegal CV00553 O-RING KIT VAT VALVE PROCESS PUMPING
431 Tegal CW 1047-00302 Industrial Electrostatic Wafer Chuck Assembly Unit
432 Tegal CW 1047-01101RW Industrial Wafer Chuck Assembly W/ 2x SMC NAQ2000
433 Tegal CW1033-00301 Industrial Wafer Elevator Assembly w/Stepping Motor
434 Tegal CW1033-00302 Industrial Wafer Elevator Assembly w/Stepping Motor
435 Tegal CW1033-00303 Wafer Elevator Library Selector Transfer Handling Assembly
436 Tegal CW1033-00303 Wafer Elevator Library Selector Transfer Handling Assembly
437 Tegal CW1038-00402 Industrial Spatula Drive Belt Assembly w/Stepping Motor
438 Tegal CW1038-00402RW Industrial/Laboratory Spatula Drive Assembly
439 Tegal CW1048-00502 Industrial Wafer Shelf Lift Assembly Machine Indexer Module
440 Tegal CW1048-00502 Industrial/Lab Pneumatic Indexer Module Assembly Unit
441 Tegal CW1048-00502 Industrial/Laboratory Indexer Pneumatic Assembly
442 Tegal CW1048-00502 Industrial/Laboratory Indexer Pneumatic Assembly
443 Tegal CW1048-00502 Wafer Chamber Shelf Lift Assembly Machine Indexer Module
444 Tegal CW1078-W00304RW Spatula Drive, 99-200-003 PCB Board
445 Tegal CW1299-20103 VCE Left Generic Load Lock Chamber Tegal 6550 Etcher
446 Tegal CW-1302 00500 Wafer Aligner Tegal 6550 Etcher
447 TEGAL DEIONIZED WATER HEATER CONTROLLER CE132100201
448 Tegal elevator frame assembly
449 TEGAL ENDPOINT MODULE, STRIPP, 99-390-004 CD1310-00202
450 TEGAL EPROM 400k MEMORY PCB,  PN 99-095-320
451 Tegal FLIP 03601-22-040 Alphanumeric Fluorescent Display
452 TEGAL Front Robot Loader interface
453 Tegal Heater Controller Tegal 6550 Etcher *working
454 Tegal Industrial Computer Source 7410-14H Control Unit CD1100-00302 4U Rack
455 Tegal Industrial Lab REAC Heated Upper Electrode Chamber Assembly Plate Unit
456 Tegal Industrial Lab Upper Body Chamber Ring Unit w/Viewing Side Ports PARTS
457 Tegal Industrial Optical Fiber Laser Head System I/O RF Driver Amplifier Module
458 Tegal Industrial Plasma Etcher Chamber Ceramic Insulator Ring 12.5″ Diameter
459 Tegal Industrial Plasma Etcher Chamber Ceramic Insulator Ring 13.5″ Diameter
460 Tegal Industrial REAC Heated Upper Electrode Chamber Assembly Plate CC1230-00100
461 Tegal INS-1 Wafer Etcher System 15-Pin Connector Sensor Component Board PCB
462 Tegal M3 X 16MM SCREW BUTON HEAD STAINLESS STEEL CLS. .3C16BHCS
463 Tegal Model 421 Manual PCB 99-011-001
464 Tegal Model 421, 3″, 75 mm Aluminum Wafer Carrier, 25 Slot
465 Tegal Model 421, 3″, 75 mm Aluminum Wafer Carrier, 25 Slot,
466 Tegal Model 901e / 903e Plasma Etcher SHUTTLE REBUILD KIT, 80-202-034, NOS
467 Tegal Model 903e Plasma Etcher FRONT PANEL INTERFACE PCB, 99-125-008, NOS
468 Tegal Model 903e Plasma Etcher GAS INTERFACE PCB ICG5 99-126-005 REV M
469 Tegal MX01136 PHYTRONIC ASSEMBLY ESCP SH
470 Tegal MyDax 2H14A Temperature Controller Instruction Manual
471 Tegal P/N 31-165-006 Stepping Motor, Carrier
472 TEGAL PCB ASSY (PARTS) 98-391-004
473 TEGAL PCB ASSY 31-398-002
474 TEGAL PCB ASSY 98-391-004
475 TEGAL PCB ASSY 99-406-001
476 TEGAL PCB ASSY 99-416-001
477 Tegal PEP-250-Te High Voltage Power AC Plasma Source Generator 100Kz RF Supply
478 Tegal PEP-250-Te Industrial/Laboratory AC Plasma Source Assembly 3157508-000A
479 TEGAL PLASMA 903
480 TEGAL PLASMA ETCHER 9XX 98-247-002, TSI. REV B
481 TEGAL PLASMA ETCHER 9XX GAS INTERFACE PCB, ICG-6, 99-126-006 REV F
482 Tegal PlasmaLine 200 Plasma Barrel Etcher –  Power Supply
483 Tegal Plasmaline 415 Plasma Chamber w/Varian L6267-301 NW40 Vacuum Valve
484 TEGAL PLASMALINE MODEL 421 WITH SPARE PARTS
485 TEGAL PLASMOD w/ MARCH GCM 100 PLASMA ASHER CLEANER ETCHER
486 Tegal PM3 Over Temp PM4 Level Sense Tegal 6550 Etcher
487 Tegal Quartz PIN P/N 40-297-001-E, NEW
488 Tegal RF Delivery
489 Tegal RF Interface PCB # 99-173-008
490 TEGAL RF SIGNAL GENENRATOR SUPPLY T-1000E
491 Tegal SE 1496A A/D Plug-In PCB Circuit Board Assembly Unit
492 Tegal SE 2059 AX CPU Plug-In PCB Circuit Board Assembly Unit
493 Tegal source reactor ICP CR1350-00300 with Tegal MHZ controller CR1325-00400
494 Tegal SPI-80-095-057 Probe Temperature SST
495 Tegal T-1000E Comdel T1000E/DCX Wafer RF Signal Generator DC Power Supply Module
496 Tegal T-1000E Comdel T1000E/RFG 13.56MHz RF Signal High Voltage Power Supply
497 Tegal T-1000E Industrial 40VDC DC Power Supply Plug-In Module Unit Assembly #2
498 Tegal TG00461 MONOBLOCK CENETRING RING CERAMIC PART
499 Tegal TR01785 PIPE ALUMINA INTEGRATED CIRCUIT SUPPORT ICS-2471883
500 Tegal TR05113 CONNECTOR HELIUM ESCP SH (PKG 2)
501 Tegal Type 41-137-001 Flag Chuck For Tegal Etcher
502 Tegal Type 80-202-186 Timing Belt (Pack Of 4)
503 Tegal Vacuum Cassette Elevator Loadlock VCE, 100/150MM, Left CW1299-10102
504 Tegal Wafer Elevator Vexta Motorized Linear Transfer Selector Library Handler
505 Tegal Wafer Lift Quartz Tip ANOD PIN, 49-042-002, 6 ea.
506 Tegal Wafer Transfer System Motorized Linear Selector Handler +Vexta C4412 PARTS
507 TEGAL XJET-11503 TCU Elbow Fitting, 416192
508 Tegal XJET-14004-2 HGST Carrier 6500 Centring Ring Assembly
509 Tegal/Bay Pneumatic BES-530-8-PCB 8-Port/Channel Solenoid Valve Control Board
510 Tegal/Comdel T1000E/RF Industrial/Laboratory 13.56MHz RF Power Supply Unit
511 TEGAL/DDI SHUTTLE INTERFACE CIRCUIT BOARD 00094072, 98-287-002 REV. A DVO 450-B
512 TEGAL1513e MOTOR CONTROLLER ITEM CE 1093
513 Thermo Couple (TC) TEGAL 80-700-xx JES-CE
514 Unit/Tegal CHF3 80SCCM — UFC-1000
515 Vacuum valve, KF-40. Tegal P/N
516 VAT 14046-PE44-1016 HV High Vacuum Gate Valve Tegal 6500 HRe
517 Veriflo NPR400Z (TEGAL) High Pressure Regulator w/ Vacuum Torr Gauge
518 Xycom MVME-490/1 Circuit Board Tegal 6550 Etcher

MSP-165000

All the Tegal 903e Plasma Etch Plasma Etcher semiconductor process equipment trademarks belongs to  Tegal , the original equipment manufacturer. All rights reserved. 

Plasma Etcher, Please Etching, Dry Etching, Dry Clean, Semiconductor Equipment, Used Semiconductor Equipment, Semiconductor Process Equipment, Tegal 901e, Tegal 903e, Tegal 901e TTW, Tegal 915,Tegal 701,Tegal 703,Tegal 801,Tegal 803,Tegal 981e,Tegal 903ePlasma Etcher, Plasma Etching, Dry Etching, Dry Clean, Semiconductor Equipment, Used Semiconductor Equipment, Semiconductor Process Equipment, Gasonics AE 2001, Microwave Etcher, Microwave Plasma Etcher, Microwave Etch, Downstream Plasma Etch

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