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Matrix Bobcat 209S Asher semiconductor process equipment

Matrix Bobcat 209S Asher semiconductor process equipment

Matrix 209S 8″ Asher

Model: Matrix Bobcat 209S Asher semiconductor process equipment

Category: Plasma Asher Plasma Descum

Original Equipment Manufacturer: Matrix Integrated Systems, Inc

Condition: Refurbished by seller

Wafer Size: 8 inch configuration.

Valid Time: Subject to prior sale

Categories: Asher Equipment, Matrix, Refurbished Hot Main Items

Description

Description

Model: Matrix Bobcat 209S Microwave Plasma Asher semiconductor process equipment

Category: Plasma Asher Plasma Descum

Original Equipment Manufacturer: Matrix Integrated Systems, Inc

Condition: Refurbished by seller

SN: 10222

Vintage:2001

Wafer Size: 8 inch configuration.

Valid Time: Subject to prior sale

Lead Time: 12 weeks

Location: Silicon Valley, CA, U.S.A.

Warranty: 12 months non-consumable parts.

Installation and training: Available at extra charge

Service Contract: Available at extra charge

Matrix Bobcat 209S Asher plasma Asher Plasma descum semiconductor equipment General Description

Power: 208VAC, 3 Phase, 50/60HZ
Installed in Wafer Fab until January 26th 2017
Fully Operational
Manuals (CD) Available with Tool


Asher Component	Details
Mainframe
Type	Standalone
Model	Matrix Bobcat 209S asher
Chambers
How Many?	1
Type	RIE
Process (e.g., Ash, Clean, Light Etch)	ASH
Load Locks/Load Plate
Open Cassette or SMIF	Open Cassette
How Many?	1
Robots
How Many?	1
Method of Transport:	Transfer Unit
Make/Models:	Rorze, RR701
RF Generators
How Many?	2
Make/Models:	Comdel FR-111R2, Microwave generator 3kw
Gas Box
Gases used per chamber:	3
Identify gases:	N2-1000, N2 -300, N2- 1000 ( gases run O2,N2, none)
MFC’s used (Make/Model):	MKS
Control System
PC or Control Rack?	PC
Software Type and Version:	Windows NT

All the Matrix Bobcat 209S Plasma Asher Plasma Descum semiconductor process equipment trademarks belongs to Matrix Integrated Systems, Inc, the original equipment manufacturer. All rights reserved.

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