Description
Equipment Model: SAMCO RIE 10NR Reactive Ion Etch System
Maker: SAMCO
Specifications: From the manual coming with the euipment
Photos: At Youtube
Condition: Used. It was complete, working in a Fab in USA. It was de-installed and stored in our company.
Price: Contact Us by filling the bottom form. Pls specify the condition you are going to buy at. Appreciate your time.
Quantity: 1 set
Vintage: 2007
Valid Time: Subject to prior sale without notice
Others: We sell it at any of the conditions: (1) AS IS; (2) Complete, Working, functional test; (3) Refurbished with installation and warranty.
Location: 000-A-E.D.-20220105
Description:
SAMCO RIE 10 NR – SAMCO RIE 10NR Reactive Ion Etch System | Dry Etching System / Tool with Thermo Electron Thrmoflex 900 Chiller
Info from O.E.M. website for your reference only.
Reactive Ion Etching System
RIE-10NR is a low-cost, high-performance, fully automatic, dry etching system that meets the most demanding process requirements using fluorine chemistry. A computerized touch panel provides user-friendly interface for parameter control and recipe storage.
Etching is performed with minimum sidewall deterioration and a high selectivity between materials. With its sleek, compact design, the RIE-10NR system requires minimal clean room space.
Dimensions:
Main Unit: 500(W) x 920(D) x 1510(H) mm
Pump Unit: 522(W) x 163(D) x 216(H) mm
Features:
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Highly selective anisotropic etching
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Fully automatic “one-button” operation with full manual override
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Easy-to-use computerized touch panel for parameter control, recipe entry and storage
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Process wafers up to ø8″ in diameter
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Sleek, compact design uses minimal clean room space
Applications:
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Stripping of passivation materials including silicon nitride, silicon dioxide and silicon oxynitride
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Anisotropic etching of all types of silicon-based films, compound semiconductors and refractory metals including Si, SiO2, Poly-Si, Si3N4, GaAs and Mo
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Manufacturing of micromachines
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Failure analysis
Pls contact us for the availability for the following items. These are only for end users and are subject to prior sale without notice. Appreciate your time.
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LOCATION: SS380EB
All the used equipment trademarks belongs to the O.E.M. , the original equipment manufacturer. All rights reserved.
