Description
Refurbished / Upgraded MPT RTP-3000 Rapid Thermal Processing System
SemiStar Corp. provides professionally refurbished and upgraded Modular Process Technology (MPT) RTP-3000 Rapid Thermal Processing (RTP) systems for semiconductor production and pilot lines. Each RTP-3000 system is inspected, tested, refurbished, and configured according to customer requirements before shipment.
The MPT RTP-3000 is a fully automated production RTP system designed for advanced semiconductor thermal processing applications. The RTP-3000 platform features automatic wafer handling, multi-gas processing capability, quartz processing chamber design, and advanced temperature control architecture for 3-inch to 8-inch semiconductor wafer processing applications.
Our team has extensive hands-on experience with RTP systems including AG Associates, MPT, Mattson, AST, Annealsys, and other legacy RTP platforms. This experience allows SemiStar to provide practical refurbishment, upgrade, spare parts, and long-term support solutions for production RTP systems.
Refurbished & Upgraded Condition
A refurbished or upgraded MPT RTP-3000 system from SemiStar is not simply an “as-is” used tool. Based on the final quotation and customer requirements, the system may include functional testing, cleaning, replacement of key worn components, chamber inspection, lamp and power system verification, gas and vacuum system check, robot inspection, temperature control verification, safety interlock testing, and process readiness review.
SemiStar can also support controller upgrades, PC replacement, obsolete component replacement, spare parts sourcing, and long-term service support for legacy RTP systems.
Applications
The MPT RTP-3000 system can be used for many rapid thermal processing applications, including:
- Contact alloying
- Implant activation
- Silicide formation
- Nitridation of metals
- Oxidation
- Glass reflow
- Compound semiconductor processing
- 3-inch to 8-inch silicon, GaAs, InP, GaN, SiC, MEMS, and advanced materials applications
Main Features
- Fully automated production RTP system
- Dual-arm robot wafer transport
- Dual cassette platform
- Quartz processing chamber
- Quartz wafer processing tray
- Four-layer tungsten halogen lamp array heating
- Advanced zone control for heating uniformity
- ERP+ internally cooled pyrometer
- Multiple MFC-controlled process gas lines
- Automatic recipe-based process control
Warranty, Installation & Long-Term Support
For refurbished and upgraded MPT RTP-3000 systems, SemiStar can provide warranty, installation assistance, start-up support, and training according to the final quotation and project scope. After the warranty period, SemiStar continues to support customers with spare parts, consumables, technical consultation, troubleshooting, refurbishment services, and upgrade options.
This long-term support capability is one of SemiStar’s key strengths. Customers are not only purchasing a refurbished RTP system; they are also working with a team experienced in automatic RTP wafer handling systems, legacy semiconductor equipment support, obsolete component replacement, and practical fab operation requirements.
Spare Parts Support
SemiStar Corp. supplies a wide range of replacement and consumable parts for RTP systems, including:
- Quartzware and quartz process tubes
- Pyrometers and thermocouples
- Susceptors and wafer carriers
- Lamp drivers and lamp assemblies
- PCB boards and electronic assemblies
- Robot components and controllers
- Chamber parts and thermal shields
- O-rings and sealing components
- Vacuum, gas, and cooling water components
- Power supply and electrical assemblies
- Obsolete and hard-to-find RTP replacement parts
Why Choose SemiStar Corp.
- Strong RTP refurbishment and upgrade capability
- Long-term spare parts and technical support
- Experience with automatic RTP production systems
- Knowledge of legacy RTP platforms and obsolete components
- Warranty and installation support available
- Support for 3-inch to 8-inch semiconductor wafer processing
- Cost-effective alternative to purchasing new RTP equipment
- Worldwide support for semiconductor fabs and production facilities
For specifications, availability, refurbishment scope, upgrade options, warranty, installation, or spare parts support for MPT RTP-3000 systems, please contact SemiStar Corp.
Contact SemiStar Corp.
Please contact SemiStar Corp. for current availability, refurbishment scope, upgrade options, warranty, installation, and long-term spare parts support for MPT RTP-3000 systems.