Description
CHA Industries Thermal Evaporator System. 2 sources. More photos for detail.
We can sell it at AS IS or complete, working, functional test. Pls contact us for more. Appreciate your time.
- Heating function
- Up to 8 inch substrate
- Crystals thickness function
- Diffusion Pump
- E-Beam evaporator is also available-Option at complete, working, functional test. 1 source. 2-4 sources are available(Not recommended)
Facility Requirements for reference only:
- Electrical requirements :AC 208V, 3 Phases, 100A, 50/60Hz, 5-wire with active neutral and equipment ground, Tolerable voltage +/-5%
- Water cooling requirements : Filtered 3.5 gpm at 50 psig inlet pressure at 60 to 80F. Chiller or PCW (Plant cooling water)
- CDA and Nitrogen requirements: CDA:~ 25 cfm at 60 to 125 psig inlet pressure, filtered and dried. N2 for purge:~ 10cfm 30psi.
- No wheel on the main unit, wheels on the other modules.
- LN cooling:1.5gallons
- Square footage of a footprint of each component of the system :
- Main Frame with chamber:50″(W) X60″(D)X125″(H)
- DC Power (for E-Beam function): 30″(W)X40″(D)X28″(H), ~5 feet to Main Frame, 2 feet to Dry Pump. Gray Area
- Control Cabinet(for E-Beam function) : 22″(W)X27″(D)X80″(H),2 feet to Main Frame
- Dry Pump: 16″(D)X38″(D)X22″(H) for reference. AS10. 2 to 3 feet to Main Frame. Gray Area.
Some comments on the facility requirements:
- CV8 power supply: 8KW, which requires 50A for the full load. Diffusion pump: 5KW, which requires 30A. Main unit: requires 20A. Power distribution box is used for split AC power supply to the major units. So, if you want to split AC power, at least two 30A and one 20A are required. And ebeam power only can run about 50-60% of full load.
- For the cooling water, a chiller is also good as a facility supply. 3.5 GPM flow can be used to select the module of the chiller.
Pls contact us for the availability of the following items. These are only for end users and are subject to prior sale without notice. Appreciate your time!
| 1 | CHA AUTOTECH II THERMAL EVAPORATOR / VACUUM DEPOSITION CHAMBER |
| 2 | CHA AUTOTECH II THERMAL EVAPORATOR / VACUUM DEPOSITION CHAMBER WITH E GUN |
| 3 | CHA GLOW DISCHARGE-Remove Oil, Epoxy and other Contaminations on the Surface |
| 4 | CHA Industries 5549-6 Adjustable Contamination Shield |
| 5 | CHA Industries 5549-9 Buss Bar |
| 6 | CHA Industries 7569-6 Heater Power Supply |
| 7 | CHA Industries Brass Vacuum Valve ST-12S 1-5/8″ Socket |
| 8 | CHA INDUSTRIES CP01010 PCB BOARD |
| 9 | CHA Industries Crucible Control Indicator EA-5 |
| 10 | CHA Industries Deposition Current 2 V Full Scale C.H.A E.A. 3 |
| 11 | CHA Industries E Beam Evaporator Chassis Stainless Steel Vacuum Chamber Parts |
| 12 | CHA Industries E-Beam Power Tube for Hi-Vac SE-600-RAP Deposition System |
| 13 | CHA Industries Fixture Control with Model SL15 MINARIK Shunt Wound Control Motor |
| 14 | CHA INDUSTRIES IG100N / IG100N |
| 15 | CHA Industries ION Tube Type IG100K Menlo Park |
| 16 | CHA Industries KEL-162 Vacuum Valve |
| 17 | CHA Industries Mark 50 E-Beam Eveporator |
| 18 | CHA Industries Mark 50 Vacuum Chamber, 32″ Dia |
| 19 | CHA Industries Model 02 Guage Controller |
| 20 | CHA INDUSTRIES MOTOR SPEED CONTROLLER |
| 21 | CHA Industries Motor Speed Controller 115V-3.4A-115W FOR PARTS |
| 22 | CHA Industries MPT-300-ST Sieve Trap |
| 23 | CHA Industries Panel With Cables / Wires For Thin Film Deposition Equipment |
| 24 | CHA Industries Planet Dome Hanger |
| 25 | CHA Industries Shutter Blade Set |
| 26 | CHA Industries Thermal Evaporation Source Vacuum Wafer System # SEC-600-RAP |
| 27 | CHA Industries Thermal Evaporation Source Vacuum Wafer System SEC-400-RAP |
| 28 | CHA Industries Type: IG100N ION Tube |
| 29 | CHA INDUSTRIES VACUUM KEL-162 VALVE |
| 30 | CHENBRO RM42200-1 1.2mm SGCC 4U Rackmount Feature-Advanced Industrial Server Cha |
| 31 | Granville Phillips gauge controller 260020, model 01, H4, CHA Industries |
| 32 | Granville Phillips/ CHA Industries Model 01 Gauge Controller (Cat. #: 260016) |
| 33 | Granville Phillips/ CHA Industries Model 01 Gauge Controller (Cat. #: 260020) |
| 34 | Granville Phillips/ CHA Industries Series 260 Model 01 Gauge Controller 260016 |
| 35 | Granville Phillips/ CHA Industries Series 260 Model 01 Gauge Controller 260022 |
| 36 | Hoffman A604CH/8PL CONTROL PANEL ENCLOSER |
| 37 | Key BA-75 Vacuum Shut Off Valve Manifold for CHA Industries Vacuum Pump |
| 38 | TELEMARK / CHA THERMAL EVAPORATOR / VACUUM DEPOSITION CHAMBER W/ E BEAM GUN |
| 39 | VARIAN CHA Industries LN2 Control Liquid Nitrogen |
| 40 | VARIAN THERMAL EVAPORATOR / VACUUM DEPOSITION CHAMBER |
SS380EB-OEM-00-20220412
