Description
Model: Plasma Therm 700 Series Wafer Batch Plasma Etcher Deposition
Gases: 8 lines with 8 MFCs. 2 of NH3 (100 SCCM) and 6 of N2 (4 of 1 SLM and 1 of 200 SCCM and 1 of 2SLM)
Photos: Download Here
Category: Etch RIE ICP and PECVD
Original Equipment Manufacturer: Plasma Therm
Condition: Used, Complete, working condition. We sell it at AS IS,Where IS condition. Refurbished and fully tested is optional at extra charge.
Valid Time: Subject to prior sale
Lead Time: Ready to go. 8 to 10 weeks for the Refurbished and fully tested condition.
Location: Silicon Valley, CA, U.S.A.
Warranty: No warranty for the AS IS,WHERE IS condition. 3 months for the Refurbished and fully tested condition.
Installation and training: Available at extra charge for the Refurbished and fully tested condition
Service Contract: Available at extra charge for the Refurbished and fully tested condition
Plasma Therm 700 Series Wafer Batch Plasma Etcher and PECVD
The items (ID SS5576-1-2-1-1-1) below are available now. Please contact us for the availability. They are only for end users and are subject to prior sale.
| Plasma-Therm | Dual Chamber 790 PECVD (on side Low Freq. & other side 13.56Mhz) could be converted to both sides 13.56MHz |
| Plasma-Therm | 790 PECVD upper Electrode Low Freq. & Lower electrode High Freq. |
| Plasma-Therm | 790 RIE Parts tool |
| Plasma-Therm | 790 PECVD |
| Plasma-Therm | 790 PECVD |
| Plasma-Therm | SLR 720 RIE |
| Plasma-Therm | SLR 720 RIE |
| Plasma-Therm | SLR 720 RIE |
| Plasma-Therm | SLR 720 RIE |
| Plasma-Therm | SLR 720 RIE |
| Plasma-Therm | VLR VersaWorks Cluster tool- one chamber PECVD |
| Plasma-Therm | VLN (Versaline) ICP – single wafer manual load |
| Plasma-Therm | VLN (Versaline) ICP – two wafer Brooks handler – manual load |
| YESHMDS | Class 10 – all Stainless Steel |
Keywords: plasma therm rie, plasma therm icp, plasma therm slr, plasma therm, plasma therm 790, plasma therm pecvd
