Description
Refurbished / Upgraded AG Associates Heatpulse 210 RTP System
SemiStar Corp. provides professionally refurbished and upgraded AG Associates Heatpulse 210 Rapid Thermal Processing (RTP) systems for universities, research institutes, and laboratory R&D applications. Each Heatpulse 210 RTP system is inspected, tested, refurbished, and configured according to customer requirements before shipment.
The AG Associates Heatpulse 210 was one of the earliest RTP systems introduced by AG Associates in the 1980s. The system was designed for small sample to 4-inch wafer rapid thermal processing applications and became one of the early RTP platforms widely used in semiconductor research and university laboratories.
Unlike later Heatpulse RTP systems using aluminum plate chamber structures with internal water passages, the Heatpulse 210 chamber uses a zinc steel chamber structure with brass copper water cooling tubes. The system is typically used for temperatures up to approximately 1000°C for research and development thermal processing applications.
Our team has more than 30 years of hands-on experience with AG Associates Heatpulse RTP equipment. This experience allows SemiStar to provide refurbishment, upgrade, spare parts support, and technical service for legacy RTP systems.
Refurbished & Upgraded Condition
A refurbished or upgraded Heatpulse 210 RTP system from SemiStar is not simply an “as-is” used tool. Based on the final quotation and customer requirements, the system may include functional testing, cleaning, replacement of key worn components, controller or PC upgrade, chamber inspection, lamp and power system check, gas system verification, safety interlock testing, and process readiness review.
SemiStar also provides refurbishment capability, obsolete component replacement, spare parts sourcing, and long-term service support for legacy AG Associates RTP systems.
Applications
The AG Associates Heatpulse 210 RTP system can be used for many rapid thermal processing applications, including:
- Rapid thermal annealing
- Implant activation
- Ohmic contact annealing
- Oxidation and nitridation processes
- Research and development thermal processing
- Small sample to 4-inch wafer applications
- University and institute laboratory processing
Main Features
- Early generation AG Associates RTP platform
- Small sample to 4-inch wafer processing capability
- Manual substrate load/unload operation
- Zinc steel chamber structure
- Brass copper water cooling tube design
- Maximum temperature approximately 1000°C
- Suitable for university and laboratory R&D applications
Warranty, Installation & Long-Term Support
For refurbished and upgraded Heatpulse 210 RTP systems, SemiStar can provide warranty, installation assistance, start-up support, and training according to the final quotation and project scope. After the warranty period, SemiStar continues to support customers with spare parts, consumables, technical consultation, troubleshooting, refurbishment services, and upgrade options.
This long-term support capability is one of SemiStar’s key strengths. Customers are not only purchasing a refurbished RTP system; they are also working with a team experienced in AG Associates Heatpulse RTP technology, legacy semiconductor equipment support, obsolete component replacement, and practical R&D thermal processing applications.
Spare Parts Support
SemiStar Corp. supplies a wide range of replacement and consumable parts for AG Associates Heatpulse RTP systems, including:
AG Associates Heatpulse Sapre Parts
- Quartzware and quartz process tubes
- Pyrometers and thermocouples
- Susceptors and wafer carriers
- Lamp drivers and lamp assemblies
- PCB boards and electronic assemblies
- Chamber parts and thermal shields
- O-rings and sealing components
- Vacuum, gas, and cooling water components
- Power supply and electrical assemblies
- Obsolete and hard-to-find RTP replacement parts
Why Choose SemiStar Corp.
- More than 30 years of AG Associates Heatpulse RTP experience
- Strong RTP refurbishment and upgrade capability
- Long-term spare parts and technical support
- Knowledge of legacy RTP platforms and obsolete components
- Support for university and research institute RTP applications
- Warranty and installation support available
- Cost-effective alternative to purchasing new RTP equipment
- Worldwide support for universities, institutes, and R&D laboratories
For specifications, availability, refurbishment scope, upgrade options, warranty, installation, or spare parts support for AG Associates Heatpulse 210 RTP systems, please contact SemiStar Corp.
Contact SemiStar Corp.
Please contact SemiStar Corp. for current availability, refurbishment scope, upgrade options, warranty, installation, and long-term spare parts support for AG Associates Heatpulse 210 RTP systems.
SS380-MSP-35