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PlasmaTherm 790RIE


PlasmaTherm 790 Series Reactive Ion Etching / Plasma Enhanced System RIE
Model: 790 10 RIE / PE MN Fr, Serial# PTI78289
Including: Leybold D40BCS, Neslab HX75 Chiller, Manuals. Pls contact us for more info if necessary. Appreciate your time!
Gases Used: Ar, SF6, N2, O2
It was from a Continuing Operations Wafer Processing Fab in Bay Area,CA USA on 12/10/2020. It was complete, working. System was purged of all contaminates, decommissioned, and moved to our facility in Morgan Hill,CA USA.
Complete, working, functional test is available at extra cost.

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The items (ID SS5576-1-2-1-1-1) below are available now. Please contact us for the availability. They are only for end users and are subject to prior sale.

Plasma-Therm Dual Chamber 790 PECVD (on side Low Freq. & other side 13.56Mhz) could be converted to both sides 13.56MHz
Plasma-Therm 790 PECVD upper Electrode Low Freq. &  Lower electrode High Freq.
Plasma-Therm 790 RIE Parts tool
Plasma-Therm 790 PECVD
Plasma-Therm 790 PECVD
Plasma-Therm SLR 720 RIE
Plasma-Therm SLR 720 RIE
Plasma-Therm SLR 720 RIE
Plasma-Therm SLR 720 RIE
Plasma-Therm SLR 720 RIE
Plasma-Therm VLR VersaWorks Cluster tool- one chamber PECVD
Plasma-Therm VLN (Versaline) ICP – single wafer manual load
Plasma-Therm VLN (Versaline) ICP – two wafer Brooks handler – manual load
YESHMDS Class 10 – all Stainless Steel

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