Description
PlasmaTherm 790 Series Reactive Ion Etching / Plasma Enhanced System RIE
Model: 790 10 RIE / PE MN Fr, Serial# PTI78289
Including: Leybold D40BCS, Neslab HX75 Chiller, Manuals. Pls contact us for more info if necessary. Appreciate your time!
Gases Used: Ar, SF6, N2, O2
It was from a Continuing Operations Wafer Processing Fab in Bay Area,CA USA on 12/10/2020. It was complete, working. System was purged of all contaminates, decommissioned, and moved to our facility in Morgan Hill,CA USA.
Complete, working, functional test is available at extra cost.
ID-SS380-OEM-2
The items (ID SS5576-1-2-1-1-1) below are available now. Please contact us for the availability. They are only for end users and are subject to prior sale.
| Plasma-Therm | Dual Chamber 790 PECVD (on side Low Freq. & other side 13.56Mhz) could be converted to both sides 13.56MHz |
| Plasma-Therm | 790 PECVD upper Electrode Low Freq. & Lower electrode High Freq. |
| Plasma-Therm | 790 RIE Parts tool |
| Plasma-Therm | 790 PECVD |
| Plasma-Therm | 790 PECVD |
| Plasma-Therm | SLR 720 RIE |
| Plasma-Therm | SLR 720 RIE |
| Plasma-Therm | SLR 720 RIE |
| Plasma-Therm | SLR 720 RIE |
| Plasma-Therm | SLR 720 RIE |
| Plasma-Therm | VLR VersaWorks Cluster tool- one chamber PECVD |
| Plasma-Therm | VLN (Versaline) ICP – single wafer manual load |
| Plasma-Therm | VLN (Versaline) ICP – two wafer Brooks handler – manual load |
| YESHMDS | Class 10 – all Stainless Steel |
