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AG Associates Heatpulse 4100 Rapid Thermal Processing System

Key Features of Heatpulse 4100 Rapid Thermal Processing System

The AG ASSOCIATES HEATPULSE 4100 rapid thermal processing system contains many capabilities which provide significant advantages over conventional batch processing in the production of VLSI circuits. Clean-room integrity, precise temperature control and measurement, software flexibility, and the physical structure of the system (designed for the production environment) are among these advantages.

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