AG Associates Heatpulse 8108 Utility Specification:
The following table is a summary of the utility specifications for the Heatpulse 8108 system:
| UTILITY | Flow Rate | Pressure | ||||
| Tube Cooling CDA or Utility N2 | 35 SCFM | 40 SCFM | 45 SCFM | 80 psi | 90 psi | 100 psi |
| Valve Actuation CDA or Utility N2 | <1 SCFM | <1 SCFM | <1 SCFM | 80 psi | 90 psi | 100 psi |
| Cooling Water Supply | 3 GPM | 3.5 GPM | 4 GPM | 30 psi | 40 psi | 60 psi |
| Cooling Water Return | 2.5 GPM | 3 GPM | 3.5 GPM | 20 psi | 30 psi | 40 psi |
| Gas Box Exhaust | 0 SCFM | 100 SCFM | 150 SCFM | .5″ H2O | .75″ H2O | ——– |
| Cooling Exhaust | 25 SCFM | 30 SCFM | 40 SCFM | .5″ H2O | .75″ H2O | ——– |
| Scavenger Hood Exhaust | 20 SCFM | 25 SCFM | 30 SCFM | .5″ H2O | .75″ H2O | ——– |
| Containment Exhaust (Optional) | 0 SCFM | 0 SCFM | 2 SCFM | .5″ H2O | .75″ H2O | ——– |
| Exhaust Manifold Outlet | 45 SCFM | 55 SCFM | 72 SCFM | .5″ H2O | .75″ H2O | ——– |
| Process Gas Exhaust (Scrubber) | 20 SCFM | 20 SCFM | 20 SCFM | 1″ H2O | 2″ H2O | 2.5″ H2O |
| Process Gas Supply | 20 SCFM | 20 SCFM | 20 SCFM | 20 psi | 30 psi | 55 psi |
| Recirculator Water Supply | 3 GPM | 5 GPM | 7 GPM | 40 psi | 50 psi | 60 psi |
The AG Associates Heatpulse 8108 system is a single-wafer, cassette-to-cassette rapid thermal processor, capable of processing in inert or corrosive ambients. The AG Associates Heatpulse 8108 Rapid Thermal Annealing System is built for the production environment. It is installed stand-alone (which can also be housed in a compact, through-the-wall frame , if desired).
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