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AG Associates Heatpulse 4100 Rapid Thermal Processing System

Applications of AG Associates Heatpulse 4100 Rapid Thermal Processor

The AG Associates Heatpulse 4100 Rapid Thermal Processor is a versatile tool that can be useful for many applications, such as (but not limited to):
• Silicon-dielectric growth
• Implant annealing
• Glass reflow
• Silicides formation and annealing
• Nitridation of metals
• Contact alloying
• Oxygen-donor annihilation

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