Utility Requirements of AG Associates Heatpulse 4100:
Power
Standard: 200, 208, 220, 240 VAC; 50 or 60 Hz; 70 A maximum; three-phase plus neutral plus ground
Optional: 200, 208 VAC; 40 A maximum; three-phase plus ground
380, 415 VAC; 50 Hz; 40 A; three-phase plus neutral and ground
Water Type:
Pre-filtered with conventional particulate filter (No DI Water); Closed-loop recirculator highly recommended
Metrology | Tester | Wafer Carriers
Main Refurbished Equipment
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AlN epitaxial layers,centrotherm c.OXIDATOR , high-temperature oxidation furnace , Rapid Thermal Processing system for silicon and compound semiconductors,c.RAPID 200,fully automatic loading system,centrotherm PECVD,c.PLASMA, c.DIFF,centrotherm highly versatile diffusion,wide band gap,c.CRYSCOO HTA,AP Systems,AP Systems Korea,KORONA RTP-12MP, KORONA RTP-12LPO , KORONA RTP-12LR/LPRR,Seebeck Coefficient / Electric Resistance Measurement System ZEM-3 series，Mini Lamp Annealer MILA-5050， Atmospheric Thermoelectric Module Evaluation System F-PEM，
