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You are here: Home > New Products > Rapid Thermal Process

Rapid Thermal Process

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RTP_Auto Series

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RTP_SA Series

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RTP_T Series

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New RTP Desktop

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New RTP Automatic

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Main New Equipment

Atomic Layer Deposition – ALD / PEALD
Dip Coater DC-1020
E-Beam & Thermal Evaporator
Furnace: Atmosphere CVD / PLCVD
Hybrid Systems
Ion Beam Milling
MOCVD, PA-MOCVD
Optical Coating System
Plasma Asher / Descum
Plasma Etch / RIE / ICP / DRIE / PEALE
PECVD / Microwave PECVD
Rapid Thermal Processors
Spin Coater ACE-200
Space Simulation & Metrology Instruments
Sputtering Deposition
Wet & Dry Cleaning, Reticle / Mask Cleaning
X-Ray Inspection

Main Refurbished Equipment

ALD PECVD CVD
Backend-Bonding
E-Beam & Thermal Evaporator
Mask Aligner
Metrology Instruments
Plasma Asher / Descum
Plasma Etchers
Plasma Etch / RIE / ICP / DRIE
Rapid Thermal Processors
SEM FEG
Sputtering Deposition
Tester
Wafer Probes

Main Accessories, Spare Parts & Service

Chillers Accessories
New Quartz Ceramic Silicon
New Si Wafers / Ingots
New Silicon Carbon Components
New TC Wafers
New Wafer Carriers Susceptor
Robot Controller Pre-Aligner Accessories
Vacuum Pumps / Compressor Accessories
AG Associates, AMAT, Brasnon, Brooks Equipe PRI, Gasonics, Lam, Matrix, Mattson, Novellus, Tegal, Tel

Plasma Asher Etch RIE ICP DRIE

Rapid Thermal Processors

Furnace CVD LPCVD

Evaporator Sputter PECVD ALD MOCVD

Wet Process: SRD Coater Cleaner Bench Box Washer

Metrology Inspection X-Ray SEM Tester Mask Aligner Wafer Probe

Main Accessories, Spare Parts & Service

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