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Upgrade Kits-Tegal2

Main Refurbished Equipment

Categories: Asher Equipment, Etcher Equipment, Tegal

Description
Additional information

Description

Upgrade Kits for Tegal 915 Tegal 965 Plasma Etch Plasma Etcher Dry Etch

Installation is available at extra cost depending on the location of the equipment.
Other replacement parts are available at extra costs.
Lead time: 8-20 weeks depending on PO time. We will do our best to expedite your PO if necessary without extra charge.
Please contact us for final purchase RFQ with an official quotation accordingly.
Please contact us if you have any questions.

Why upgrade your old used semiconductor process equipment ?

Low cost solution of obsolete components and parts.
New modules for obsolete modules in the original used equipment if applicable, such as RF Generator, Integrated solid robotic wafer transfer, PCBs.
Requirement of stability of the system
Requirement of network function (GEM/SECSII).
Requirement of PC control for data storage.
Requirement of GUI.
Requirement of more precise control.
Requirement of better repeatability, uniformity.
Requirement of easier maintenance, calibration, and trouble shooting.

Plasma Etcher, Plasma Etching, Dry Etching, Dry Clean, Semiconductor Equipment, Used Semiconductor Equipment, Semiconductor Process Equipment, Plasma RIE ,Reactive Ion Etch System, Reactive Ion Etch System, Tegal 901e, Tegal 903e, Tegal 901e TTW, Tegal 915,Tegal 701,Tegal 703,Tegal 801,Tegal 803,Tegal 981e,Tegal 903e,Tegal 915, Tegal 965, Tegal 405, Tegal 401

Additional information

Weight	15 lbs
Dimensions	24 × 24 × 12 in

Recommended Hot Equipment

Metrology | Tester | Wafer Carriers
Main Refurbished Equipment

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