Main Maker

Upgrade Kits-Matrix


Upgrade kits for  your used  Matrix  plasma asher descum etcher equipment.

  • PC controller
  • New PCBs
  • Touch screen monitor
  • Repair or replace bad parts if necessary at extra cost.
  • Integrated solid robotic wafer transfer is optional at extra cost.
  • Air cooling RF Generator is optional at extra cost.
  • Installation is available at extra cost depending on the location of the equipment.
  • Other replacement parts are available at extra costs.
  • Lead time: 8-20 weeks depending on PO time. We will do our best to expedite your PO if necessary without extra charge.
  • Models: Matrix 101; Matrix 102; matrix 103; Matrix 104; matrix 105; Matrix 106; Matrix 108; Matrix 111; matrix 201; Matrix 205; matrix 302; matrix 303; matrix 403 etc.
  • Please contact us for final purchase RFQ with an official quotation accordingly.
  • Please contact us if you have any questions.
Why upgrade your old used semiconductor process equipment ?
  1. Low cost solution of obsolete components and parts.
  2. New modules for obsolete modules in the original used equipment if applicable, such as RF Generator, Integrated solid robotic wafer transfer, PCBs.
  3. Requirement of stability of the system
  4. Requirement of network function (GEM/SECSII).
  5. Requirement of PC control for data storage.
  6. Requirement of GUI.
  7. Requirement of more precise control.
  8. Requirement of better repeatability, uniformity.
  9. Requirement of easier maintenance, calibration, and trouble shooting.

Plasma Asher, Plasma Descum, Dry Clean, Semiconductor Equipment, Used Semiconductor Equipment, Semiconductor Process Equipment, Matrix 105, Matrix 205, Matrix 303, Matrix 403,Matrix 106,Matrix 104, Matrix 102,Matrix 101, Matrix 10, System One Stripper, Model 105, System One Etcher, model 303, model 403,Matrix 1107, Plasma Etcher, Plasma Etching, Dry Etching, Dry Clean

Additional information

Weight 15 lbs
Dimensions 24 × 24 × 12 in

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers