Description
STS SPTS Electrostactic chuck E Chuck Echuck 2 Inch For STS ICP STS PRO ICP
Condition: Used. OEM Parts. Good condition. In original box.
Quantity: 1PC in stock. Backorder for new is available.
Valid Time: Subject to prior sale.
Location: Morgan Hill,CA95037 USA.
The following STS Multiplex RIE PECVD ICP DRIE HRM Bosch Process equipment Spare Parts are available:
| No | Description | Condition |
| 1 | TCP380 Turbo Controller | (USED) |
| 2 | Mag drive 2000 Turbo Controller | (USED) |
| 3 | Burst Fire Module BM1 | (NEW) |
| 4 | Mag Phase Unit (High Frequency) | (USED) |
| 5 | Mag Phase Unit. (Low Frequency) | (USED) |
| 6 | Cal 3200 Temperature Controller | (NEW) |
| 7 | Brooks VTR5 Vacuum Robot | (USED) |
| 8 | Brooks VTR5 Vacuum Robot Handset | (USED) |
| 9 | DCD 23 DI water controllers | (NEW) |
| 10 | DCD 53 DI Water Controller | (NEW) |
| 11 | PM7 VAT Valve Controller | (USED) |
| 12 | 600 Series MKS valve Controller | (USED) |
| 13 | Mag 900 Turbos | (REFURBISHED) |
| 14 | VAC1/HVC1 Control Module | (REFURBISHED) |
| 15 | VAC3/HVC1 Control Module | (REFURBISHED) |
| 16 | VAC 1 Control Module | (REFURBISHED) |
| 17 | VAC 3Y Control Module | (REFURBISHED) |
| 18 | PFC 1A Control Module | (REFURBISHED) |
| 19 | PFC 1X Control Module | (REFURBISHED) |
| 20 | PFC 1Y Control Module | (REFURBISHED) |
| 21 | AMC1 Auto Matching Modules | (REFURBISHED) |
| 22 | AMC2 Auto Matching Modules | (REFURBISHED) |
| 23 | TMC1 Temperature Control Module | (REFURBISHED) |
| 24 | HBC1 Helium Backside Module | (REFURBISHED) |
| 25 | HBC2 Helium Backside Module | (REFURBISHED) |
| 26 | EPD1 End Point Module | (REFURBISHED) |
| 27 | HCU5 Heater Module | (REFURBISHED) |
| 28 | HCU9 Heater Control Module | (REFURBISHED) |
| 29 | TZC1 Control Module Module | (REFURBISHED) |
| 30 | TLZ1 Control Module | (REFURBISHED) |
| 31 | Interlock Display Module | (NEW) |
| 32 | LLH1 Module | (REFURBISHED) |
| 33 | TPH520 Turbo Pump | (NEW) |
| 34 | TMH261P Turbo Pump | (USED) |
Location: UK
Valid time: Subject to prior sale without notice.
Contact us (sales@semistarcorp.com) for the availability and more info pls. Appreciate your time.
ID-OEM-000-V-8
