Description
KLA-Tencor Spare Parts
OEM, Refurbished & Reverse-Engineered Replacement Parts
SemiStar supplies spare parts for legacy KLA-Tencor metrology equipment to help customers extend equipment life, reduce downtime, and lower maintenance costs.
Whether you need an OEM replacement, a refurbished assembly, or a reverse-engineered solution for an obsolete component, our experienced engineering team can help.
Contact us today for pricing, availability, or technical assistance.
Spare Parts Inventory
Our current inventory includes:
- Field Illumination Shutter (FISO) Assemblies Part Number 52-0420
- H2 Handler End Effectors : Part Number 52-0375
- UV Cutoff Filter Assemblies: Part Number 52-0412
- Neutral Density (ND) Filter Assembly: Part Number 52-0286
- Focus Flipper (Focus Aperture Pneumatic Actuator): Part Number 52-0316
- SE Flipper Assemblies – KLA F5X only: Part Number: 52-0916
- Vacuum Connector Assemblies
- Electrical Connector Assemblies
Additional inventory is continually being added.
Reverse Engineering Services
Many legacy KLA-Tencor spare parts are no longer available from the OEM.
We specialize in reverse engineering obsolete mechanical assemblies and replacement components to help keep your equipment operating.
Typical turnaround time for mechanical replacement parts is 1–2 weeks after receiving a reference sample.
We also evaluate PCB assemblies and other discontinued components on a case-by-case basis.
Supported Equipment
KLA-Tencor
- RS-55
- RS-75
- RS-100
- UV-1050
- UV-1080
- UV-1250
- UV-1280
- ASET F5 / F5X
- AIT Systems
- HRP-220 Stylus Profiler
Why Choose SemiStar?
- OEM, refurbished, and reverse-engineered replacement parts
- Cost-effective alternative to discontinued OEM components
- Fast response and worldwide support
- Technical assistance from experienced metrology engineers
- Support for legacy semiconductor metrology systems
Need a Part Not Listed?
If you cannot find the part you need, please contact us.
Our engineering team can identify replacement parts, evaluate obsolete components, and develop reverse-engineered solutions for many legacy KLA-Tencor systems.
We are not affiliated with or endorsed by KLA Corporation. The part numbers and equipment models are referenced solely for compatibility identification purposes.