Description
Field Illumination Shutter Assembly (FISO)
The Field Illumination Shutter Assembly (FISO) is a replacement solution for aging and obsolete shutter assemblies used in KLA UV-Series and ASET metrology systems. Designed utilizing PPS-CF (Carbon Fiber Reinforced Polyphenylene Sulfide) construction, the assembly provides reliable shutter operation, accurate position feedback, and simplified serviceability while maintaining compatibility with existing tool architecture.
FEATURES
● Direct replacement for 52-0420 assemblies
● PPS-CF structural construction for enhanced rigidity and thermal stability
● Integrated open/closed position sensing
● Pneumatic actuation utilizing commercially available components
● Corrosion-resistant design
● Lightweight construction
● Serviceable architecture
● Functional testing prior to shipment
● Semiconductor manufacturing compatible materials
MATERIALS & CONSTRUCTION
Main Mounting Bracket – PPS-CF
Shutter Beam Block – PPS-CF
Sensor Mounts – PPS-CF
Fasteners – Stainless Steel
Pneumatic Tubing – Cleanroom-Compatible Polyurethane
Pneumatic Actuator – Industrial Pneumatic Cylinder
Position Sensors – Magnetic Reed Sensors
(Stainless Steel, PEKK, & Engineering Grade Polymers Available for Custom Changes)
PPS-CF ADVANTAGES
● High stiffness and rigidity
● Excellent dimensional stability
● Low moisture absorption
● Chemical resistance
● Elevated temperature capability
● Lightweight compared to metal assemblies
● Corrosion resistance
● Suitable for semiconductor manufacturing environments
TECHNICAL SPECIFICATIONS
Assembly Type – Pneumatic Optical Shutter
Position Feedback – Open / Closed Reed Sensors
Actuation – Pneumatic
Operating Media – Clean Dry Air (CDA)
Mounting – OEM-Compatible
Serviceability – Field-Serviceable Components
Operating Environment – Semiconductor Manufacturing
Structural Material – PPS-CF
COMPATIBLE SYSTEMS
KLA-Tencor Systems
● UV-1050
● UV-1080
● UV-1250
● UV-1280
ASET Systems
● F5
● F5X
SUPPORTED APPLICATIONS
● Field Illumination Control
● Optical Path Isolation
● Lamp Calibration Routines
● Dark Reference Measurements
● Measurement Sequencing
● Legacy System Refurbishment Programs
● Preventative Maintenance Spare Inventory
AVAILABLE SERVICES
● New Assembly – Complete ready-to-install FISO assembly.
● Refurbishment Service – Rebuild of customer-supplied assemblies with replacement pneumatic components, sensors, tubing, and hardware.
● Custom Engineering – Reverse engineering, legacy semiconductor equipment support, replacement components, end effectors, and custom manufacturing solutions.
INCLUDED WITH ASSEMBLY:
● Complete Field Illumination Shutter Assembly
● Pneumatic Cylinder Installed
● Reed Sensors Installed
● Functional Testing Completed
● Ready for Installation
WARRANTY
We provide a 14-day functional warranty from the date of delivery against defects in materials or workmanship.
Warranty does not cover:
● Improper installation
● Customer modifications
● Contamination
● Physical damage
● Misuse or abuse
● Damage resulting from tool failures unrelated to the supplied assembly
TECHNICAL SUPPORT
Remote installation support is available.
Onsite field service and technical support are available under separate quotation.
CUSTOM ENGINEERING
We also provide:
● Reverse Engineering
● Replacement Component Manufacturing
● Legacy Semiconductor Equipment Support
● Custom Mechanical Design
● Technical Consultation
We are not affiliated with or endorsed by KLA Corporation.52-0420 is referenced solely for compatibility identification purposes.
ABAR-002