Description
UV CUTOFF FILTER ASSEMBLY
The UV Cutoff Filter Assembly is a replacement solution for aging and obsolete ultraviolet cutoff filter assemblies used in KLA UV-Series metrology systems. Designed as a direct OEM-compatible replacement, the assembly provides reliable attenuation of ultraviolet wavelengths while maintaining optical transmission characteristics required for accurate spectroscopic ellipsometry measurements. The assembly is manufactured using semiconductor-compatible materials and is intended to simplify maintenance while extending the operational life of legacy KLA UV-Series equipment.
FEATURES
● Direct replacement for OEM UV Cutoff Filter Assembly
● OEM-compatible mounting configuration
● Precision optical filter element 400nm Long Pass Filter
● Corrosion-resistant construction
● Lightweight design
● Field-serviceable architecture
● Functional testing prior to shipment
● Dual Magnetic Reed Position Sensors
● Designed for legacy system support
MATERIALS & CONSTRUCTION
Filter Housing – PEKK
Optical Filter – UV Cutoff Optical Glass
Retaining Hardware – PPS-CF
Fasteners – Stainless Steel
Surface Finish – Black Anodized (where applicable)
UV CUTOFF FILTER ADVANTAGES
● Restores optical performance
● Consistent ultraviolet attenuation
● Improved measurement repeatability
● OEM-compatible installation
● Corrosion-resistant construction
● Long service life
● Suitable for semiconductor manufacturing environments
TECHNICAL SPECIFICATIONS
● Assembly Type – Optical UV Cutoff Filter
● Filter Type – Ultraviolet Cutoff
● Mounting – OEM-Compatible
● Serviceability – Field-Serviceable
● Operating Environment – Semiconductor Manufacturing
● Construction – Precision Optical Assembly
COMPATIBLE SYSTEMS
KLA UV-Series
● UV-1050
● UV-1080
● UV-1250
● UV-1280
SUPPORTED APPLICATIONS
● Spectroscopic Ellipsometry
● Optical System Refurbishment
● Preventative Maintenance Spare Inventory
● Legacy System Refurbishment Programs
● Optical Path Maintenance
● Lamp System Maintenance
AVAILABLE SERVICES
● New Assembly – Complete ready-to-install UV Cutoff Filter Assembly.
● Refurbishment Service – Inspection and refurbishment of customer-supplied optical filter assemblies where applicable.
● Custom Engineering – Reverse engineering, legacy semiconductor equipment support, replacement optical assemblies, and custom manufacturing solutions.
INCLUDED WITH ASSEMBLY:
● Complete UV Cutoff Filter Assembly
● Precision Optical Filter Installed
● OEM-Compatible Housing
● Functional Testing Completed
● Ready for Installation
WARRANTY
We provide a 14-day functional warranty from the date of delivery against defects in materials or workmanship.
Warranty does not cover:
● Improper installation
● Customer modifications
● Contamination
● Physical damage
● Misuse or abuse
● Damage resulting from tool failures unrelated to the supplied assembly
TECHNICAL SUPPORT
Remote installation support is available.
Onsite field service and technical support are available under separate quotation.
CUSTOM ENGINEERING
We also provide:
● Reverse Engineering
● Replacement Component Manufacturing
● Legacy Semiconductor Equipment Support
● Custom Mechanical Design
● Technical Consultation
We are not affiliated with or endorsed by KLA Corporation. 52-0412 is referenced solely for compatibility identification purposes.
ABAR-003