Semiconductor Spare Parts & Service

SemiStar Corp. supplies semiconductor spare parts, accessories, consumables, and process support solutions for universities, R&D laboratories, pilot production lines, and semiconductor fabs. We support RTP, plasma, vacuum, wafer handling, metrology, deposition, etching, thermal processing, and thin-film applications.

We generally do not recommend providing field service or performing a complete refurbishment on used equipment of unknown condition at the customer’s site. Until the equipment has been thoroughly evaluated, its actual condition, missing or failed components, and hidden problems are unknown. Without immediate access to the necessary spare parts, test equipment, and engineering resources, on-site troubleshooting and rebuilding are often inefficient, costly, and may not resolve all underlying issues. This can result in extended downtime, multiple service visits, and frustration for both the customer and our field engineers. Our recommended approach is to ship the equipment to SemiStar’s engineering facility in Morgan Hill, California for a comprehensive Engineering Evaluation. Based on the evaluation results, we can restore the equipment to full working condition, perform a complete refurbishment, and/or upgrade and reconfigure it to meet your current production requirements. After the refurbishment is completed, SemiStar will continue to provide long-term spare parts, field service, technical support, and future upgrade services throughout the equipment’s service life. This approach minimizes project risk, ensures the highest equipment reliability and performance, and provides the lowest total cost of ownership over the long term.