Description
H2 HANDLER END EFFECTOR ASSEMBLY
The H2 Handler End Effector Assembly is a replacement solution for aging and obsolete wafer handling end effectors used on Metrology KLA UV-Series and RS-Series. Designed using PPS-CF (Carbon Fiber Reinforced Polyphenylene Sulfide), the assembly provides reliable wafer handling, excellent dimensional stability, and field-serviceable construction while maintaining compatibility with existing handler architecture. The design utilizes a dual-vacuum wafer contact surface in place of the OEM four-port design while maintaining secure wafer retention and reliable handling performance.
FEATURES
• Cleanroom Safe Class 1+
• PPS-CF structural construction
• Low Outgassing
• High rigidity and dimensional stability
• Lightweight construction
• Corrosion resistant
• Field serviceable architecture
• Functional testing prior to shipment
• Designed for legacy system support
MATERIALS & CONSTRUCTION
• Main Body – PPS-CF
• Fasteners – Stainless Steel
• Vacuum Ports – Precision Machined
• Mounting Hardware – 4 retainer bolts
COMPATIBLE SYSTEMS
KLA RS-Series
• RS-55
• RS-75
KLA UV-Series
• UV-1050
• UV-1250
SUPPORTED APPLICATIONS
• Wafer Transfer
• Wafer Pickup
• Wafer Placement
• Legacy System Refurbishment
• Preventive Maintenance Inventory
• Handler Rebuild Programs
AVAILABLE SERVICES
• New Assembly — Complete ready-to-install End Effector Assembly.
• Refurbishment Service — Evaluation and replacement of worn or damaged customer-supplied assemblies where applicable.
• Custom Engineering — Reverse engineering, legacy semiconductor equipment support, replacement components, custom manufacturing solutions, and engineering consultation.
WARRANTY
We provide a 14-day functional warranty from the date of delivery against defects in materials or workmanship.
Warranty does not cover:
● Improper installation
● Customer modifications
● Contamination
● Physical damage
● Misuse or abuse
● Damage resulting from tool failures unrelated to the supplied assembly
TECHNICAL SUPPORT
Remote installation support is available.
Onsite field service and technical support are available under separate quotation.
CUSTOM ENGINEERING
We also provide:
● Reverse Engineering
● Replacement Component Manufacturing
● Legacy Semiconductor Equipment Support
● Custom Mechanical Design
● Technical Consultation
We are not affiliated with or endorsed by KLA Corporation. 52-0375 is referenced solely for compatibility identification purposes.
ABAR-001