Description
AG Associates Heatpulse RTP Spare Parts & Service
SemiStar Corp. professionally provides spare parts, technical service, refurbishment, and upgrade support for AG Associates Heatpulse Rapid Thermal Processing (RTP) systems. Our engineering and support team has more than 30 years of hands-on experience with AG Associates Heatpulse RTP equipment, supporting semiconductor manufacturers, universities, research institutes, and compound semiconductor fabs worldwide.
Over the years, we have supported many leading 2-inch to 8-inch semiconductor fabs using AG Associates Heatpulse RTP systems for silicon, GaAs, InP, GaN, SiC, MEMS, and advanced materials applications. Our experience allows us to provide practical and cost-effective solutions for maintaining, upgrading, and extending the lifetime of legacy RTP systems.
Professional Spare Parts Support
SemiStar Corp. supplies a wide range of new, refurbished, and replacement spare parts for AG Associates Heatpulse RTP equipment, including:
- Quartzware and quartz tubes

- Pyrometers and thermocouples
- Susceptors and wafer carriers
- Lamp drivers and lamp assemblies
- PCB boards and electronic assemblies
- Robot components and controllers
- Chamber parts and shields
- O-rings and sealing components
- Vacuum and gas handling components
- Power supply and electrical assemblies
- Obsolete and hard-to-find replacement parts
Many parts are available from stock or with short lead times to help customers minimize equipment downtime and maintain stable production operation.
RTP Service, Refurbishment & Upgrade Support
In addition to spare parts supply, SemiStar Corp. provides professional support services for AG Associates Heatpulse RTP systems, including:
- Equipment troubleshooting and repair support
- RTP refurbishment and rebuild services
- Controller and PC upgrade solutions
- Installation and start-up assistance
- Process and application support
- Preventive maintenance support
- Legacy system life-extension solutions
- Technical consultation for aging RTP equipment
Why Choose SemiStar Corp.
- More than 30 years of AG Associates Heatpulse RTP experience
- Support for 2-inch to 8-inch RTP systems
- Professional semiconductor equipment background
- Strong knowledge of legacy and obsolete RTP platforms
- Fast response for spare parts and technical inquiries
- Cost-effective solutions compared with OEM replacement costs
- Worldwide support for fabs, universities, and R&D facilities
For more information about AG Associates Heatpulse RTP spare parts, please visit: SemiStar AG Associates RTP Parts & Accessories
All the Heatpulse 8800 Rapid Thermal Processing , Rapid Thermal Annealing equipment trademarks belongs to AG Associates , the original equipment manufacturer. All rights reserved.




