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STS MULTIPLEX -ICP Bosch 4″

STS MULTIPLEX ICP Used, Complete, working condition. We sell it at AS IS,Where IS condition. Refurbished and fully tested is optional at extra charge.

Category: Sold Items

Description

Description

SOLD

STS MULTIPLEX ICP Description for reference.

Model: STS MULTIPLEX ICP

Category: DRIE ICP

Original Equipment Manufacturer: Surface Tech Sys ( STS )

Condition: Used, Complete, working condition. We sell it at AS IS, Where IS condition. Refurbished and fully tested is optional at extra charge.

Vintage: 2000

Location: Nanjing,China

Valid Time: Subject to prior sale

Warranty: No warranty for the AS IS,WHERE IS condition. 3 months for the Refurbished and fully tested condition.

Installation and training: Available at extra charge for the Refurbished and fully tested condition

Service Contract: Available at extra charge for the Refurbished and fully tested condition

Info on the system: (Detail)

Process Type:Polymers
Gas box type:onboard
Gas line: C4F8 200sccm、 SF6 200sccm、O2 100sccm、Ar 50sccm、CHF3 100sccm、CF4 100sccm、CO2 100sccm. We can upgraded it with 7 gas lines with 6 of MFCs including Cl2.
System Type:Multiplex ICP
Type of loadlock:Single Wafer Loadlock
Process Modules:1 unit Modules :ASE. Clamp , 4 inch now. Can be upgraded for 5″,6″,8″ at refurbished condition.
Electronics Rack Location:Standard layout proposed
Low electrode Chiller:Affinity RWA-012
Pumps and pumping lines: leybold Turbo Pump
Chamber Backing Pump:N/A. Original Edwards iH80
Loadlock Pump:N/A. original Varian TS600
Generators : ENI ACG-10B

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