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STS MULTIPLEX ICP-4inch

STS MULTIPLEX ICP Used, Complete, working condition. We sell it at AS IS,Where IS condition. Refurbished and fully tested is optional at extra charge.

SKU: STS Multiplex ICP -1 Category: Tags: , ,

Description

STS MULTIPLEX ICP Description for reference.

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Model STS MULTIPLEX ICP

Category:  DRIE ICP

Original Equipment Manufacturer: Surface Tech Sys ( STS )

Condition: Used, Complete, working condition. We sell it at AS IS,Where IS condition. Refurbished and fully tested is optional at extra charge.

Vintage: 2000

Location: Nanjing,China

Valid Time: Subject to prior sale

Warranty: No warranty for the AS IS,WHERE IS condition. 12 months for the Refurbished and fully tested condition.

Installation and training: Available at extra charge for the Refurbished and fully tested condition

Service Contract: Available at extra charge for the Refurbished and fully tested condition

Info on the system: (Detail)

  1. Process Type:Polymers
  2. Gas box type:onboard
  3. Gas line: C4F8 200sccm、 SF6 200sccm、O2 100sccm、Ar 50sccm、CHF3 100sccm、CF4 100sccm、CO2 100sccm
  4. System Type:Multiplex ICP
  5. Type of loadlock:Single Wafer Loadlock
  6. Process Modules:1 unit Modules :ASE
  7. Electronics Rack Location:Standard layout proposed
  8. Low electrode Chiller:Affinity RWA-012
  9. Pumps and pumping lines: leybold Turbo Pump
  10. Chamber Backing Pump:Edwards iH80
  11. Loadlock Pump:Varian TS600
  12. Generators : ENI ACG-10B

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