STS MULTIPLEX ICP Description for reference.
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Model: STS MULTIPLEX ICP
Category: DRIE ICP
Original Equipment Manufacturer: Surface Tech Sys ( STS )
Condition: Used, Complete, working condition. We sell it at AS IS,Where IS condition. Refurbished and fully tested is optional at extra charge.
Valid Time: Subject to prior sale
Warranty: No warranty for the AS IS,WHERE IS condition. 12 months for the Refurbished and fully tested condition.
Installation and training: Available at extra charge for the Refurbished and fully tested condition
Service Contract: Available at extra charge for the Refurbished and fully tested condition
Info on the system: (Detail)
- Process Type:Polymers
- Gas box type:onboard
- Gas line: C4F8 200sccm、 SF6 200sccm、O2 100sccm、Ar 50sccm、CHF3 100sccm、CF4 100sccm、CO2 100sccm
- System Type:Multiplex ICP
- Type of loadlock:Single Wafer Loadlock
- Process Modules:1 unit Modules :ASE
- Electronics Rack Location:Standard layout proposed
- Low electrode Chiller:Affinity RWA-012
- Pumps and pumping lines: leybold Turbo Pump
- Chamber Backing Pump:Edwards iH80
- Loadlock Pump:Varian TS600
- Generators : ENI ACG-10B