Description

SOLD

STS MULTIPLEX ICP Description for reference.

Model:  STS MULTIPLEX ICP

Category:  DRIE ICP

Original Equipment Manufacturer: Surface Tech Sys ( STS )

Condition: Used, Complete, working condition. We sell it at AS IS, Where IS condition. Refurbished and fully tested is optional at extra charge.

Vintage: 2000

Location: Nanjing,China

Valid Time: Subject to prior sale

Warranty: No warranty for the AS IS,WHERE IS condition. 3 months for the Refurbished and fully tested condition.

Installation and training: Available at extra charge for the Refurbished and fully tested condition

Service Contract: Available at extra charge for the Refurbished and fully tested condition

Info on the system: (Detail)

1. Process Type:Polymers
2. Gas box type:onboard
3. Gas line: C4F8 200sccm、 SF6 200sccm、O2 100sccm、Ar 50sccm、CHF3 100sccm、CF4 100sccm、CO2 100sccm. We can upgraded it with 7 gas lines with 6 of MFCs including Cl2.
4. System Type:Multiplex ICP
5. Type of loadlock:Single Wafer Loadlock
6. Process Modules:1 unit Modules :ASE. Clamp , 4 inch now. Can be upgraded for 5″,6″,8″ at refurbished condition.
7. Electronics Rack Location:Standard layout proposed
8. Low electrode Chiller:Affinity RWA-012
9. Pumps and pumping lines: leybold Turbo Pump
10. Chamber Backing Pump:N/A. Original Edwards iH80
11. Loadlock Pump:N/A. original Varian TS600
12. Generators : ENI ACG-10B