Description
Model: STS Mutiplex Cluster
Category: Used Equipment List – Etch RIE ICP
Original Equipment Manufacturer: Surface Tech Sys ( STS )
Condition: In warehouse, Used, Complete, working condition. We sell it at AS IS,Where IS condition. Refurbished and fully tested is optional at extra charge.
Valid Time: Subject to prior sale
Lead Time: Ready to go. 12 to 16 weeks for the Refurbished and fully tested condition.
Location: Asia
Warranty: No warranty for the AS IS,WHERE IS condition. 3 months for the Refurbished and fully tested condition.
Installation and training: Available at extra charge for the Refurbished and fully tested condition
Service Contract: Available at extra charge for the Refurbished and fully tested condition
Surface Tech Sys (STS) STS Mutiplex Cluster Description:
STS Multiplex Cluster ICP Etcher, 8″
Brooks VCE4 and Mtr5 robot
Turbo on the wafer handler
C033 Cluster handler
(2) Temperature controlled lids
Loadlock: Brooks VCE 4 with manual door
Corema chiller on Metal ICP chamber
ICP chamber (Metal etch)
12 process gas manifold
Bias capabilities
Chuck: heat exchanger, no electric
Turbo pumps: TMH100
ICP chamber(Dielectric Etch)
12 process gas manifold
Bias capabilities
Processed: silicon etch
Chuck: heat exchanger, no electric
Turbo pump: TMH100
ICT chamber (Asher / Stripper)
4 gases: N2, O2, NH3, CF4
Turbo pump
NOAH chillers
Vacuum Pumps are not included
