Description

Model:STS multi-chamber Cluster tool with one chamber and cassette station

Photos: Download here.

Category:  Used Equipment List – Etch RIE ICP

Original Equipment Manufacturer: Surface Tech Sys ( STS , SPTS )

Condition: Used, Good Condition. Crated now.

SN: C027

Wafer Size: 8 inch

Valid Time: Subject to prior sale without notice

Lead Time: Immediately after receipt of payment.

Location: San Jose,CA, U.S.A.