Model:STS multi-chamber Cluster tool with one chamber and cassette station
Photos: Download here.
Category: Used Equipment List – Etch RIE ICP
Original Equipment Manufacturer: Surface Tech Sys ( STS , SPTS )
Condition: Used. We sell it at AS IS condition only.
Wafer Size: 8 inch
Valid Time: Subject to prior sale without notice
Lead Time: Immediately after receipt of payment.
Location: Morgan Hill,CA USA.