Model:STS multi-chamber Cluster tool with one chamber and cassette station
Photos: Download here.
Category: Used Equipment List – Etch RIE ICP
Original Equipment Manufacturer: Surface Tech Sys ( STS , SPTS )
Condition: Used, Good Condition. Crated now.
Wafer Size: 8 inch
Valid Time: Subject to prior sale without notice
Lead Time: Immediately after receipt of payment.
Location: San Jose,CA, U.S.A.