Main Maker

Upgrade Kits-RTP


Upgrade kits for your used Rapid Thermal Processing equipment

  • PC controller
  • New PCBs
  • New frame for desktop equipment
  • Customer must ship the original desktop RTPs to us for this upgrade kits.
  • Repair or replace bad parts if necessary at extra cost.
  • Installation is available at extra cost depending on the location of the equipment.
  • Other replacement parts are available at extra costs.
  • Lead time: 8-20 weeks depending on PO time. We will do our best to expedite your PO if necessary without extra charge.
  • Models: AG Associates Heatpulse 210;AG Associates Mini-pulse 310;AG Associates Heatpulse 410;AG Associates Heatpulse 610;AG Associates Heatpulse 4100;AG Associates Heatpulse 4100S;AG Associates Heatpulse 4108;AG Associates Heatpulse 8108;AG Associates Heatpulse 8800;   Modular Process Technology MPT-600S; Modular Process Technology MPT-600XP; Modular Process Technology MPT-800S; Modular Process Technology MPT-800XP; Modular Process Technology RTP-3000
  • Please contact us for final purchase RFQ with an official quotation accordingly.
  • Please contact us if you have any questions.
Why upgrade your old used semiconductor process equipment ?
  1. Low cost solution of obsolete components and parts.
  2. New modules for obsolete modules in the original used equipment if applicable, such as RF Generator, Integrated solid robotic wafer transfer, PCBs.
  3. Requirement of stability of the system
  4. Requirement of network function (GEM/SECSII).
  5. Requirement of PC control for data storage.
  6. Requirement of GUI.
  7. Requirement of more precise control.
  8. Requirement of better repeatability, uniformity.
  9. Requirement of easier maintenance, calibration, and trouble shooting.


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Additional information

Weight 15 lbs
Dimensions 24 × 24 × 12 in

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