Main Maker

Upgrade Kits-Lam


Upgrade Kits for Lam Research 

  • PC controller
  • Touch screen monitor
  • Repair or replace bad parts if necessary at extra cost.
  • Air cooling RF Generator is optional at extra cost.
  • Installation is available at extra cost depending on the location of the equipment.
  • Other replacement parts are available at extra costs.
  • Models: Lam AutoEtch 490 AutoEtch 590 AutoEtch 690 AutoEtch 790, Lam Rainbow 4420 ,Lam Rainbow 4520, Lam Rainbow 4620,Lam Rainbow 4720;Lam Rainbow 4428 ,Lam Rainbow 4528, Lam Rainbow 4628,Lam Rainbow 4728;Lam Rainbow 4426 ,Lam Rainbow 4526, Lam Rainbow 4626,Lam Rainbow 4726;Lam Rainbow 4400 ,Lam Rainbow 4500, Lam Rainbow 4600,Lam Rainbow 4700
  • Lead time: 8-20 weeks depending on PO time. We will do our best to expedite your PO if necessary without extra charge.
  • Please contact us for final purchase RFQ with an official quotation accordingly.
  • Please contact us if you have any questions.
Why upgrade your old used semiconductor process equipment ?
  1. Low cost solution of obsolete components and parts.
  2. New modules for obsolete modules in the original used equipment if applicable, such as RF Generator, Integrated solid robotic wafer transfer, PCBs.
  3. Requirement of stability of the system
  4. Requirement of network function (GEM/SECSII).
  5. Requirement of PC control for data storage.
  6. Requirement of GUI.
  7. Requirement of more precise control.
  8. Requirement of better repeatability, uniformity.
  9. Requirement of easier maintenance, calibration, and trouble shooting.

Plasma Etcher, Please Etching, Dry Etching, Dry Clean, Semiconductor Equipment, Used Semiconductor Equipment, Semiconductor Process Equipment, Lam AutoEtch 490, Lam AutoEtch 590, Lam AutoEtch 690, Lam AutoEtch 790, Lam Rainbow 4400, Lam Rainbow 4420, Lam Rainbow 4428, Lam Rainbow 4500, Lam Rainbow 4520, Lam Rainbow 4528, Lam Rainbow 4600, Lam Rainbow 4620, Lam Rainbow 4628, Lam Rainbow 4700, Lam Rainbow 4720, Lam Rainbow 4728

Additional information

Weight 15 lbs
Dimensions 24 × 24 × 12 in

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers