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Plasmatherm 790 Series

Plasmatherm 790 Series Dry Etching, 8″ For Oxide or Nitride

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Plasmatherm 790 Series Dry Etching, small -8″ For Oxide or Nitride.

Gases: It was configured with 4 of Tylan N2 MFCs: 100 SCCM/ 100 SCCM/ 200 SCCM/ 200SCCM

RF Generator: It was configured with AE RFX-600.

Condition: We sell it at refurbished and upgraded condition with 12 months warranty.

Location: Silicon Valley, CA, U.S.A.

Installation and training: Available at extra charge.

Service Contract: Not necessary.

Facility, pump, chiller: Customer is responsible for these.

The item is only for end user. The item is subject to prior sale without notice.

The items (ID SS5576-1-2-1-1-1) below are available now. Please contact us for the availability. They are only for end users and are subject to prior sale.

Plasma-Therm Dual Chamber 790 PECVD (on side Low Freq. & other side 13.56Mhz) could be converted to both sides 13.56MHz
Plasma-Therm 790 PECVD upper Electrode Low Freq. &  Lower electrode High Freq.
Plasma-Therm 790 RIE Parts tool
Plasma-Therm 790 PECVD
Plasma-Therm 790 PECVD
Plasma-Therm SLR 720 RIE
Plasma-Therm SLR 720 RIE
Plasma-Therm SLR 720 RIE
Plasma-Therm SLR 720 RIE
Plasma-Therm SLR 720 RIE
Plasma-Therm VLR VersaWorks Cluster tool- one chamber PECVD
Plasma-Therm VLN (Versaline) ICP – single wafer manual load
Plasma-Therm VLN (Versaline) ICP – two wafer Brooks handler – manual load
YESHMDS Class 10 – all Stainless Steel

Please contact us for more information on the product:

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Additional information

Weight 145 lbs

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