NOVELLUS Parts

Description

The following NOVELLUS Parts are only for end user. Please contact us if you have any questions. Subject to prior sale without notice. Appreciate your time!

1. NOVELLUS 02-00343-02 Harness Assy, Sensor 12.0″
2. NOVELLUS 02-00343-03 Harness Assy, Sensor 17.5″
3. NOVELLUS 02-00343-04 Harness Assembly, Sensor, 26.5″
4. NOVELLUS 02-111903-00 RF Feedthru
5. NOVELLUS 03-00057-00 Harness Assy, Loadlock Door
6. NOVELLUS 03-00095-02 Assy, Cable CA93
7. NOVELLUS 03-00145-00 Wire, Ground, Wrist & Elbow
8. NOVELLUS 03-00295-00 Cable Assy Robot Sensor
9. NOVELLUS 03-00296-00 Cable, Lift & Extension Sensor
10. NOVELLUS 10-135228-00 Tube Assy, INJ, 0.010, VCR
11. NOVELLUS 15-00027-02 Guide, Nozzle Adjuster
12. NOVELLUS 15-000410-00 Fliter, UV, Lexan
13. NOVELLUS 15-00043-02  Ceramic Adjuster, Gas Plate
14. NOVELLUS 15-00216-01 Holder, LL Backfill Filter
15. NOVELLUS 15-00229-00 Nut, Hex, ½-20
16. NOVELLUS 15-00309-00(1.33″) / 15-00309-01 (1.50″)  Hanger, Nozzle, 150mm & 200mm
17. NOVELLUS 15-00311-00 Cap, Electric Feedthru
18. NOVELLUS 15-00341-00 Screw
19. NOVELLUS 15-00371-00 Nut, Heater Feedthru
20. NOVELLUS 15-00372-00 Washer, Heater Feedthru
21. NOVELLUS 15-00385-00 Nut, 10-32 UNF-2B
22. NOVELLUS 15-00386-00 Washer, Flat, #10
23. NOVELLUS 15-00399-02 Screw, Top Spindle
24. NOVELLUS 15-00399-02 SCRW, HEX, 8-32x.96
25. NOVELLUS 15-00399-03 Screw, Top Spindle
26. NOVELLUS 15-00399-04 Screw, Top Spindle
27. NOVELLUS 15-00399-05 Screw, 1.12LG, Top Spindle
28. NOVELLUS 15-00401-00 Spindle Shaft
29. NOVELLUS 15-00457-00 Screw, Heater Strap
30. NOVELLUS 15-00475-00 Insulator, Gas Feedthru, Ceramic
31. NOVELLUS 15-00480-00 Geneva Driver
32. NOVELLUS 15-00485-00/15-00486-00  Bracket, Paddle, 150mm & 125mm
33. NOVELLUS 15-00507-00 Spacer, Ext Seal
34. NOVELLUS 15-00516-00 Bushing, Rotor Brake
35. NOVELLUS 15-00558-01 Sleeve, Heater, Lead, Ceramic, 2.0″
36. NOVELLUS 15-00558-02  Sleeve, Heater, Lead, Ceramic (Modify)
37. NOVELLUS 15-00558-02 Sleeve, Heater, Lead, Ceramic, 2.75″
38. NOVELLUS 15-00567-00 Tube,TC, Ceramic
39. NOVELLUS 15-00578-00 Sleeve, Flange, Feedthru, Ceramic
40. NOVELLUS 15-00578-00 Sleeve, Flange, Feedthru, Ceramic
41. NOVELLUS 15-00653-00  Clamp,Spindle Hub Mount
42. NOVELLUS 15-00654-00 Clamp, Rotation Adjustment
43. NOVELLUS 15-00680-00 Sleeve, TC Ceramic
44. NOVELLUS 15-00684-00  Cap, TC, Ceramic
45. NOVELLUS 15-00685-00 Feedthru, O-Seal, Ultra-Torr Feedthru, Inner
46. NOVELLUS 15-00686-00 Washer, Feedthru
47. NOVELLUS 15-00698-00 Screw, Fork
48. NOVELLUS 15-00699-01 Fork, Finger, 150mm
49. NOVELLUS 15-00699-02 Fork, Finger, 200mm
50. NOVELLUS 15-00700-00 Plate, Fork Retainer, Bottom, 200mm
51. NOVELLUS 15-00701-00 Plate, Fork Retainer, Bottom,150mm
52. NOVELLUS 15-00702-00 Top Plate, 200mm 8″
53. NOVELLUS 15-00703-00 Top Plate, 150mm
54. NOVELLUS 15-00721-00 Washer, #8
55. NOVELLUS 15-00729-00 Clamp, Flat
56. NOVELLUS 15-00731-00 Bushing, Keyed
57. NOVELLUS 15-00742-00 Tube, TC Ceramic
58. NOVELLUS 15-00935-00 Screw
59. NOVELLUS 15-00951-00 Cup, Screw Cover
60. NOVELLUS 15-01111-00/15-01123-00  Paddle, Optical 150mm & 125mm
61. NOVELLUS 15-024881-00 Fork, End, Cap
62. NOVELLUS 15-032014-00 Quartz Window (Sapphire Coating)
63. NOVELLUS 15-032016-00 Ceramic Pin For Heater Block
64. NOVELLUS 15-032452-00 View Port For Speed
65. NOVELLUS 15-032631-00 / 15-00730-00 Flange, Keyed
66. NOVELLUS 15-032939-00   200mm Moer Ring 2.25mm
67. NOVELLUS 15-034333-00 Tube Process Injector Tube, Ceramic, Process 4″
68. NOVELLUS 15-050160-15 Tube, Injector, Hi-Purity, 1.5″
69. NOVELLUS 15-053394-02 Fork, Finger, Min Contact Area, 200mm
70. NOVELLUS 15-054434-03   2.5mm Moer Ring
71. NOVELLUS 15-101482-00 Fork, Toplate A Antideflect
72. NOVELLUS 15-101482-01 Fork, Toplate B Antideflect
73. NOVELLUS 15-101482-02 Fork, Toplate C Antideflect
74. NOVELLUS 15-103913-02 Clamp, Strap, Feedthru
75. NOVELLUS 15-10489-00 Clamp Chamber Viewport
76. NOVELLUS 15-107698-00 Cap, Ceramic, Feedthru
77. NOVELLUS 15-108174-00 Cup, Screw Cover
78. NOVELLUS 15-108307-00 Clamp, RF Strap
79. NOVELLUS 15-11263-02 Sapphire View Port For Speed
80. NOVELLUS 15-114331-00 Screw
81. NOVELLUS 15-116097-00 Blankoff, Slit Valve Seal, Clear
82. NOVELLUS 15-119059-00 Screw
83. NOVELLUS 15-130746-01 Fork, Finger, Min Contact Area, 200mm
84. NOVELLUS 15-250878-00    Screw, Moer Ring
85. NOVELLUS 15-252807-00 DLCM-S LL Door Shim(0.75mm)
86. NOVELLUS 15-258837-00 Clamp, RF Strap
87. NOVELLUS 15-267661-00 C3 Altus Holder
88. NOVELLUS 15-277463-00 Plate, Fork Retainer, Bottom, 200mm, Ceramic
89. NOVELLUS 16-00092-00 Wire, Insulated (Short)
90. NOVELLUS 16-033932-00/16-033931-00/16-271392-00  Shower Head 6/8/12″
91. NOVELLUS 17-00094-01 Strap, LF Bias, Alum 6″
92. NOVELLUS 17-00148-00 Spring, Fork
93. NOVELLUS 17-101596-00 Retainer, Fork, Seq.
94. NOVELLUS 17-103987-00 RF Strap for 8″
95. NOVELLUS 17-110412-00 Screen, RF Shield, Etched, Short
96. NOVELLUS 19-00056-00 Feedthru, HI Volt, Alter Detail
97. NOVELLUS 19-00111-01 Lead-Screw
98. NOVELLUS 19-00144-00 Gear, Motor-Rotation
99. NOVELLUS 19-00145-00 Gear, Motor-Ext
100. NOVELLUS 19-00155-00 / 19-00155-01 Heater Block 150mm
101. NOVELLUS 19-00266-01  Robot Extension Motor
102. NOVELLUS 19-00267-00 C1 Robot Rotation Motor
103. NOVELLUS 20-00144-00 Belt Timing, 150mm
104. NOVELLUS 20-00153-00 Ball Ceramic
105. NOVELLUS 20-00212-00 Nut, 8-32, UNC-2B
106. NOVELLUS 20-00257-00 Washer, Spring, 1.25 OD
107. NOVELLUS 20-107688-00 Crank Bolt, VAT Valve, 200mm
108. NOVELLUS 22-00021-00 O-Ring
109. NOVELLUS 22-00021-01 O-Ring
110. NOVELLUS 22-00118-00 O-Ring
111. NOVELLUS 22-00134-00 O-Ring
112. NOVELLUS 22-00136-00 O-Ring, LL Left Plate
113. NOVELLUS 22-00152-00 O-Ring Top PL
114. NOVELLUS 22-00174-00 O-Ring, 6.234 X 0.139
115. NOVELLUS 22-00217-00 O-RING, 0.484 X 0.139″
116. NOVELLUS 22-00236-00 O-ring
117. NOVELLUS 22-00288-00 T-Seal
118. NOVELLUS 22-00304-00 Extensow Shaft Bearing 1.50OD
119. NOVELLUS 22-00324-00 Seal, Lip, Extension
120. NOVELLUS 22-00343-00 Sleeve, ⅜ O-Seal, Ultra-Torr, Shower Head
121. NOVELLUS 22-00344-00 O-Ring
122. NOVELLUS 22-00345-00 O-Ring
123. NOVELLUS 22-00358-00 O-Ring,  0.239 x 0.070
124. NOVELLUS 22-00612-00 Valve, Dia, NC, ¼ VCR-F, AIR OPR
125. NOVELLUS 22-00658-00 O-Ring
126. NOVELLUS 22-026085-02 Veriflo Diaphragm Valve 945Y
127. NOVELLUS 22-026373-00   Filter, IN:ML, OUT:FML Pall GLFN1100VMF4 Gaskleen Gas Line Filter
128. NOVELLUS 22-026373-01 Filter, Millipore, Male Inlet, Female Outlet
129. NOVELLUS 22-028382-00   Seal, Flanged Lower
130. NOVELLUS 22-100613-00 Sapphire Ball
131. NOVELLUS 22-101053-00   Seal Assembly
132. NOVELLUS 22-104042-00 O-ring, Injector
133. NOVELLUS 22-112748-00 Ferro Spindle O-Ring
134. NOVELLUS 22-122556-00  UHP High Flow Diaphragm Sealed Valve, ¼ in. Female HVCR
135. NOVELLUS 22-122969-04 Valve 930 LOTO Valve M-M
136. NOVELLUS 22-134586-00 High Performance Point-Of-Use Regulators
137. NOVELLUS 22-146276-00 Valve, Pneu, Diaphragm 2WY, 125 PSI
138. NOVELLUS 22-146297-00  Diaphragm Valve 930y2nc/ncfsfffb
139. NOVELLUS 22-156667-00  UHP High Flow Diaphragm Sealed Valve, ¼ in. Female HVCR, Indicator Switch
140. NOVELLUS 22-177150-00 VCR Double Unlon
141. NOVELLUS 22-254880-00 High Purity Manifold Valve 930y2nc/ncsls07148
142. NOVELLUS 27-00010-01 Thermo Couple Type J ⅛”
143. NOVELLUS 27-00079-00 Thermocouple, Type J
144. NOVELLUS 27-00127-00 Thermocouple, Type E, LG
145. NOVELLUS 27-00149-00 Manometer
146. NOVELLUS 27-10157-00 Digital Dynamics Input Output Controller
147. NOVELLUS 27-104339-00  Endpoint Detector
148. NOVELLUS 31-00114-00 Relay SSR, 90A
149. NOVELLUS 33-00002-01 Spindle Rotation Motor
150. NOVELLUS 34-00141-00 Switch, Push Button
151. NOVELLUS 34-133701-00 Relay, 1P, 12VDC RHIB-U DC12V
152. NOVELLUS 34-149543-00 Relay Spdt, 12VDC, 10A, Omron
153. NOVELLUS 34-309953-02 Switch, Press, ATM, VCR, D89, 3-2, WASCO
154. NOVELLUS 60-00013-00 Cylinder, Pneumatic LL Door ASSY Cylinder, AIR 4.5" STROKE
155. NOVELLUS 60-00033-00  Filter Backfill
156. NOVELLUS 60-00091-00 Cylinder, Pneumatic, Spindle Lift
157. NOVELLUS 60-00180-00 TC Gauge,Vacuum Transducer, 25KF Flange
158. NOVELLUS 60-103549-00 Valve, 1.50FX2.19MX2.07M
159. NOVELLUS 60-168723-00 Check Valve
160. NOVELLUS Amplifier Modulated 31-00249-00
161. NOVELLUS Clamp, Strap, Feedthru (Small) 15-103913-02
162. NOVELLUS      DLCM O-Ring
163. NOVELLUS DLCM-S LL Door Shim(0.2mm)
164. NOVELLUS DLCM-S LL Door Shim(0.5mm)
165. NOVELLUS Endponit View Port
166. NOVELLUS EV Valve
167. NOVELLUS Ferro Spindle Shaft
168. NOVELLUS Ferro Spindle, 200mm 02-106507-00
169. NOVELLUS Fliter, UV, Lexan 7.5cm
170. NOVELLUS Gasket, Slider
171. NOVELLUS Gaskleen 6101 Filter Assembly
172. NOVELLUS Hexagon Socket Set Screw 8#32
173. NOVELLUS O-ring & Steel Ball of Gate Valve 8
174. NOVELLUS O-Ring 22-00391-00 / 22-112743-00
175. NOVELLUS Paddle, Ceramic Blade, High Purity
176. NOVELLUS PCB, EPROM RAM With Jumpers 19-00122-00
177. NOVELLUS Plate, Fork Retainer, Bottom, 150mm, Ceramic
178. NOVELLUS Protection Cap for Hanger Nozzle
179. NOVELLUS Relay, 2P, 24VDC
180. NOVELLUS Sapphire Viewport
181. NOVELLUS Seal
182. NOVELLUS       Shaft of Spindle
183. NOVELLUS Sleeve Ceramic Modify
184. NOVELLUS Spindle Rotate Motor Clamp
185. NOVELLUS Spring, Fork Modify
186. NOVELLUS SS-6-UTN Stainless Steel Ultra-Torr Vacuum Fitting for ⅜ in. Nut
187. NOVELLUS Steel Ball & O-ring of Gate Valve 4″
188. NOVELLUS Strap, RF
189. NOVELLUS Timing Belt for C2
190. NOVELLUS T-Seal Spindle Shaft
191. NOVELLUS Valve Diaphragm 1-4 F NC
192. NOVELLUS Veriflo Diaphragm Valve 930
193. NOVELLUS View Port For Speed Nanofill
194. NOVELLUS Window Sapphire 15-110411-00
195. NOVELLUS Wire, Insulated (YNS030M1)
196. NOVELLUS Wire, Insulated (YNS030M2)
197. NOVELLUS YNS043

ID-SS5813W