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SemiStar Corp. Semiconductor Equipment Parts Service

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Wafers

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InSb – Indium Antimonide

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InP – Indium Phosphide

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InAs – Indium Arsenide

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GaSb – Gallium Antimonide

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GaP Wafers

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GaAs Wafers – Gallium Arsenide

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Super Thin Silicon Wafers

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Float Zone Si Wafers 2-6 inch

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8″ Si Wafers (8 inch Si wafers)

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6″ Si Wafers (6 inch Si wafers)

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5″ SI Wafers (5 inch Si wafers)

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4″ Si Wafers (4 inch Si wafers)

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We have recently acquired the following equipment from a 4-inch GaAs Fab in the USA: 8 sets of Lam AutoEtch 490 plasma etchers; 5 sets of Matrix 105 plasma asher/descum systems; 4 sets of AG Heatpulse RTP systems (models 4100 and 8108).

Main New Equipment & Parts Service

Vacuum Rapid Thermal Processors
Furnace :Atmosphere CVD/ PLCVD
Plasma Asher / Descum
Plasma Etch /RIE/ ICP/ DRIE/ PEALE
- Ion Beam Milling
Atomic Layer Deposition -ALD/PEALD
- Hybrid Systems
PECVD / Microwave PECVD
MOCVD, PA-MOCVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Optical Coating System
Wet & Dry Cleaning, Reticle/Mask Cleaning
Space Simulation & Metrology Instruments
Accessories, Spare Parts & Service

Main Refurbished Equipment and Accessories

Rapid Thermal Processors
Plasma Asher /Descum
Plasma Etchers
Plasma Etch/ RIE/ ICP/ DRIE
ALD PECVD CVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Metrology Instruments
Wafer Probes
SEM FEG
Tester
Mask Aligner
Robot Controller Aligner Accessories
Vacuum Pumps /Compressor Accessories
Chillers Accessories

Main Rapid Thermal Processors

Rapid Thermal Processors

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers

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InSb – Indium Antimonide

InP – Indium Phosphide

InAs – Indium Arsenide

GaSb – Gallium Antimonide

GaP Wafers

GaAs Wafers – Gallium Arsenide

Super Thin Silicon Wafers

Float Zone Si Wafers 2-6 inch

8″ Si Wafers (8 inch Si wafers)

6″ Si Wafers (6 inch Si wafers)

5″ SI Wafers (5 inch Si wafers)

4″ Si Wafers (4 inch Si wafers)