Description
Tystar Mini Tytan 1600 Horizontal Furnace, 1 Stack, 150 mm, LPCVD:
– 150mm
– Reduced Footprint
– 1 Tube
– Configured for LPCVD
50 wafer capacity, 18 inch flat zone, main cabinet is 63 long, 54 tall, 30 deep. Source cabinet and Furnace cabinet are one frame.
18kva, 3 phase, 480volt service.
Includes:
– Used Quartz
– Host Supervisor
– Furnace Cabinet joined with
– Source Cabinet
– Loading assist arm, to help push wafers into position.
Condition: Unit pulled from a working service, however due to lack of power supply unable to fully test. Sold As-Is. Complete,working,functional test or refurbished conditions are optional at extra cost.
Valid time: Subject to prior sale without notice.
Contact us (sales@semistarcorp.com) for more info pls. Appreciate your time.
ID-SS380-e
