Main Maker

Tytan 1600


Tystar Mini Tytan 1600 Horizontal Furnace, 1 Stack, 150 mm, LPCVD:

 – 150mm
 – Reduced Footprint
 – 1 Tube
 – Configured for LPCVD
50 wafer capacity, 18 inch flat zone, main cabinet is 63 long, 54 tall, 30 deep. Source cabinet and Furnace cabinet are one frame.
18kva, 3 phase, 480volt service.
 – Used Quartz
 – Host Supervisor
 – Furnace Cabinet joined with
 – Source Cabinet
 – Loading assist arm, to help push wafers into position.

Condition: Unit pulled from a working service, however due to lack of power supply unable to fully test. Sold As-Is. Complete,working,functional test or refurbished conditions are optional at extra cost.

Valid time: Subject to prior sale without notice.

Contact us ( for more info pls. Appreciate your time.


The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers