Model: STS Multiplex DRIE Tool (Bosch Process)
Photos: download here
Manual and description: download here .
Category: Etch RIE ICP
Original Equipment Manufacturer: Surface Tech Sys ( STS, SPTS )
Condition: Used, Complete, working condition. We sell it at AS IS,Where IS condition. Complete,working and fully tested is optional at extra charge.
Valid Time: Subject to prior sale
Lead Time: Ready to go at AS IS,WHERE IS condition. 10 to 12 weeks for the Complete,working and fully tested condition.
Warranty: No warranty for the AS IS,WHERE IS condition. 3 months for the Complete,working and fully tested condition.
Installation and training: Available at extra charge for the complete,working and fully tested condition
Service Contract: Available at extra charge for the Refurbished and fully tested condition
Surface Tech Sys (STS) STS Multiplex DRIE Tool (Bosch Process) Description:
Loaklock, single wafer process, manual load/unload.
Typical Application: ICP，DRIE
Gases: N2, CH4, H2, O2, Ar, SF6, CL2, N2, SiCl4, N2
Wafer Size: 4 inch and 3 inch. Capable upgrade for up to 8 inch