Description

Model:  STS Multiplex DRIE Tool (Bosch Process)

Category:  Etch RIE ICP

Original Equipment Manufacturer: Surface Tech Sys ( STS, SPTS )

Condition: Used, Complete, working condition. We sell it at AS IS,Where IS condition. Complete,working and fully tested is optional at extra charge.

Valid Time: Subject to prior sale

Lead Time: Ready to go at AS IS,WHERE IS condition. 10 to 12 weeks for the Complete,working and fully tested condition.

Location:  Nanjing,Jiangsu,China

Warranty: No warranty for the AS IS,WHERE IS condition. 3 months for the Complete,working and fully tested condition.

Installation and training: Available at extra charge for the complete,working and fully tested condition

Service Contract: Available at extra charge for the Refurbished and fully tested condition

Surface Tech Sys (STS)  STS Multiplex DRIE Tool (Bosch Process) Description:

Loaklock, single wafer process, manual  load/unload.

Typical Application: ICP，DRIE

Vintage: 2000

Gases: N2, CH4, H2, O2, Ar, SF6, CL2, N2, SiCl4, N2

Chuck: ESC type

Wafer Size: 4 inch and 3 inch. Capable upgrade for up to 8 inch