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STS Multiplex DRIE Tool (Bosch Process)-4inch

STS Multiplex DRIE Tool (Bosch Process) :Used, Complete, working condition. We sell it at AS IS,Where IS. Complete,working and fully tested is optional.

Description

Model STS Multiplex DRIE Tool (Bosch Process)

Photos: download here

Manual and description: download here .

Category:  Etch RIE ICP

Original Equipment Manufacturer: Surface Tech Sys ( STS, SPTS )

Condition: Used, Complete, working condition. We sell it at AS IS,Where IS condition. Complete,working and fully tested is optional at extra charge.

Valid Time: Subject to prior sale

Lead Time: Ready to go at AS IS,WHERE IS condition. 10 to 12 weeks for the Complete,working and fully tested condition.

Location: 380 Tennant Ave,Morgan Hill,CA95037

Warranty: No warranty for the AS IS,WHERE IS condition. 3 months for the Complete,working and fully tested condition.

Installation and training: Available at extra charge for the complete,working and fully tested condition

Service Contract: Available at extra charge for the Refurbished and fully tested condition

Surface Tech Sys (STS)  STS Multiplex DRIE Tool (Bosch Process) Description:

Loaklock, single wafer process, manual  load/unload.

Typical Application: ICP,DRIE

Vintage: 2000

Gases: N2, CH4, H2, O2, Ar, SF6, CL2, N2, SiCl4, N2

Wafer Size: 4 inch and 3 inch. Capable upgrade for up to 8 inch

 

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