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SemiStar Corp. Semiconductor Equipment Parts Service

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Etcher

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PlasmaTherm LAPECVD 1130

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STS Multiplex ICP Plasma Etcher

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8″ Plasmatherm Versaline ICP

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STS Multiplex ICP DRIE

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STS MESC Multiplex ICP ASE Bosch Process

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ø300 mm SAMCO RIE-300NR

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Wafer Manufacturing Equipment

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Plasma Therm SLR 770 RIE

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AXIC Benchmark IsoLok ICP

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SBT South Bay Technology IBS/E

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4-Wave Z-Flex IBD/IBE

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AutoEtch 490

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Equipment Inventory (Updated)

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Resell-SS7270

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Asher
ALD/CVD/PECVD
Etcher
Evaporator
Metrology
RTP
Sputter
Tester
Carrier
Service

SemiSystem
Furnace Oven
MFC UPC
AIXTRON CCS 3X2 MOCVD Like New
West Bond Wire Bonder
KLA Tencor P6
Nikon Microscope AFX-II
Olympus BX60 Microscope
Micro IION RIE
Quartz Ceramic Silicon parts

Other Products

** We try to meet any of your budgets **

ALD-Atomic layer deposition
Atomic Force Microscope
CD-SEM/SEM/FIB/CDEM
Chiller
Coater Developer Clean
CVD LPCVD
Dicing Saw
Die Bonder
Ellipsometer
Evaporator
Four Point Probe
Furnace Oven
GLOVE BOX
Implanter
Lapping/Grinder/CMP
Laser equipment
Lamination Mounter
Leak Detector Vacuum Pump
Map Sorter/ Wafer Sorter
Mask Aligner
MBE
Metalworking Equipment on sale
Metrology Instruments
Microscope
MOCVD
Ozone stripper Cleaner
PECVD
Pick & Place
Plasma Asher
Plasma Etcher RIE ICP DRIE
Probe Station
Profiler
PVD Coater-Others
Robot Controller Prealigner
RTP RTA RTO RTN
Seam Sealer
Soldering Systems
Sputtering Equipment
Stepper/Lithography
Target
Tester
Wafer
Wet Process
Wire Bonder
X-Ray XRD
XeF2/HF
**-HOT Spare Parts

CUSTOMER STATEMENT OF ASSURANCE
Typical equipment for Lab/Fab
Partner Products Inventory
Auctions

Etch RIE ICP DRIE

Applied Materials Plasma II

Lam Rainbow 4420 E ver1.5.1

Lam Rainbow 4728

March PX-250 Plasma Asher Etcher

Matrix 302

Matrix 303

Oxford Plasmalab System 133-SN-417718

Oxford Plasmalab System 133 SN-417728

Oxford Plasmalab System 100-SN417795

Plasma Etch BT1

Plasma Etch PE-100 Series

STS MULTIPLEX -ICP Bosch 4″

STS Multiplex ICP Plasma Etcher

STS Multiplex ICP MACS

Technics PE-11A

Tegal 901e Plasma Etcher

Tegal 903e Plasma Etch

Oxford Plasmalab 800Plus RIE

AST Plasma Etch

SAMCO RIE-10NT

Vacuum Pump

Edwards Spectron 5000 Leak Detector

Ebara A07V

Ebara A10S

Ebara A30W

On Sale FEG SEM :

Thin Film Equipment

Airco Temescal FC-1800

S200 ALD DEPOSITION SYSTEM

AMAT AMP-3300 PECVD

CPA S-Gun Sputter Deposition

CVC AST-601 Sputter

Emscope SC-650 Series

Kurt J Lesker Dual Thermo

Perkin-Elmer 4400 Sputter

Perkin-Elmer 4450 Sputter

Plasma Therm 700

Plasmalab CVD-2

Plasma Thermal 790 PECVD

Temescal BJD-1800 E-Beam

Temescal BJD-1800 -TES

Temescal FC-1800 -TES

Plasmalab 80 Plus PECVD

Temescal FC-1800

Varian 3118 E-Beam Thermal

Varian 3120 EB Evaporator

Varian 3120 Evaporator

CHA Industries Mark 50

Temescal FC-1800 Evaporator

TES FC-1800 E-Beam Evaporator

Perkin-ELmer 2400-8L

AIXTRON CCS 3X2 MOCVD reactor

Mask Aligner/Stepper

Neutronix PLA501 Mask Aligner

Canon PLA-501 F crated-8

Canon PLA-501 F crated-9

Canon PLA-501 F Mask Aligner 2 sets

Neutronix PLA 500/501 Mask Aligner

Neutronix PLA-545 UV Mask Aligner

Wet Process Plating Equipment

Coppy MHY Plating

EEJA Manual Plater Model #4

Gold Techni TG25T Bath Rhodium 225

Semitool SD250 Spin Dryer

STI Semitool Spin Rinse Dryer ST-260

Technic Inc. Portable Wet Bench

Wet Process Equipment

Plasma Asher Descum

Branson IPC 3000-Manual Batch

Branson S3003-Manual Batch

Gasonics Aura 2000LL -8 inch

Gasonics L3500 – 6,8 inch

Gasonics L3510 -6,8 inch

LFE PP-151-9-Manual Batch

March PX-250 Plasma Asher

Matrix 105- 2-6 inch

Matrix 205 – 2-6 inch

Matrix Bobcat 209S -8 inch

Matrix System One Stripper

Plasma Etch BT1-Manual Batch

Technics Macro Series 2000

YES R1-manual Batch

YES R3 -manual Batch

Chillers

SMC HRS018-WN-20-M

Fisher Scientific Chiller

FTS System MAXI COOL

Neslab CFT-25 Recirculator

NESLAB CFT-33

NESLAB CFT-75

Neslab RTE-110 Chiller

NESLAB SYSTEM I

NESLAB SYSTEM II

PolyScience 6000 Series

PolyScience 9102A Chiller

PolyScience 9105 Chiller

SMC HRS018-AN-20

SMC HRS024-AN-20

Temptronic TP03000A-2300-1

Thermo Fisher Scientific Chiller

Thermo Fisher Neslab 7

Thermo MERLIN Series m150

ThermoRack 10-R6AF-3G30-10

Oven

Associated Vacuum Technology

Blue M OV-472A-2 38C-260C 4 sets

MTI OTF-1200X Open Tube Furnace

Oven Technology 4400

Sheldon / Bellco 1927 Laboratory Oven

VWR 1410 VWR

VWR Scientific 1370 F Oven

RTA RTP RTO RTN

Coat Develop Bake Equipment

BOLD Technologies INC Batch Develop Station

Solitec Model 820-ACB Automatic Coat Bake 4 sets

Steamboat Semiconductor Developer

SVG-8136 HPO SVG Spin Track

Metrology Tester Prober

F.E.I. Quanta 200 FEG SEM

Nikon Microscope AFX-II

KLA Tencor P6

KLA Tencor P-7

CDE ResMap 178 Four Point Probe

EG 1034

West Bond Wire Bonder

Micromanipulator Probe Station

EG4090u+ 8 inch wafer probe

EG 4085X 8 inch wafer probe

Hitachi S-4700 SEM Working

Tencor M-Gage 200

Tencor MGage 300

Tencor Sonogage 200

Sloan Dektak II Profilometer I39930

Dektak model 3 Surface Stylus Profiler

Signatone CM170-6

Emscope SC-650 Series

Gaertner Scientific L117

Hewlett Packard 4061A

HP 4062 and Testers

Japan SANWA LC361C High Votage Probe

Leitz Ergolux AMC Microscope

MP2020 Wentworth Lab Probe

Nanoline CD Measurement

Nanometrics 210 Nanospec AFT

Olympus BHM

Olympus BX60 Microscope

Prometrix Film Thickness Probe

Prometrix SpectraMap SM-300

Relay Tester With APC Smart-UPS , HP Compaq Pickering Interfaces 40-914-001

Relay Tester With HP Compaq ,TDK Lambda

Relay Tester With HP Compaq Pickering Interfaces 40-914-001

Rudolph Research AutoEL SS291

Others

4-6 inch Teflon Cassette PFA FLUOROWARE EMPAK Wafer Cassette

AMAT 0010-33556 Contour Head

Clone Screening Colony Picker

Equipment and Parts for AG Associates RTP

Kulicke & Soffa (K&S) Triton RDA Auto Wedge Bonder

Kulicke & Soffa K&S 8028 Auto Gold Ball Bonder

Wafer Carriers/Susceptors -AL, SSL, Si, SiC, Quartz etc.

MiMir UV Ultra Violet Curing System

SSS

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers

Main Maker

Navigation

PlasmaTherm LAPECVD 1130

STS Multiplex ICP Plasma Etcher

8″ Plasmatherm Versaline ICP

STS Multiplex ICP DRIE

STS MESC Multiplex ICP ASE Bosch Process

ø300 mm SAMCO RIE-300NR

Wafer Manufacturing Equipment

Plasma Therm SLR 770 RIE

AXIC Benchmark IsoLok ICP

SBT South Bay Technology IBS/E

4-Wave Z-Flex IBD/IBE

AutoEtch 490

Etch RIE ICP DRIE

Thin Film Equipment

Plasma Asher Descum

RTA RTP RTO RTN