Description
STS / CPX Multiplex ASE ICP
Condition: Used.
Valid Time: Subject to prior sale. This item is only for end user
STS / CPX Multiplex ASE ICP ICP / Advanced Silicon Etcher (ASE), 5″
- LEYBOLD Turbo pump and controller
- Turbo pump
- VL400 Phase shift generator
- Gases: Argon, Helium, C4F8, SF6, O2
- Silicon etch aspect ratio (SiO2 mask): 50:1
- Electronics cabinet and chiller
- PC
- Helium Backside Cooling (HBC)
- Control tower
- Gas cabinet
- Air cannister
- Electrostatic chuck, 5″
- Process modules:Load module;Etch module;Vacuum module
- (2) RF Generators:ENI 10B,ENI 3
- 2000 vintage.
ID-OEM-13