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STS / CPX Multiplex ASE ICP

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STS / CPX Multiplex ASE ICP

Condition: Used.

Valid Time:  Subject to prior sale. This item is only for end user

STS / CPX Multiplex ASE ICP ICP / Advanced Silicon Etcher (ASE), 5″

  • LEYBOLD Turbo pump and controller
  • Turbo pump
  • VL400 Phase shift generator
  • Gases: Argon, Helium, C4F8, SF6, O2
  • Silicon etch aspect ratio (SiO2 mask): 50:1
  • Electronics cabinet and chiller
  • PC
  • Helium Backside Cooling (HBC)
  • Control tower
  • Gas cabinet
  • Air cannister
  • Electrostatic chuck, 5″
  • Process modules:Load module;Etch module;Vacuum module
  • (2) RF Generators:ENI 10B,ENI 3
  • 2000 vintage.

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