Description

Plasmatherm 790 Series Dry Etching, small -8″ For Oxide or Nitride.

Gases: It was configured with 4 of Tylan N2 MFCs: 100 SCCM/ 100 SCCM/ 200 SCCM/ 200SCCM

RF Generator: It was configured with AE RFX-600.

Condition: We sell it at refurbished and upgraded condition with 12 months warranty.

Location: Silicon Valley, CA, U.S.A.

Installation and training: Available at extra charge.

Service Contract: Not necessary.

Facility, pump, chiller: Customer is responsible for these.

The item is only for end user. The item is subject to prior sale without notice.

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