Description
Plasmatherm 790 Series Dry Etching, small -8″ For Oxide or Nitride.
Gases: It was configured with 4 of Tylan N2 MFCs: 100 SCCM/ 100 SCCM/ 200 SCCM/ 200SCCM
RF Generator: It was configured with AE RFX-600.
Condition: We sell it at refurbished and upgraded condition with 12 months warranty.
Location: Silicon Valley, CA, U.S.A.
Installation and training: Available at extra charge.
Service Contract: Not necessary.
Facility, pump, chiller: Customer is responsible for these.
The item is only for end user. The item is subject to prior sale without notice.
Keywords: plasma therm rie, plasma therm icp, plasma therm slr, plasma therm, plasma therm 790, plasma therm pecvd, .