Description
Plasmatherm 790 Series Dry Etching, small -8″ For Oxide or Nitride.
Gases: It was configured with 4 of Tylan N2 MFCs: 100 SCCM/ 100 SCCM/ 200 SCCM/ 200SCCM
RF Generator: It was configured with AE RFX-600.
Condition: We sell it at refurbished and upgraded condition with 12 months warranty.
Location: Silicon Valley, CA, U.S.A.
Installation and training: Available at extra charge.
Service Contract: Not necessary.
Facility, pump, chiller: Customer is responsible for these.
The item is only for end user. The item is subject to prior sale without notice.
The items (ID SS5576-1-2-1-1-1) below are available now. Please contact us for the availability. They are only for end users and are subject to prior sale.
| Plasma-Therm | Dual Chamber 790 PECVD (on side Low Freq. & other side 13.56Mhz) could be converted to both sides 13.56MHz |
| Plasma-Therm | 790 PECVD upper Electrode Low Freq. & Lower electrode High Freq. |
| Plasma-Therm | 790 RIE Parts tool |
| Plasma-Therm | 790 PECVD |
| Plasma-Therm | 790 PECVD |
| Plasma-Therm | SLR 720 RIE |
| Plasma-Therm | SLR 720 RIE |
| Plasma-Therm | SLR 720 RIE |
| Plasma-Therm | SLR 720 RIE |
| Plasma-Therm | SLR 720 RIE |
| Plasma-Therm | VLR VersaWorks Cluster tool- one chamber PECVD |
| Plasma-Therm | VLN (Versaline) ICP – single wafer manual load |
| Plasma-Therm | VLN (Versaline) ICP – two wafer Brooks handler – manual load |
| YESHMDS | Class 10 – all Stainless Steel |
Keywords: plasma therm rie, plasma therm icp, plasma therm slr, plasma therm, plasma therm 790, plasma therm pecvd, .
