Description
Refurbished Lam Research AutoEtch 490 Plasma Etcher Semiconductor Equipment
SemiStar Corp. provides refurbished Lam Research AutoEtch 490 plasma etcher semiconductor equipment for universities, research institutes, semiconductor fabs, MEMS laboratories, and compound semiconductor process development applications.
The Lam Research AutoEtch 490 is a cassette-to-cassette automatic plasma etching platform designed for semiconductor wafer processing applications requiring stable plasma control, automated wafer handling, and repeatable process capability.
The AutoEtch platform utilizes a fully automated single wafer plasma etching structure with double airlock chamber architecture and programmable process control capability. Depending on configuration and installed options, the system may support oxide etching, dielectric etching, thin film etching, descum processing, and related semiconductor plasma applications.
Photo shown is for reference only. Actual configuration, installed options, condition, and appearance may vary depending on current system availability and customer requirements.
Availability
SemiStar may have Lam Research AutoEtch 490 plasma etcher systems available from stock or incoming inventory. Please contact SemiStar for current system availability, refurbishment scope, pricing, and lead time.
Related Lam AutoEtch Models Include:
- Lam Research AutoEtch 490
- Lam Research AutoEtch 590
- Lam Research Rainbow 4420
- Lam Research Rainbow 4520
- Lam Research Alliance A6 Series
System Description
The Lam AutoEtch 490 is an automatic cassette-to-cassette plasma etching system utilizing single wafer transfer and double airlock plasma process chamber architecture. The double airlock structure allows the process chamber to remain under vacuum during operation for improved process repeatability and process stability.
The system supports programmable process control including RF power, chamber pressure, gas flow control, electrode spacing, and multi-step recipe capability. Depending on installed hardware and process configuration, the system may support multiple semiconductor plasma process applications.
The AutoEtch platform includes automatic wafer transport capability and programmable process sequence operation suitable for semiconductor R&D laboratories, universities, pilot production environments, and production support applications.
Typical Configuration Capability
- Automatic cassette-to-cassette wafer handling
- Single wafer plasma process chamber
- Double airlock chamber structure
- Parallel plate plasma etching configuration
- RF generator and matching network
- Vacuum chamber and vacuum pumping system
- Multiple process gas lines with MFC control
- Programmable process recipe capability
- Refurbished to OEM specifications
- Installation and startup support available
- Warranty available depending on final quotation
Optional Upgrade Capability
SemiStar can provide optional PC controller and touchscreen monitor upgrade kits for selected Lam AutoEtch systems if required by customer applications and system condition.
Optional upgrade capability may improve:
- System operation and usability
- Long-term maintenance support
- Replacement of obsolete electronics
- Data storage and recipe management
- Troubleshooting and diagnostics capability
Applications
- Semiconductor plasma etching
- Oxide etching
- Dielectric etching
- Thin film etching
- Photoresist descum
- Surface treatment and plasma cleaning
- MEMS process development
- Compound semiconductor processing
- University and research institute plasma processing
Facility Requirements
Final facility requirements depend on the actual system configuration and installed options.
- Facility power according to final system requirement
- Process gases and gas cabinet supplied by customer
- Vacuum pump and exhaust connection required
- Cooling water and CDA depending on final configuration
- Customer responsible for facility hookup and local compliance
RFQ Information Requested
To help SemiStar recommend the proper Lam AutoEtch 490 configuration, please provide:
- Wafer size and material
- Process application
- Required process gases
- Current system status if replacing existing tool
- Need for PC controller upgrade kit
- Installation location
- Expected purchase timeline
- Special process or facility requirements
Important Notes
- All systems are subject to prior sale.
- Availability changes frequently based on incoming inventory.
- Final configuration and specifications depend on the actual refurbished system.
- All systems are refurbished to OEM specifications unless otherwise stated in official quotation.
- All product information on this website is for reference only and not final purchase specifications. Please refer to official quotation for final specifications and scope of supply.
- All OEM names and trademarks belong to their respective owners. SemiStar Corp. is not affiliated with Lam Research Corporation.