CPA S-Gun Sputter Deposition / Sputter-Gun System (3 S-Guns)
Metals/Gases Used: TiW, W5Si3, Au, Argon, Nitrogen.
Wafer Size: 3 inch, 4 pieces per run.
Sloan S-Guns: DC magnetron, 3 for 3 metals. We have a few used target holders coming with the system. The target is a Ring. The typical dimensions are 3 1/8″ OD x 0.930″ tall with an 1/8″ wall.
Pls contact us for more info if necessary. Appreciate your time