Main Maker

CPA S-Gun Sputter Deposition

Category: Tag:

Description

CPA S-Gun Sputter Deposition / Sputter-Gun System (3 S-Guns)

Photos in PDF

Metals/Gases Used: TiW, W5Si3, Au, Argon, Nitrogen.

Wafer Size: 3 inch, 4 pieces per run.

Sloan S-Guns: DC magnetron, 3 for 3 metals. We have a few used target holders coming with the system. The target is a Ring. The typical dimensions are 3 1/8″ OD x 0.930″ tall with an 1/8″ wall.

Pls contact us for more info if necessary. Appreciate your time

It was from a Continuing Operations Wafer Processing Fab in Bay Area,CA USA on 12/10/2020. It was complete, working.  System was purged of all contaminates, decommissioned, and moved to our facility in Morgan Hill,CA USA.
Complete, working, functional test is available at extra cost.

Please contact us for more information on the product:

Your Name*:

Your Email:

Your Message:

Captchac Codecaptcha

Submit:

ID-SS380-OEM-1

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers