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STS MXP Multiplex ICP ASE HR

Categories: 0-Partners, Etcher Tags: SPTS, STS, Surface Tech Sys

Description

Description

The Surface Tech Sys STS MXP Multiplex ICP ASE HR Silicon Etcher is only for end user. Please contact us if you have any questions. Subject to prior sale without notice. Appreciate your time!

Location: USA

Condition: Used.

Wafe Size: 6 inch

More Info: Pls email us with your company name, location, website, company email address and RFQ in detail if possible.

Info on the system below is for your reference.

Wafer Size :2-8 inch capability
Windows 2000
Bosch license
Power Requirements: 400V , 50Hz, 40 Amp, 3 phase
CE
Vintage:2003
Silicon Etch Bosch Process
Loadlock:YES
High Vacuum Pump Pfeiffer MAG 2000
RF Generator :ENI/ACG-3B and Advanced Energy RFG 3001
Process Gases SF6, C4F8, O2, Ar
Chiller:Huber/Unistat 140W
Accessories :ICP V2 – Balun coil
Mechanical Clamp
Helium Backside Cooling
Carousel in MkIV MPX – 2 x 150mm wafers
3KW Source
300/30W platen
E-Rack Modules: HCL1 +HCU3 +HCU5+VAC3Y +2x AMC1 +HBC2

ID-SS5732W

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