The Surface Tech Sys STS MXP Multiplex ICP ASE HR Silicon Etcher is only for end user. Please contact us if you have any questions. Subject to prior sale without notice. Appreciate your time!
Wafe Size: 6 inch
More Info: Pls email us with your company name, location, website, company email address and RFQ in detail if possible.
Info on the system below is for your reference.
Wafer Size :2-8 inch capability
Power Requirements: 400V , 50Hz, 40 Amp, 3 phase
Silicon Etch Bosch Process
High Vacuum Pump Pfeiffer MAG 2000
RF Generator :ENI/ACG-3B and Advanced Energy RFG 3001
Process Gases SF6, C4F8, O2, Ar
Accessories :ICP V2 – Balun coil
Helium Backside Cooling
Carousel in MkIV MPX – 2 x 150mm wafers
E-Rack Modules: HCL1 +HCU3 +HCU5+VAC3Y +2x AMC1 +HBC2