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Multiplex ICP ASE Bosch

Equipment Inventory (Updated)

Categories: Equipment Inventory, Etcher, Refurbished Hot Main Items Tags: SPTS, STS

Description

Description

STS Surface Technology Systems MESC Multiplex ICP ASE Bosch Process

********** Used. Great Condition. Just moved to warehouse from a Fab CA,USA.

Valid : It is only for end users and is subject to prior sale without notice. Appreciate your time!

Condition: We sell it at AS IS or complete, working, functional test at extra cost.

Photos: Please contact us.

Info on the system from the owner for your reference.

OEM = Surface Technology Systems Limited (AKA: STS)
Model = MESC Multiplex ICP ASE
Type = ICP RIE (Inductively Coupled Plasma, Reactive Ion Etch)
Description of Process = ASE (Advanced Silicon Etch, Bosch Process)
Wafer Size = 150mm
- Loader capacity = 2 wafer Carousel
Chuck Type = Mechanical Weighted Clamp
Process Gases:
- C4F8 = 300 SCCMS
- SF6 = 600 SCCMS
- O2 = 100 SCCMS
- AR = 100 SCCMS
- MFC’s are Millipore FC2901 Series
Turbo Pump = Leybold Mag 2000 CT
RF Generator 1 = ENI ACG-3
RF Generator 2 = AE RFG 3001 (Advanced Energy)
Vacuum measurement = MKS Instruments
Gate Valve = VAT throttling type gate valve
Slit Valve = VAT Slit Valve
Manuals = STS MESC Multiplex ICP Operator’s and Modular Parts Catalogue
Vacuum Pump Loadlock = Edwards Pump E2M40
Vacuum Pump Process Module = Edwards Pump IQDP80 w/IQMB250 Blower (Intelligent Quiet Interface)
Chiller = Affinity, PWG-060K-BE33CBC2
Support Module = STS Controller Cabinet / AC Breaker Panel

OEM-14-1 and OEM-25

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