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STS Mutiplex Cluster ICP -Asher- Three Chamber

STS Cluster

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SKU: STS Multiplex ICP -1 Category: Sold Items

Description

Description

Model: STS Mutiplex Cluster

Category: Used Equipment List – Etch RIE ICP

Original Equipment Manufacturer: Surface Tech Sys ( STS )

Condition: In warehouse, Used, Complete, working condition. We sell it at AS IS,Where IS condition. Refurbished and fully tested is optional at extra charge.

Valid Time: Subject to prior sale

Lead Time: Ready to go. 12 to 16 weeks for the Refurbished and fully tested condition.

Location: Asia

Warranty: No warranty for the AS IS,WHERE IS condition. 3 months for the Refurbished and fully tested condition.

Installation and training: Available at extra charge for the Refurbished and fully tested condition

Service Contract: Available at extra charge for the Refurbished and fully tested condition

Surface Tech Sys (STS) STS Mutiplex Cluster Description:

STS Multiplex Cluster ICP Etcher, 8″

Brooks VCE4 and Mtr5 robot

Turbo on the wafer handler

C033 Cluster handler

(2) Temperature controlled lids

Loadlock: Brooks VCE 4 with manual door

Corema chiller on Metal ICP chamber

ICP chamber (Metal etch)

12 process gas manifold

Bias capabilities

Chuck: heat exchanger, no electric

Turbo pumps: TMH100

ICP chamber(Dielectric Etch)

12 process gas manifold

Bias capabilities

Processed: silicon etch

Chuck: heat exchanger, no electric

Turbo pump: TMH100

ICT chamber (Asher / Stripper)

4 gases: N2, O2, NH3, CF4

Turbo pump

NOAH chillers

Vacuum Pumps are not included

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