Main Maker

Spare parts


The following Spare parts are only for end user. Please contact us if you have any questions. Subject to prior sale without notice. Appreciate your time!

  1. ASML 47.022.022-00.09-379 ASML motor with pulley
  2. ASML 47.022.022-00.09-315 ASML motor for θ
  3. ASML ASML Shutter 200
  4. ASML ASML P-Unite
  6. ASML Maxon Motor (Z)
  7. Gasonics 94-3245 Hard Driver for Gasonics IRIDIA R-PCM
  8. Gasonics Jun-02 Lift pin
  9. Gasonics 15-161439-00 Isolating plate, ring carrier
  10. Gasonics 94-3049 Light probe
  11. Gasonics 94-3243 Hard drive pre-loaded
  12. Gasonics 94-3244 Hard drive pre-loaded
  13. Gasonics 60-2025  1.9Kw magnetron
  14. Varian  04-712190-01 Shield, Upper Chamber
  15. Varian 04-717647-01 Shield, Lower Chamber
  16. Varian 00-674685-00 Optical Sensor
  17. Lam Research  Hi-Motor Sensor (PM-L53)
  18. Lam Research  Hi-Motor Sensor (PM-L54+CN-14)
  19. Lam Research VEXTA 2 Phase Driver UD2115A
  20. Lam Research Roller Shaft
  21. Lam Research 02-168108-00 Lam ECP  bath SIOC
  22. Lam Research 716-330504-064 Ring, FOR, 6″ ESC, GD R.SEMI
  23. Lam Research Inner Door Open/Close Sensor
  24. Lam Research 715-011565-001 Bolt Clamp Retaining
  25. Lam Research 734-007359-001 O-ring
  26. Lam Research 716-330355-001 Window QTZ Headed Endpot

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