Semiconductor Equipment Spare Parts

Description

Semiconductor Equipment Spare Parts

Location: USA

Condition: New or Used or Refurbished

Valid: Subject to prior payment/sale without notice. This is only for end users. Appreciate your time!

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers.

1	ACDS Chemical gas delivery cabinet system ( TEB or TEPO)
2	AE 3151801-004 A Remote Plasma Source RPS
3	AE 3156024-132 PDX 900-2V, AMAT 0190-08677
4	AE MDX-L12M-650 DC Power supply, PVD Endura
5	AMAT 0010-00510 ASSEMBLY P5000 ETCH BEARING STD ESC CATHODE, ETCH, MXP
6	AMAT 0010-09750 CVD RF Match, AMP MODULE
7	AMAT 0010-09781 Teos Ampule VER 4, U0050-09821FM-9150, 6LV-BNBW4-P-C
8	AMAT 0010-09933 HV Module, Assy ESC
9	AMAT 0010-10082, ASSY, THROTTLE VALVE,WxZCVD, 0050-30385, 0020-09999
10	AMAT 0010-10455 DELTA 500W LAMP P5000, 0020-31108, 0010-09916
11	AMAT 0010-10957, ASSY DRIVE FC WXZ P5000
12	AMAT 0010-18129 Top Local Match Assy, RF, HDP CVD
13	AMAT 0010-21356 Heater Assy, 8″ VCR w/ 2 TCs And Bellows, 0040-20850
14	AMAT 0010-21668, Magnet assy, PVD
15	AMAT 0010-21810 Magnet Assy, G-12, Encapsulated Durasource G Type
16	AMAT 0010-22037 G12 Source Assy w/ Side Cooling, 0040-23104/ 0020-20149,
17	AMAT 0010-30576 OBS, ASSY, HEATER LIFT, GIGA-FILL SACVD, 5200 CVD
18	AMAT 0010-30576 OBS, ASSY, HEATER LIFT, GIGA-FILL SACVD, 5200 CVD
19	AMAT 0010-30686 MXP+ ETCH CHAMBER, ETCH H.E. RF MATCH
20	AMAT 0010-38281 5000/5200 CVD WXZ ASSY SR CENTURA WITH KALREZ, 0021-76845
21	AMAT 0010-38281 5000/5200 CVD WXZ ASSY SR CENTURA WITH KALREZ, 0021-76845
22	AMAT 0010-38755 Centura DPS Dome Temperature Controller 0060-35212 DTCU
23	AMAT 0010-39489 ASSY FRONT PANEL NBLL C
24	AMAT 0010-39736 Etch chamber Lid with Clamp, MXP+ 0021-03277, 0040-39619
25	AMAT 0010-40276 E-Chuck Pedestal Assembly 200MM SNNF BIAS
26	AMAT 0010-70167 P5000, LIFT ASSEMBLY 15 SLOT STORAGE ELEVATOR
27	AMAT 0010-70264 ASSY HP ROBOT DRIVER CENTURA
28	AMAT 0010-70264 ASSY HP ROBOT DRIVER ENDURA
29	AMAT 0010-70317 HP ROBOT DRIVER
30	AMAT 0010-76036 and 0010-70000 P5000 Mini Controller with module
31	AMAT 0010-76385 CHAMBER LID 11.3″ Source Assy PVD, 0010-20224 AL Magnet
32	AMAT 0010-92209 Gas Module, SDS, Unit (8160 MFC) N20 5 SCCM
33	AMAT 0010-93152 Heater Pruge Assy 200MM SNNF TXZ BKM
34	AMAT 0020-70147 STORAGE 29 SLOT ELEVATOR ROBOT TRANSFER MODULE LID P5000
35	AMAT 0020-70336 HP ROBOT WING AMAT 0020-20390 ARM, SET
36	AMAT 0020-70376 CHAMBER ORIENTER/DEGAS, AMAT 0010-20138 TC AMP
37	AMAT 0040-18018 E-Chuck, 200mm, MKA, SNNF, CVD Ceramic Coated
38	AMAT 0040-18024 E-Chuck, 200mm, MKA, SNNF, CVD Ceramic Coated
39	AMAT 0040-31780 Base, Cooling 200MM Cathode, DPS MEC, Base Plate 5200
40	AMAT 0060-35188 DTCU Fan Module Assembly, Dome Cover, Connector I/O
41	AMAT 0090-75015 Endura Centura V440 SBC Synergy
42	AMAT 0090-90803W Chas module F’Gun control ACC, AMAT 0240-91511W Kit Product
43	AMAT 0100-09251 SERIPLEX SENSORbus APC PCB SPX-MUXADIO-001
44	AMAT 0100-09251 SERIPLEX SENSORbus APC PCB SPX-MUXADIO-001
45	AMAT 0100-20003 Digital Input I/O Board REV G, P5000
46	AMAT 0190-00319 DC POWER SUPPLY DRAWER, PHASE II CENTURA, 61-0367-39
47	AMAT 0190-05997 Analog I/O PCB ASSY BOARD VME
48	AMAT 0190-09331 Thermocouple AMAT CVD, ASSY,TC PROBE, REV P
49	AMAT 0190-09466 SERIPLEX SENSORbus SPX-MUXADIO-001 PCB, 0100-09287
50	AMAT 0190-28093 300MM Target 025X20.625″ APX-KT Material Diffusion to Al
51	AMAT 0190-35762 SERIPLEX MUX I/O PCB, SPX MUXADIO110
52	AMAT 0190-35775 SERIPLEX PCB, 0100-35174, MATRIX BOARD
53	AMAT 0190-35775 SERIPLEX SENSORbus PCB Card SPX-MUXADIO-001, 0100-35174, 265-2100-003
54	AMAT 0190-40072 Seroplex SENSORbus Card PCB SPXMUXADIO-001, MUX109495
55	AMAT 0190-70060 MAG DRIVER, Etch Chamber
56	AMAT 0190-76005 Oregon micro systems VME44 PCB, SPEC CNTL DWG, INTELLIGENT MOTOR CONTROL
57	AMAT 0190-76043 PCBA ASSY, SBC SYNERGY 68040 CONTROLLER (SOLD 1 unit)
58	AMAT 0242-76728 Cassette Loader Assembly, AMAT 0021-76842, 0020-22738
59	AMAT 0242-86045 KIT HOT Pack Endpoint 365 NM Rev A, AMAT 0010-00860, AMAT 0010-10973
60	AMAT 0520-01050 ACTUATOR 3-POSITION FOR 8″ UHV GATE VALVE
61	AMAT 0920-01120 Astex AX7650 Reactive Gas Generator Astron, RPS
62	AMAT 1070-01014 Ozone Monitor , Model HAMAT-4
63	AMAT 3250-01022 ROBOT ASSEMBLY PACKAGE ENDURA PVD
64	AMAT 3870-00154 SLIT VALVE DBL ACTG 45mm ST, VAT 0750X-UE24-ABR1/0097
65	AMAT 3930-90060 Wafer Loader Controller Pneumatic Box
66	AMAT 8 INCH ORIENTER CHAMBER ASSEMBLY
67	AMAT Applied Materials ETCH RF MATCH 0010-09416
68	AMAT ASP CHAMBER ASSEMBLY
69	AMAT Centura DPS Tempurature Controller DTCU, 0060-35211, 0060-35210
70	AMAT DPS POLY DTCU, SOURCE MATCH, FTMS02012SK0101,
71	AMAT ETCH MXP+ CHAMBER THROTTLE VALVE, HEATED, AMAT 0140-09744, AMAT 0015-09077
72	AMAT MXP+ ETCH CHAMBER CATHODE LINER, CHAMBER LINER AND SLIT VALVE
73	AMAT ONODA OR-4ZA OZONEREX GENERATOR
74	AMAT P5000 CVD, PARTS TOOL ( QTY=4)
75	Applied Materials 0010-10055 Gas Box, WXZ AMAT CVD
76	Applied Materials 0190-28126 RF RESONATOR ASSY WITH INTERLOCKS PCII AMAT
77	ASTECH TH-20RS GENERATOR, AC 100V, 1A
78	ASYST TR-003 Aligner EEJA OF-101 CONTROLLER, ALIGNER
79	BROOKS Equipe PRI ATM-105-1-CE BROOKS ATM105 2 CE ROBOT, ATM-105
80	Chamber Wide Body PVD, Shell, 0040-20195, Endura, IMP
81	CTI Cryogenics 8116041G001R On-board 8 Cryopump , Helix, Brooks
82	CTI Cryogenics 8116041G002R On-board 8 MS Cryopump, Helix, vector HI/SP
83	CTI Helix Brooks Cryo pump, 8116013G005 on-board 10, FastRegen Control 810-32287
84	CTI-CROGENICS HELIX TECHNOLOGY ON-BOARD 8112860G003 R8 CRYOPUMP
85	EATON 1198250 E SHOWER BACK BIAS ASSY
86	Ebara ET600WS Turbo Molecular Pump, TEL, A-3000-191-0001
87	EDWARDS IXL120N SPI SYS A54112219 Dry Pump
88	ENI OEM-12B-02 RF GENERATOR
89	ENI OEM-12B-07 RF GENERATOR
90	ENI PL-2HFN-01 2500W RF Generator
91	Honeywell TSENCOBTM-07889 125X12.913X15.620 MPS-5-002/M TARGET
92	KOYO SXHR3130-PM-00249R CASSETTE TRANSFER ROBOT TH-19REX-F9 HUMIDITY
93	LAM 853-006613-001 AutoEtch ASSY ASM EXIT UNLOAD 490 853-006613R001-F
94	LAM 853-012123-001-E , HARMONIC DRIVE ARM ASSY, 853-012123R001
95	LAM 853-072156-001 ASSY, ESC, HIGH TEMP, 200MM
96	Lam Research 853-140218-001 Match Assy, 853-031703-001-A-DFT, 853-140218
97	Lam Research 853-140218-003 4520XL Match Assy, 853-140389-001-A
98	Leybold MAG 400 Turbo Pump
99	LEYBOLD NT 340 M TURBOTRONIK, Magnetic Bearing PCB 2.0
100	Novellus 27-10157-00 IOC Module controller I/O Digital Dynamics, C2, Sequel
101	RORZE RE201-822-016 Wafer cassette sorter elevator, SANYO DENKI RM26A3S
102	SER ROBOT CHAR FIXTURE, ATM-20, NAIS MICRO LASER
103	SVG 99-46450-01 9200SE SVG ASML 90 track Z-robot, 23074-01-D