Description
Refurbished STS / CPX Multiplex ICP Etcher
SemiStar Corp. offers a refurbished STS / CPX Multiplex ICP Etcher based on current inventory and original equipment configuration. Surface Technology Systems (STS), later associated with SPTS Technologies and the KLA SPTS product line, is widely recognized for semiconductor plasma etch, silicon etch, dielectric etch, MEMS process development, and semiconductor R&D applications.
The STS / CPX Multiplex ICP Etcher platform is designed for flexible ICP plasma etch applications including silicon etch, dielectric etch, oxide etch, nitride etch, and general semiconductor process development. Available systems may be configured differently depending on original application, gas chemistry setup, RF configuration, and wafer handling capability.
This available STS / CPX Multiplex ICP Etcher is a 1998 vintage system configured with a clamp chuck design. The system is currently in stock at SemiStar.
Refurbished systems are supplied based on current inventory and original equipment configuration. Installation, startup assistance, and warranty may be available depending on system condition, final configuration, and project scope.
Photo shown is for reference only. Actual system appearance and configuration may vary.
Available System Information
| Item | Configuration |
|---|---|
| System | STS / CPX Multiplex ICP Etcher |
| System Type | Multiplex ICP Plasma Etcher |
| Chuck Type | Clamp Chuck |
| Vintage | 1998 |
| Status | In Stock |
Typical Applications
- ICP plasma etch process development
- Silicon etch
- Dielectric and oxide etch
- SiNx and thin film etch
- MEMS process applications
- Semiconductor R&D
- University and research institute plasma process development
- Advanced semiconductor materials research
Typical Process Capability
| Process Area | Typical Use |
|---|---|
| ICP Plasma Etch | Semiconductor plasma etch and process development |
| Silicon and Dielectric Etch | Silicon, oxide, nitride, quartz, and thin film etch applications |
| MEMS Applications | MEMS and semiconductor device fabrication support |
| Research and Development | Universities, institutes, and semiconductor R&D laboratories |
Typical Configuration Items to Confirm
- Wafer size and substrate type
- Clamp chuck configuration
- Gas chemistry configuration
- ICP source and RF generator configuration
- Vacuum pump and throttle valve configuration
- Cooling capability and facility requirements
- Installation scope and warranty availability
Related STS / SPTS Inventory
SemiStar may also have other STS / SPTS Multiplex plasma etch systems available, including Bosch Process DRIE, HRM deep silicon etch, AOE advanced oxide etch, and M/PLEX metal etch configurations. Please contact SemiStar for current inventory and configuration details.
Important Notes
- Refurbished equipment availability is subject to prior sale.
- Refurbished systems are supplied based on current inventory and original equipment configuration.
- Actual configuration, process capability, installation scope, warranty, and delivery schedule must be confirmed by quotation.
- SemiStar does not provide spare parts or service support for STS systems not sold by SemiStar.
- All OEM names, trademarks, and model names belong to their respective owners.
- All website information is for reference only and is not a purchase specification. Final configuration, scope, price, and terms are based on SemiStar’s official quotation.
Request a Quote for STS / CPX Multiplex ICP Etcher
Please contact SemiStar with your target application and required configuration. Helpful information includes wafer size, substrate material, etch material, process gases, target application, facility limitations, budget, and expected purchase timeline.
Contact SemiStar
SS-STS-CPX-ICPOEM-30
