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Plasma-Therm 790 ICP

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Description

The Plasma-Therm 790 ICP PLASMATHERM ICP PLASMA ETCHER is only for end user. Please contact us if you have any questions. Subject to prior sale without notice. Appreciate your time!

  • PC Controller Type
  • The top coil is supplied 2 MHz RF at 1000 watt max. RFPP Model RF20M
  • The bottom electrode is supplied 13.56 MHz RF at 500 Watts. RFPP Model RF5S
  • High Vacuum Pump Leybold 361C
  • RF Generator Model RFPP RF20M & RF5S
  • Automatch Text RFPP AM-20 & AM-5
  • Number of Gas Inputs Three Gas
  • Power Requirements:208V/60.0 A /60 Hz/3P
  • Vintage:1998
  • Wafe Size: 2-8 inch capability

Location: USA

Condition: Used.

More Info: Pls email us with your company name, location, website, company email address and RFQ in detail if possible.

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