Description
The Plasma-Therm 790 ICP PLASMATHERM ICP PLASMA ETCHER is only for end user. Please contact us if you have any questions. Subject to prior sale without notice. Appreciate your time!
- PC Controller Type
- The top coil is supplied 2 MHz RF at 1000 watt max. RFPP Model RF20M
- The bottom electrode is supplied 13.56 MHz RF at 500 Watts. RFPP Model RF5S
- High Vacuum Pump Leybold 361C
- RF Generator Model RFPP RF20M & RF5S
- Automatch Text RFPP AM-20 & AM-5
- Number of Gas Inputs Three Gas
- Power Requirements:208V/60.0 A /60 Hz/3P
- Vintage:1998
- Wafe Size: 2-8 inch capability
Location: USA
Condition: Used.
More Info: Pls email us with your company name, location, website, company email address and RFQ in detail if possible.
ID-SS5732W