Description
Part Number: A93-021-01 ; A93-021-02, A93-021-03, A93-021-04, A93-021-05, A93-021-06, A93-021-07, A93-021-08 , Novellus GaSonics Waveguide
Condition: New
Lead time: TBD
Valid Time: Subject to prior sale. These are only for end users. Appreciate your time!
Related Equipment: Semiconductor Front End Process Equipment, Plasma Asher, Dry Stripper, Plasma Clean, Plasma Descum, Plasma Clean equipment, Gasonics Aura 1000, Gasonics AE 2001, Gasonics Aura 3000, Gasonics Aura 3010, Gasonics Aura 2000LL, Gasoncis AW 2000LL, Gasonics PE3510, Gasonics L3510. Novellus GaSonics Waveguide ,HNL Waveguide.
Our Service: Waveguide Systems and Components. We offer a vast selection of ancillary waveguide components used to transmit,
measure and alter the microwave energy generated from the magnetron.
- Consulting
- Waveguide components
- Waveguide subsystems
- Directional Couplers
- Customized Orders
- Flanges and other Accessories
- Circulators
The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers.
ID-SS10239
Please contact us if you are interested in the Gasonics parts. Appreciate your time. These are only for end user. They are subject to prior sale without notice. First come, first serviced.
- 8″ GASONICS SEMICONDUCTOR PROCESSING CHAMBER WATER COOLER INTEL LOAD LOCK
- 90-1064 Gasonics Driver Bd
- 95-2992 / POWER SUPPLY GASONICS MWAVE PWR / GASONICS
- AMAT Applied Materials 02-351965-00 Positioning Robot Gasonics Aura 2000-LL
- Andover Corporation Optical Filter AM-44719 GaSonics Inernational ANDV3985
- Applied Ceramics Collar Quartz 93-00105a for Gasonics IPC l3510
- Applied Materials (AMAT) 30085-000 CLAMP GASONICS MODIFIED
- APTech AP3550S 2PW FV4 MV4 Diaphragm Valve Regulator, Gasonics
- ASTEX GERSERLING AGL C12872 FILAMENT TRANSFORMER 60-1016 GASONICS
- ASTEX GERSERLING AGL C12872 FILAMENT TRANSFORMER 60-1016 GASONICS
- ASTEX GERSERLING AGL C12872 FILAMENT TRANSFORMER 60-1016 GASONICS
- ASTEX GERSERLING AGL C12872 FILAMENT TRANSFORMER 60-1016 GASONICS
- Asyst 04290-101 Load Lock Elevator GaSonics 94-1119 Hine Design 06763-005
- Asyst 04290-101 Load Lock Elevator GaSonics 94-1119 Hine Design 06763-805
- Asyst 04290-101 Load Lock Elevator Rev. 0 GaSonics 94-1119 Hine Design
- Asyst 04290-101 Load Lock Elevator Rev. 1 GaSonics 94-1119 Hine 06763-005
- Asyst 04290-101 Load Lock Elevator Rev. 1 GaSonics 94-1119 Hine Design
- Asyst 04290-201 Process Chamber Elevator GaSonics 94-1118 Hine 06763-005
- Asyst 04290-201 Process Chamber Elevator GaSonics 94-1118 Hine 06763-805
- Asyst 04290-201 Process Chamber Elevator Rev. 0 GaSonics 94-1118
- Asyst 04290-201 process chamber elevator, Gasonics Novellus 94-1118 Hine design
- Asyst 04290-201 process chamber elevator, Gasonics Novellus 94-1118 Hine design
- Asyst 04630-003 Load Elevator Indexer Hine GaSonics 94-1175 Aura 2000-LL
- Asyst 04630-003 Load Elevator Indexer Hine GaSonics 94-1175 Aura 2000-LL
- Asyst 04630-003 Loader Elevator Top Indexer w/ Hine Design PCB, Gasonics 94-1175
- Asyst 04630-004 Load Elevator Indexer Hine GaSonics 94-1174 Aura 2000-LL
- Asyst 04630-004 Load Elevator Indexer Hine GaSonics 94-1174 Aura 2000LL
- Asyst 04630-004 Loader Elevator Top Indexer w/ Hine Design PCB, Gasonics 94-1175
- Asyst 853-4290-101 Load Lock Elevator GaSonics 94-1119
- Asyst Hine Design 04630-003 Ergo Loader Gasonics 94-1175
- Asyst Hine Design 04630-003 Load Elevator Indexer GaSonics 94-1175
- Asyst Hine Design 04630-004 Load Elevator Indexer Gasonics 94-1174
- Asyst Hine Design 04630-004 Load Elevator Indexer Gasonics 94-1174
- Asyst Hine Design 04630-004 Load Elevator Indexer Gasonics 94-1174 Damaged
- Asyst Technologies 06763-005 48V Control Board PCB GaSonics ABX-66242-09-00
- Asyst Technologies 06763-005 48V Control Board PCB GaSonics ABX-79582-28-00
- Asyst Technologies 06763-005 48V Control Board PCB GaSonics ABX-88919-41-11
- Asyst Technologies 06764-005 48V Control Board PCB GaSonics ABX-78355-26-00
- B48 GASONICS LAMP CONTROL MODULE A3000 17447-01 REV.A
- Bellows HPS 100314911 GASONICS A20-038-01 Bellows NW16 3.94
- Belt Novellus-Gasonics 15-2715 390-5GT-1B theta Axis
- Bolt Novellus-Gasonics A93-023-01 pkg 3 shoulder screw
- Branson / IPC Gasonics Teflon Ring, L-3200, 14382-01 old stock
- Branson/IPC Gasonics L-3200 60 Day PM Kit, 6022000002
- Branson/IPC Gasonics L-3200 Controler ASSY P/N 13652-01
- Branson/IPC Gasonics L-3200 Quartz Chamber
- Branson/IPC Gasonics L-3200, AC CONTROL PANEL,
- Branson/IPC Gasonics Teflon Ring, L-3200, 14382-01
- Branson-IPC / Gasonics PN: 03470-01 Input Tuning Capacitor
- Brooks Automation 001-1070-02 Rev. D12 Z-Bot Driver Board Controller Gasonics
- Brooks Automation 001-1070-02 Z-Bot Driver Controller PCB Gasonics L-3510
- Cable LAM – GASONICS A96-072-01 CPU,J10-J32
- Cable NOVELLUS Gasonics 96-0235 CABLE ASSY, HIGH VOLTAGE TO MAGETRON
- Cable NOVELLUS GASONICS A96-094-01 ASSY,CABLE,LL,CPU
- Cajon Gasonics A69260D01 Gas Inlet Stand-off
- CHEMRAZ 2-025 C520, GASONICS ref# 78-2789
- Computer Accessory GASONICS 94-3195 Memory Nodule 64MB SRAM
- Computer Accessory track ball panel mount 2 button NOVELLUS – Gasonics 68-0002
- Electrical Power plug 10A 250V Novellus 73254-12 Gasonics
- Fuse 600VAC 50A (JJS) 13/16 X 1-9/16 T-TRON JJS-50 GASONICS
- Gasket Novellus 78-0188 gasonics gasket graphite
- Gasket Novellus 78-189 gasonics gasket graphite
- Gasonic 73797-6 Magnetron A1000, Microwave, Water Cooled,
- Gasonic 90-2516, Board
- Gasonics / Novellus A95-060-01 Rev-A Endpoint Detector
- GaSonics / Novellus Ferrofluidic Gear A01-441-01
- Gasonics / Varian CV26 Right Angle Isolation Valve
- Gasonics /Petrus, Quartz Plate 200mm, Dwg 6800300, p/n 036-8003-00
- Gasonics 01-4598 Bottom Cooling Ring 300mm
- Gasonics 018-12104 Rev-A Gas Line
- Gasonics 03-2630 Elbow Tubes ( Tubes )
- Gasonics 03-2705 Rev-30 Pressure Relief Tubes (Lot of 6)
- Gasonics 06-0091 Quartz Plasma Chamber, 06-0091/B, Novellus
- GASONICS 06-0103, Quartz Probe Tip, 4″ Optical Sensor
- GASONICS 06-0122, Thermowell, Steam, Exhaust Boiler-VHP
- GASONICS 06-0123, CQuartz Coupling, 3-Way, External Boiler
- Gasonics 06-0135, Quartz Puck Vacuum Sensor, BRU, 12/16″ x 7/8″
- GaSonics 06764801 Arm Controller GaSonics Aura 2000-LL
- Gasonics 07-0001 Rev. 1, 0.50 OD. x 0.035 W x 2.10 L
- Gasonics 07-0002 Rev. 1, 0.50 OD. x 0.035 W x 1.75 L
- Gasonics 07-0003 Rev. 1, 0.50 OD. x 0.035 W x 1.50 L
- GASONICS 07-0026, Elbow Tube, Line 3, Heat Exchanger, 0.50″ OD
- GASONICS 07-0051, Weldment, Process Purge 1
- GASONICS 07-0052, Elbow Tube, Chill Ring Return Line 1, 0.50″ OD
- GASONICS 07-0057, Elbow Tube, Pressure Relief #1, 0.50″ OD
- GASONICS 07-0058, Elbow Tube, Pressure Relief #2, 0.50″ OD
- GASONICS 07-0059, Pressure Relief L-Tube, 0.50″ OD, 16.5″
- GASONICS 07-2061, Tube Assembly, PS1/FS2
- Gasonics 111748 Rev-1 Swagelok HTC W31BL/BE3-6 Gas Line
- GaSonics 12N-010-13 Intel Mechanization Board PCB Card 05003-001
- GaSonics 12N-010-13 Intel Mechanization PCB
- GaSonics 12N-010-13 Intel Mechanization PCB Revision 8
- Gasonics 13015-02 Rev-A DC Driver Board
- Gasonics 14738-01 Bubbler, Quartz, 190mm
- Gasonics 14738-01 Quartz Bubbler 190mm 7.5″
- Gasonics 14738-01 Quartz Bubbler 190mm 7.5″
- GASONICS 14738-01/E BUBBLER QTZ * IN FACTORY BAG *
- GASONICS 16025-02 DC POWER DISTRIBUTION MODULE BRANSON/IPC TESTED WORKING FREE
- GASONICS 16025-02 DCPOWER DISTRIBUTION MODULE
- GASONICS 16025-02 REV:A,DC POWER DISTRIBUTION MODULE BRANSON/IPC WORKING FREE
- Gasonics 16321-01 Floppy Disc Drive, Plasma Asher 3010, 193077A5-29
- Gasonics 16337-02 Quartz Collar For Fiffusion Furnace
- Gasonics 16532-01 Plate Quartz Lamp
- Gasonics 16784-01 Spool Quartz
- Gasonics 17069-01 Panel Cover
- Gasonics 17622-01 Plate Diffuser, Lamp, Quartz, IPC
- GASONICS 23070 Needle Assy w/Fitting
- Gasonics 2343-01 Rev-1 Gas Line
- Gasonics 2930A16A Microwave Signal Board
- GASONICS 39-2013 GE 1000W QUARTZ LINE THERMAL PROCESS LAMP
- GaSonics 73-0068 Elevator Alignment Tool w/ 94-2730 Wafer Jig
- Gasonics 73333-05 Kit Door Cylinder, Clippard UDR-17-2-M
- Gasonics 73797-05 PWB Assembly SCR Control Broad, PCB, C12294,
- GASONICS 810-23427184 CONTACTOR PLATE
- GASONICS 89-1048-01 PCB HIPOX POWER CONTROL 90-1048-01
- Gasonics 90-1001-01 PC Board Assy, Alarm Hipox, PWB 89-1001-01
- GaSonics 90-1002-02 Valve Control PCB Assembly
- Gasonics 90-1033-02 Abort Reset Over Temp Card, PCB, FAB 89-1033-01
- GaSonics 90-1033-02 Abort Reset Over Temp PCB Card
- Gasonics 90-1036-01 MFC/MFM Interface
- Gasonics 90-1036-01 MFC/MFM Interface Board
- GaSonics 90-1036-01 MFC/MFM Interface Board
- Gasonics 90-1036-01 MFC/MFM Interface PCB Revision C
- Gasonics 90-1036-01 MFC/MFM Interface PCB Revision F
- Gasonics 90-1036-01, 16495-71REVF, MFC/MFM Interface, PCB, Controller
- GASONICS 90-1079 Industrial PCB Plasma Failure Detection Board Card Unit 89-1100
- GaSonics 90-2570 Controller Board PCB Rev. A FabMotion
- Gasonics 90-2588 Rev-4 Dual Set Point SCR Controller 89-2571 Rev-B
- Gasonics 90-2588 Rev-5 Dual Set Point SCR Controller
- Gasonics 90-2607 Controller Board PCB Rev. F
- Gasonics 90-2607 Display Decoder Board PCB Rev. A
- Gasonics 90-2607 PCB Controller Board —
- Gasonics 90-2607 PCB Controller Board Rev E Aura 2000-LL
- Gasonics 90-2607 PCB Controller Board Rev H Aura 2000-LL
- Gasonics 90-2608 PCA Load Lock Interface Board PCB Rev B
- GaSonics 90-2608 PCA Loadlock Interface PCB Board (Asher System)
- GaSonics 90-2608 PCA Loadlock Interface PCB Board Rev. A A-2000LL
- GaSonics 90-2608 PCA Loadlock Interface PCB Board Rev. C A-2000LL
- GaSonics 90-2608 PCA Loadlock Interface PCB Board Rev. D A-2000LL
- Gasonics 90-2608 Rev.B PCA LOADLOCK INTERFACE BOARD
- GaSonics 90-2609 Display Decoder PCB A89-005-01 Rev. A A-2000LL
- Gasonics 90-2609 Display Decoder PCB Rev B Aura 2000-LL
- GASONICS 90-2650 / 902650 (RQAUS1)
- GaSonics 90-2650 Controller Board PCB A90-005-02 Rev.L – Tested & working
- GaSonics 90-2650 Controller Board PCB Rev. A
- GaSonics 90-2658 Controller Board PCB A89-005-01 Rev. A A-2000LL
- GaSonics 90-2658 Controller Board PCB A89-005-01 Rev. C A-2000LL
- GaSonics 90-2658 Industrial PCB Printed Circuit Controller Board Module Unit
- Gasonics 90-2658 PCB Controller Board Rev B Aura 2000-LL
- Gasonics 90-2658 Rev. A PCB Controller Board
- GaSonics 90-2670 PCA LED and Interface Panel PCB A89-013-01 A-2000LL
- GaSonics 9104 Quartz Chamber Plasma Asher 15698-02, ENI OEM-12B-06 RF Generator
- GaSonics 94-1175 Loader Elevator Top Indexer for Aura 2000-LL, Hine Design
- GaSonics 94-2807 48L Control Board PCB 09316-805 Aura 2000LL
- GASONICS 95-0275 , MICROWAVE POWER SUPPLY, GENERATOR
- Gasonics 95-1260 Industrial 9″ Display Computer System Control Panel Unit PARTS
- Gasonics 96-3041 Waveguide Failure Detection Board
- GASONICS A01-187-01 FLAG,DOOR SENSOR PKG 3
- Gasonics A02-062-01 Rev D Panel, Pneumatic, Standard
- Gasonics A06-010-01 Asher Plasma Tube for AE1000 / AE2001
- Gasonics A-2000LL HEATER LAMP DETECT, A90-040-01 REV F
- Gasonics A-2000LL PCA LIFTER, 48V CONTROL BOARD, 94-2807
- Gasonics A-2000LL PCA ROBOT ARM 20 VACUUM, 94-2805, ASYST ASSY 778-1I
- Gasonics A-2000LL PROCESS CHAMBER LIFT ASSY, 94-1118, ASYST 04290-201
- GaSonics A-2000LL Wafer Loader Transfer Arm
- GaSonics A-2000LL Wafer Loader Transfer Arm Missing End Effector
- Gasonics A60-002-03 Transformer A95-046-02
- Gasonics A60-010-01 Rev-D Model 6300 Transformer PS-7010-00 Quality Transformers
- Gasonics A78-006-01 O-Ring
- GaSonics A89-013-01 Control Panel PCB LED & Interface PCA G0-2670
- GaSonics A90-005-01 Controller PC Board
- Gasonics A90-005-01 Rev-D Controller Board
- Gasonics A90-005-02 Controller Board
- Gasonics A90-005-02 Industrial PCB Printed Circuit Controller Board Module #2
- Gasonics A90-005-02 Industrial PCB Printed Circuit Controller Board Module #3
- Gasonics A90-005-02 Industrial PCB Printed Circuit Controller Board Module #5
- GaSonics A90-005-02 Industrial PCB Printed Circuit Controller Board Module Unit
- GaSonics A90-005-06 Controller Board PCB A89-005-01 FabMation Aura A-2000LL
- Gasonics A90-011-01 Display Panel
- GaSonics A90-031-01 PLASMA/LAMP Failure Detection Circuit Board
- GaSonics A90-031-01 PLASMA/LAMP Failure Detection PCB Rev. C Aura A-2000LL
- GaSonics A90-031-03 Industrial PCB Plasma/Lamp Failure Detection Cards
- GaSonics A90-031-03 PCB Plasma/Lamp Failure Detection
- GaSonics A90-031-03 PLASMA/LAMP Failure Detection PCB Rev. A
- GaSonics A90-031-03 PLASMA/LAMP Failure Detection PCB Rev. C
- GaSonics A90-031-03 PLASMA/LAMP Failure Detection PCB Rev. E
- GaSonics A90-031-03 PLASMA/LAMP Failure Detection PCB Rev. H
- GaSonics A90-031-03 PLASMA/LAMP Failure Detection PCB Rev. J
- Gasonics A95-027-01 Air Ion Devices Power Supply
- GaSonics A95-053-02 & A95-205-01 Lamp Power Box Aura 2000-LL
- GaSonics A95-053-02 Lamp Illuminator Power Box Assembly
- GaSonics A95-053-02 Lamp Illuminator Power Box Assembly
- GaSonics A95-060-01 & A95-056-01 Endpoint Detector
- GaSonics A95-107-01 LED and Interface Control Panel
- GaSonics A95-107-01 LED and Interface Control Panel Rev. F
- GaSonics A95-107-01 LED and Interface Control Panel Rev. H
- GaSonics A95-107-01 LED and Interface Control Panel Rev. J
- GaSonics A95-107-01 LED and Interface Control Panel Rev. L
- GaSonics A95-107-01-HV LED and Interface Control Panel
- GaSonics A95-107-01-R-D LED and Interface Control Panel Aura 2000-LL
- GaSonics A95-108-02 LED and Interface Control Panel PCB Rev. F A89-013-01
- GaSonics A95-108-02 LED and Interface Control Panel PCB Rev. H A89-013-01
- GaSonics A95-108-02 LED and Interface Control Panel PCB Rev. J A89-013-01
- GaSonics A95-108-02 LED and Interface Control Panel PCB Rev. J A89-013-01
- GASONICS A95-108-02-E-G Operator interface panel
- GaSonics A95-108-02-R-D LED and Interface Panel PCB A89-013-01 A-2000LL
- GaSonics A95-108-02-RE-E LED and Interface Control Panel PCB A89-013-01
- GaSonics A95-108-02-R-G LED and Interface Panel PCB A89-013-01 A-2000LL
- Gasonics A95-122-01 Load Lock Door Assembly Rev. G Aura 2000-LL
- GASONICS A95-146-01 weldment load lock to bulkhead 1/4FVCR
- Gasonics A95-151-01 Rev-B Gas Weldment Line
- GaSonics A95-205-01 Lamp Illuminator Module Rev. B A90-53-02 Aura 2000LL
- GaSonics A95-205-01 Lamp Illuminator Module Rev. C A90-53-02 Aura 2000LL
- GaSonics A95-205-01 Lamp Illuminator Module Rev. F
- GaSonics A95-205-01 Lamp Illuminator Power Box Disassembled A90-039-02
- GaSonics A95-205-01 Lamp Illuminator Power Box Incomplete A90-039-02
- GASONICS A95-219-01 wafer cooling station
- GaSonics A95-219-01 Wafer Cooling Station 200mm End Effecter
- Gasonics Alignment Tool PEP E1A
- Gasonics Aura 1000 / Tested to power on controls
- GASONICS AURA 2000 LL PLASMA STRIPPER, ASYST 2.3 THETA ARM, P/N 94-2806, NOS
- GASONICS AURA 2000 LL STRIPPER HNL A93-021-05/D Magnetron Waveguide MODULE
- GASONICS AURA 2000 LL STRIPPER, END EFFECTOR THETA ARM, 02-1322
- GASONICS AURA 2000 LL STRIPPER, HNL A93-021-04/B Magnetron Waveguide MODULE
- GASONICS AURA LAMP CURRENT SENSORS A90-039-02
- GASONICS AURA,SIGN, PLATE, PANEL 14’x10′
- Gasonics Bellows Assembly 100314911 A20-038-01 NW16,3.94
- Gasonics Bellows Tube Assembly 100314911 NW16 3.94
- Gasonics Branson / IPC L-3510 486 MOTHERBOARD, 95-0288
- Gasonics Branson / IPC L-3510 Display Receiver PCB. PWA 16473-01
- Gasonics Cajon A93-032-01 G321-4-GX-2 Aura 1000 Gas Line SS Flex Tube Pyrex Tip
- GaSonics Data Technology DTC2280 16-bit ISA IDE Control Card
- Gasonics Display Master CGA, 16924-01, Yamaha YDM6420 RA1 DISPLAY CGA006804
- GaSonics DTC2280 95-0289 Data Technology 16-bit ISA IDE Control Card PCB
- GaSonics Etcher / Novellus Chamber, Water, Cooler Part # A01-132-01
- Gasonics International 12-300000-30 Scorpion DC Section- Microwave Power Supply
- Gasonics International DISPLAY DECODER 90-2609 REV. A #212047-BB5
- Gasonics International PCA, LOADLOCK, INTERFACE BD 90-2608 REV. A #212045-BB5
- Gasonics International PCA, LOADLOCK, INTERFACE BD 90-2608 REV. B #212046-BB5
- GASONICS International PCA, Universal Digital BRD, 90-2586, Board
- GASONICS International PCB Printed Circuit Board A90-005-02 Controller Board
- Gasonics International PCB, CONTROLLER BOARD 90-2658 Rev. A #212042-BB5
- Gasonics International PCB, CONTROLLER BOARD 90-2658 Rev. C #212041-BB5
- Gasonics INTL, PCA, MICROWAVE GEN INTFC, MINI-CONTROLLER, 90-2516
- GaSonics IPC A90-014-01 Display Decoder PCB A89-014-01 A-2000LL
- GaSonics IPC Display Decoder 90-2609
- Gasonics L-3510 Asher Display DRIVER, PWA 16498-01
- GASONICS LAMP CONTROLLER A3000 17447-01 REV D
- Gasonics MFC/MFM Interface Board PCB 90-1036-01
- Gasonics MFC/MFM Interface Board PCB 90-1036-01
- Gasonics Novellus 06-2694 Chamber Plasma Plus Quartz Uni-Insert GDP 99-00013-A
- Gasonics Novellus Quartz Spool PEP+ Metron
- Gasonics Novellus Quartz Spool PEP-1 Metron
- GaSonics Novellus Ring EMI Shield Magnetron A01-003-01
- GaSonics OT&E 7321 Transformer, 208 Volts L-L, 480 Volts L-L @ 125 Amps Line
- Gasonics PCA A90-033-01 Rev-A TC Amp & Cold Junc. Comparator
- Gasonics PCB Controller Board 90-2607 Rev. H PCB Controller Board
- Gasonics PCB Controller Board A90-005-02 Rev. R
- Gasonics PEP 4800DL – Parts Unit / Good Chamber / Astex / Some Controls
- Gasonics PEP AC power box, breaker box 3500 series
- GASONICS PEP PLASMA QUARTZ TUBE 16783-001 REVB
- GaSonics Pinhole Detecator (120 Vac) 98-0403-00 Operating Manaual
- GaSonics Plasma Asher 3010 Floppy Disc Drive 16321-01D
- Gasonics Plasma Asher 3010 Floppy Drive, P/N 16321-01D
- Gasonics Plasma Asher A-3000 Single Channel WatchDog PCB. 90-1061
- Gasonics Plasma Asher A-3010 Digital Lamp Control Module
- Gasonics Power Supply 13389-01
- Gasonics Vacuum Feedthrough Feedthru
- GaSonics VHP Breaker Enclosure, QTE 6929, 60-0033, PCP 95-0317, A-365 3208LP
- GaSonics, / PM 732, PM732 / AUTOMATCH, 12390-02
- Gasonics, AceCo, ASSY WAFER NEST PC, p/n A95-218-01, S33-1403
- GaSonics, Controller PC Board, p/n A90-005-01
- Gasonics, DONUT QTZ 9.5IN, 8IN, p/n 6932000
- GASONICS/ IPC 2730 JUNCTION AVE MATCHING BOX P/N 12390-02 PM 732 AUTOMATCH FREE
- GASONICS/ IPC 31172 HUNTWOOD AVE MATCHING BOX P/N 16801-01 PM 732 AUTOMATCH FREE
- GASONICS/ICP PCA A3000 LAMP CONTROLLER REV.D
- GaSonics/IPC 90-1055-01 REV. A Interface I/O Driver
- GaSonics/IPC A90-039-02 Aura Lamp Current Sensors Reseller
- GaSonics/IPC A90-040-01 Heater/Lamp Detect Board PCB
- GASONICS-IPC 15367-01 GLASS ROD
- GASONICS-IPC 17391-01 A3000 CHAM. HTR. PWR. INTERFACE BOX
- GASONICS-IPC 71824-05 GEAR ALUMINIUM
- GASONICS-IPC 80-V01-09-07 RING QUARTZ LID CENTERING
- GASONICS-IPC 870A0021 O-RINGS FOR ETCH KIT, SEMI-ANNUAL; KIT
- GASONICS-IPC 90-2588 Dual Setpoint SCR Controller
- GASONICS-IPC A78-005-01 O-RING SILICON-CHAMBER-UP, SIZE #267S70
- GASONICS-IPC A78-008-01 O-RING-SILICON-CHAMBER-BO SIZE #259S70
- GASONICS-IPC A78-009-01 O-RING SILICON-DOOR SIZE #250S70
- GASONICS-IPC A78-029-01 O-RING TEFLON COATED-(SS) SIZE #213TES
- GASONICS-IPC A90-031-03 PCB, PLASMA/LAMP FAILURE DETECTION
- GASONICS-IPC A90-042-01 PCB, A3000 LAMP CONTROLLER
- GASONICS-IPC A95-062-01 ARM II,ASSY,W/PCA,A94-062-01:MOTOROLA
- Hardware GRAINGER 19-2652 NOVELLUS NYLON BUSHING FOR GASONICS ASHER DOOR (PKG 10
- Heater Jacket Kit WATLOW YSW-200-9806 GASONICS
- Hine 853-4290-002 Process Chamber Elevator GaSonics 94-1118 06763-005
- Hine 853-4290-002 Process Chamber Elevator GaSonics 94-1118 06763-805
- Hine Design 02423-001 Arm Control Board PCB 06764-001 GaSonics A-2000LL
- Hine Design 02423-001 Arm Control Board PCB 06764-002 GaSonics A-2000LL
- Hine Design 02423-001 Arm Control Board PCB 778-2I GaSonics Aura A-2000LL
- Hine Design 04290-101 Load Lock Elevator GaSonics 94-1119
- Hine Design 04290-201 Process Chamber Elevator Gasonics 94-1118
- Hine Design 200mm Chamber Robot Assembly Gasonics Aura A-2000LL
- Hine Design 778-2I Arm Control Board GaSonics Aura 2000-LL
- Hine Design 853-4290-001 Load Lock Elevator GaSonics 94-1119 06763-005
- Hine Design 853-4290-001 Load Lock Elevator GaSonics 94-1119 810-2140-005A
- Hine Design 860 Vacuum Arm Assembly Missing Screws GaSonics A-2000LL
- Hine Design 860 Vacuum Arm Assembly No End Effector GaSonics A-2000LL
- Hine Design 885-2423 Arm Control Board PCB 778-1I GaSonics Aura A-2000LL
- Hine Design Inner Chamber Transfer Robot Assembly Gasonics Aura A-2000LL
- Hine Design Inner Chamber Transfer Robot Gasonics Aura A-2000LL
- Hine Design Left Wafer Indexer Gasonics Aura 2000-LL
- Hine Design Right Wafer Indexer GaSonics Aura 2000-LL
- Isolation valve Gasonics A2000 Aura. varian L6281701. NW-16-A/0. LVC00578
- LAM Gasonics Novellus 17688-01 Rev-B Quartz Shower Head Gas Distribution Plate
- Lamp GASONICS 24PSB LAMP, PILOT LIGHT PN 40.0048 (PKG 14)
- MDC 687000 LIFTER BEARING FOR ASHER (GASONICS)
- MOOG 001-6618-02, DC Motor, Gasonics 3510 Robot Assy Motor
- Nor-Cal 950209-2 Isolation Valve, Gasonics 22-0138, KF-50, NW50
- Nor-Cal ESVP-200-99 Isolation Valve, Bellows, Gasonics 94-3101
- Novellus / Gasonics, PC Board – CONTROLLER BD W/4.11 EPROM, p/n 90-2658
- Novellus / Gasonics, PC Board – MFC / MFM INTERFACE, p/n 90-1036-01
- Novellus 73-0068 GSNX Elevator Alignment Tool Left Side Pin GaSonics
- Novellus 73-0068 GSNX Elevator Alignment Tool Right Side Pin GaSonics
- Novellus 90-2735 Interlock BD A2000 PCB Rev A & Rev B
- Novellus 90-2735 Interlock BD A2000 PCB Revision B
- Novellus 90-2736 Dual Setpoint SCR Controller PCB Ver. B GaSonics A-2000LL
- Novellus 90-2736 Dual Setpoint SCR Controller PCB Ver. C GaSonics A-2000LL
- Novellus 90-2736 Dual Setpoint SCR Controller PCB Ver. D GaSonics A-2000LL
- NOVELLUS A01-328-01 Gasonics Cover Top Process Chamber
- NOVELLUS A95-122-01 Gasonics Load Lock Door External Assy.
- Novellus A95-145-01 Gasonics Flushmount door assembly with broken Glass
- NOVELLUS GASONICS 01-6129 ARM DOOR CLOSURE RIGHT
- Novellus Gasonics 06-0091-01 Quartz Plasma Chamber
- Novellus Gasonics 06-2694 Quartz Plasma Chamber PEP+
- Novellus Gasonics 06-2694 Quartz Plasma Chamber PEP+
- NOVELLUS GASONICS 3510 Z-BOT 1 BROOKS AUTOMATION ROBOT 1-0000-27
- Novellus Gasonics 90-2686 PCA, MAIN SIDE DISTRIBUTION BOARD
- Novellus GaSonics 94-1172 Rotator, Receive Asyst
- NOVELLUS Gasonics 95-4406 860,VACUUM,ARM,EFFECTOR,RND,QSS ROBOT / WAFER
- NOVELLUS GASONICS 96-2372 CABLE ASSY SMIF
- NOVELLUS GASONICS A01-6128 ARM DOOR CLOSURE LEFT
- NOVELLUS GASONICS A01-6131 SHAFT MAIN DRIVE
- Novellus Gasonics A95-122-01 Load Lock Door Assembly ( Semiconductor Part)
- NOVELLUS Gasonics A95-219-01 Station Wafer Cooling
- NOVELLUS Gasonics A96-110-01 Cable RF on Indicator
- NOVELLUS GASONICS I/O PCB 16945-02
- Novellus Gasonics PEP Iridia DL Plasma Asher
- NOVELLUS GaSonics Photo Diode End Point Detector A95-056-01 rev.c
- Novellus Gasonics, Endpoint Detector — A95-056-01
- NOVELLUS GaSonics: Photo-Diode End Point Detector A95-056-01
- NOVELLUS SYSTEMS / GASONICS A90-031-03 PCB, Plasma/Lamp, Failure Detection
- NOVELLUS SYSTEMS / GASONICS A90-031-03 PCB, Plasma/Lamp, Failure Detection
- Novellus, Gasonics, DISK, DIFF QTZ QLW 200MM, p/n 6931800
- Novellus, Gasonics, PC Board – L.L.P.C, LIFTER, p/n 94-2807
- Novellus, Gasonics, PLATE, SHOWERHEAD QTZ QLW 200MM, p/n 6931900
- Novellus, Gasonics, TUBE, QUARTZ, PLASMA THICK, Model GS-A1056, p/n NM0001-0980
- Novellus, Gasonics, WINDOW, QTZ, 10IN 8IN, p/n 6932100
- Novellus/GaSonics 94-1172 Rotator, Receive Asyst PN: 04600-002 w/Arm Control
- Novellus/gasonics 95-3154 Microwave Controller Plug-in Module Assembly
- Novellus-Gasonics 01-2835 pin dowel 0.187 x 0.75L W/4-40X
- Novellus-Gasonics 01-2843Pin 0.187dia x 1.453 L SS
- Novellus-Gasonics A01-012-01 CHAMBER BOTTOM AURA 1000
- Novellus-Gasonics A95-035-00 Door Nest
- Novellus-Gasonics A95-171-01 Load Lock Assy Kwik Flange Fitting
- O-Ring Viton 50.50″ID x .275″Novellus/Gasonics 78-2931
- O-Ring Viton 50.50″ID x .275″Novellus/Gasonics 78-2931
- PCB GASONICS 90-2402 SPR GASBOX RF INTERFACE MINI CONTROLLER PCB REV E
- PCB NOVELLUS Gasonics 90-2735 PCA, interlock board
- PCB PLASMA / LAMP FAILURE DETECTION Novellus GASONICS A90-031-03
- PCB SBC Controller Gasonics Vortex86DX/SX European Plasma Technology 81511122
- Phasetronics PTR1000-120-KB Control PCB, 36-0083, Gasonics 73494-01
- Planar Model 943-0046-01 Rev D, Gasonics L-3510 Display 95-0296, 801-0131-01
- PLANAR P/N 943-0046-02 REV A LCD Assembly PCB, for Gasonics 3510, P/N 95-0296
- Potter & Brumfield W92-X112-1 Circuit Breaker, Gasonics 73185-39
- Potter Brumfield KRPA-11DG-24 Relay, Gasonics 70964-03, 424316
- Quality Transformer And Electronics 60-2031 Sace Isomax S4-S5 Sace S4 Gasonics
- Robot NOVELLUS Gasonics 0770-727470 SHAFT,ROBOT,WRIST
- Robot NOVELLUS Gasonics 95-4406 860 VACUUM,ARM,EFFECTOR,RND,QSS 0
- Robot Novellus-Gasonics 02-1322 END,EFFECTOR,THETA AURA 2000 ASYST 04220-001
- Robot Novellus-Gasonics 95-4406 860,VACUUM,ARM,EFFECTOR,RND,QSS ASYST 04220-001
- Seki Denko PL1500-03 Optics cable ceof 1.1963 Gasonics pn 94-3050
- Sensor FABCO AIR PRL-11 Novellus-Gasonics 95-2971 Assy pins down
- Sensor Novellus 38-0210 Gasonics switch home sensor
- Sensor Novellus 93-0122 Gasonics position sensor
- SERVO DRIVER, (PWM MOTOR)NOVELLUS Gasonics A94-1168 810-2850
- SMC NCDRA1BS100-90-A67 Pneumatic Rotary Actuator, NOS, GASONICS 2000LL
- Spring Novellus-Gasonics A17-017-01 Door SS PKG 10
- Thermo Couple (TC) type S 2 position Zone 3 Novellus 70-0019 Gasonics
- Thermo Couple (TC) TYPE S 2 zone IAS 62585 GASONICS 70-0017
- Tubing NOVELLUS GASONICS A95-150-01 Assy Load Lock Purge Line Weldment
- Valve CKD 3PA110-P11 Novellus-Gasonics 22-2786 Solenoid
- Valve NOVELLUS A01-357-01 Gasonics DOOR,CHAMBER
- Valve NOVELLUS A95-121-01 Gasonics Loadlock interior chamber door assembly
- Valve Pneumatic panel assy, load lock Gasonics A94-042-01
- Wafer TC ASSEMBLY,A2000 JIG NOVELLUS Gasonics 94-2730
- Washer GASONICS A19-001-01 WASHER NYLON 1/4 (PKG 10)
SS380EB
The Novellus GaSonics Waveguide is an anodized aluminum waveguide which directs the Magnetron’s watts of 2.45 GHz microwave energy to the plasma tube for the sole purpose of generating the plasma essential in the production of Electrically Neutral Monatomic Oxygen to remove resist.The waveguide includes a tuning slug and a dummy load. The tuning slug is used to put maximum power at the plasma tube and reduce the reflected power at the magnetron. The dummy load, a silicon carbide wedge that is utilized as the load for the microwave for the first few cycles. After that time, the gasses become the sufficient resistive load for the microwave.