Main Maker

Novellus GaSonics Waveguide

Description

Part Number: A93-021-01 ; A93-021-02, A93-021-03, A93-021-04, A93-021-05, A93-021-06, A93-021-07, A93-021-08 , Novellus GaSonics Waveguide

Condition: New

Lead time: TBD

Valid Time: Subject to prior sale. These are only for end users. Appreciate your time!

Related Equipment: Semiconductor Front End Process Equipment, Plasma Asher, Dry Stripper, Plasma Clean, Plasma Descum, Plasma Clean equipment, Gasonics Aura 1000, Gasonics AE 2001, Gasonics Aura 3000, Gasonics Aura 3010, Gasonics Aura 2000LL, Gasoncis AW 2000LL, Gasonics PE3510, Gasonics L3510. Novellus GaSonics Waveguide ,HNL Waveguide.

Our Service: Waveguide Systems and Components. We offer a vast selection of ancillary waveguide components used to transmit,
measure and alter the microwave energy generated from the magnetron.

  • Consulting
  • Waveguide components
  • Waveguide subsystems
  • Directional Couplers
  • Customized Orders
  • Flanges and other Accessories
  • Circulators

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers.

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Please contact us if you are interested in the Gasonics parts. Appreciate your time. These are  only for end user. They are subject to prior sale without notice. First come, first serviced.

  1. 8″ GASONICS SEMICONDUCTOR PROCESSING CHAMBER WATER COOLER INTEL LOAD LOCK
  2. 90-1064 Gasonics Driver Bd
  3. 95-2992 / POWER SUPPLY GASONICS MWAVE PWR / GASONICS
  4. AMAT Applied Materials 02-351965-00 Positioning Robot Gasonics Aura 2000-LL
  5. Andover Corporation Optical Filter AM-44719 GaSonics Inernational ANDV3985
  6. Applied Ceramics Collar Quartz 93-00105a for Gasonics IPC l3510
  7. Applied Materials (AMAT) 30085-000 CLAMP GASONICS MODIFIED
  8. APTech AP3550S 2PW FV4 MV4 Diaphragm Valve Regulator, Gasonics
  9. ASTEX GERSERLING AGL C12872 FILAMENT TRANSFORMER 60-1016 GASONICS
  10. ASTEX GERSERLING AGL C12872 FILAMENT TRANSFORMER 60-1016 GASONICS
  11. ASTEX GERSERLING AGL C12872 FILAMENT TRANSFORMER 60-1016 GASONICS
  12. ASTEX GERSERLING AGL C12872 FILAMENT TRANSFORMER 60-1016 GASONICS
  13. Asyst 04290-101 Load Lock Elevator GaSonics 94-1119 Hine Design 06763-005
  14. Asyst 04290-101 Load Lock Elevator GaSonics 94-1119 Hine Design 06763-805
  15. Asyst 04290-101 Load Lock Elevator Rev. 0 GaSonics 94-1119 Hine Design
  16. Asyst 04290-101 Load Lock Elevator Rev. 1 GaSonics 94-1119 Hine 06763-005
  17. Asyst 04290-101 Load Lock Elevator Rev. 1 GaSonics 94-1119 Hine Design
  18. Asyst 04290-201 Process Chamber Elevator GaSonics 94-1118 Hine 06763-005
  19. Asyst 04290-201 Process Chamber Elevator GaSonics 94-1118 Hine 06763-805
  20. Asyst 04290-201 Process Chamber Elevator Rev. 0 GaSonics 94-1118
  21. Asyst 04290-201 process chamber elevator, Gasonics Novellus 94-1118 Hine design
  22. Asyst 04290-201 process chamber elevator, Gasonics Novellus 94-1118 Hine design
  23. Asyst 04630-003 Load Elevator Indexer Hine GaSonics 94-1175 Aura 2000-LL
  24. Asyst 04630-003 Load Elevator Indexer Hine GaSonics 94-1175 Aura 2000-LL
  25. Asyst 04630-003 Loader Elevator Top Indexer w/ Hine Design PCB, Gasonics 94-1175
  26. Asyst 04630-004 Load Elevator Indexer Hine GaSonics 94-1174 Aura 2000-LL
  27. Asyst 04630-004 Load Elevator Indexer Hine GaSonics 94-1174 Aura 2000LL
  28. Asyst 04630-004 Loader Elevator Top Indexer w/ Hine Design PCB, Gasonics 94-1175
  29. Asyst 853-4290-101 Load Lock Elevator GaSonics 94-1119
  30. Asyst Hine Design 04630-003 Ergo Loader Gasonics 94-1175
  31. Asyst Hine Design 04630-003 Load Elevator Indexer GaSonics 94-1175
  32. Asyst Hine Design 04630-004 Load Elevator Indexer Gasonics 94-1174
  33. Asyst Hine Design 04630-004 Load Elevator Indexer Gasonics 94-1174
  34. Asyst Hine Design 04630-004 Load Elevator Indexer Gasonics 94-1174 Damaged
  35. Asyst Technologies 06763-005 48V Control Board PCB GaSonics ABX-66242-09-00
  36. Asyst Technologies 06763-005 48V Control Board PCB GaSonics ABX-79582-28-00
  37. Asyst Technologies 06763-005 48V Control Board PCB GaSonics ABX-88919-41-11
  38. Asyst Technologies 06764-005 48V Control Board PCB GaSonics ABX-78355-26-00
  39. B48 GASONICS LAMP CONTROL MODULE A3000 17447-01 REV.A
  40. Bellows HPS 100314911 GASONICS A20-038-01 Bellows NW16 3.94
  41. Belt Novellus-Gasonics 15-2715 390-5GT-1B theta Axis
  42. Bolt Novellus-Gasonics A93-023-01 pkg 3 shoulder screw
  43. Branson / IPC Gasonics Teflon Ring, L-3200, 14382-01  old stock
  44. Branson/IPC Gasonics L-3200 60 Day PM Kit, 6022000002
  45. Branson/IPC Gasonics L-3200 Controler ASSY P/N 13652-01
  46. Branson/IPC Gasonics L-3200 Quartz Chamber
  47. Branson/IPC Gasonics L-3200, AC CONTROL PANEL,
  48. Branson/IPC Gasonics Teflon Ring, L-3200, 14382-01
  49. Branson-IPC / Gasonics PN: 03470-01 Input Tuning Capacitor
  50. Brooks Automation 001-1070-02 Rev. D12 Z-Bot Driver Board Controller Gasonics
  51. Brooks Automation 001-1070-02 Z-Bot Driver Controller PCB Gasonics L-3510
  52. Cable LAM – GASONICS A96-072-01 CPU,J10-J32
  53. Cable NOVELLUS Gasonics 96-0235 CABLE ASSY, HIGH VOLTAGE TO MAGETRON
  54. Cable NOVELLUS GASONICS A96-094-01 ASSY,CABLE,LL,CPU
  55. Cajon Gasonics A69260D01 Gas Inlet Stand-off
  56. CHEMRAZ 2-025 C520, GASONICS ref# 78-2789
  57. Computer Accessory GASONICS 94-3195 Memory Nodule 64MB SRAM
  58. Computer Accessory track ball panel mount 2 button NOVELLUS – Gasonics 68-0002
  59. Electrical Power plug 10A 250V Novellus 73254-12 Gasonics
  60. Fuse 600VAC 50A (JJS) 13/16 X 1-9/16 T-TRON JJS-50 GASONICS
  61. Gasket Novellus 78-0188 gasonics gasket graphite
  62. Gasket Novellus 78-189 gasonics gasket graphite
  63. Gasonic 73797-6 Magnetron A1000, Microwave, Water Cooled,
  64. Gasonic 90-2516, Board
  65. Gasonics / Novellus A95-060-01 Rev-A Endpoint Detector
  66. GaSonics / Novellus Ferrofluidic Gear A01-441-01
  67. Gasonics / Varian CV26 Right Angle Isolation Valve
  68. Gasonics /Petrus, Quartz Plate 200mm, Dwg 6800300, p/n 036-8003-00
  69. Gasonics 01-4598 Bottom Cooling Ring 300mm
  70. Gasonics 018-12104 Rev-A Gas Line
  71. Gasonics 03-2630 Elbow Tubes ( Tubes )
  72. Gasonics 03-2705 Rev-30 Pressure Relief Tubes (Lot of 6)
  73. Gasonics 06-0091 Quartz Plasma Chamber, 06-0091/B, Novellus
  74. GASONICS 06-0103, Quartz Probe Tip, 4″ Optical Sensor
  75. GASONICS 06-0122, Thermowell, Steam, Exhaust Boiler-VHP
  76. GASONICS 06-0123, CQuartz Coupling, 3-Way, External Boiler
  77. Gasonics 06-0135, Quartz Puck Vacuum Sensor, BRU, 12/16″ x 7/8″
  78. GaSonics 06764801 Arm Controller GaSonics Aura 2000-LL
  79. Gasonics 07-0001 Rev. 1, 0.50 OD. x 0.035 W x 2.10 L
  80. Gasonics 07-0002 Rev. 1, 0.50 OD. x 0.035 W x 1.75 L
  81. Gasonics 07-0003 Rev. 1, 0.50 OD. x 0.035 W x 1.50 L
  82. GASONICS 07-0026, Elbow Tube, Line 3, Heat Exchanger, 0.50″ OD
  83. GASONICS 07-0051, Weldment, Process Purge 1
  84. GASONICS 07-0052, Elbow Tube, Chill Ring Return Line 1, 0.50″ OD
  85. GASONICS 07-0057, Elbow Tube, Pressure Relief #1, 0.50″ OD
  86. GASONICS 07-0058, Elbow Tube, Pressure Relief #2, 0.50″ OD
  87. GASONICS 07-0059, Pressure Relief L-Tube, 0.50″ OD, 16.5″
  88. GASONICS 07-2061, Tube Assembly, PS1/FS2
  89. Gasonics 111748 Rev-1 Swagelok HTC W31BL/BE3-6 Gas Line
  90. GaSonics 12N-010-13 Intel Mechanization Board PCB Card 05003-001
  91. GaSonics 12N-010-13 Intel Mechanization PCB
  92. GaSonics 12N-010-13 Intel Mechanization PCB Revision 8
  93. Gasonics 13015-02 Rev-A DC Driver Board
  94. Gasonics 14738-01 Bubbler, Quartz, 190mm
  95. Gasonics 14738-01 Quartz Bubbler 190mm 7.5″
  96. Gasonics 14738-01 Quartz Bubbler 190mm 7.5″
  97. GASONICS 14738-01/E BUBBLER QTZ *  IN FACTORY BAG *
  98. GASONICS 16025-02 DC POWER DISTRIBUTION MODULE BRANSON/IPC TESTED WORKING FREE
  99. GASONICS 16025-02 DCPOWER DISTRIBUTION MODULE
  100. GASONICS 16025-02 REV:A,DC POWER DISTRIBUTION MODULE BRANSON/IPC WORKING FREE
  101. Gasonics 16321-01 Floppy Disc Drive, Plasma Asher 3010, 193077A5-29
  102. Gasonics 16337-02 Quartz Collar For Fiffusion Furnace
  103. Gasonics 16532-01 Plate Quartz Lamp
  104. Gasonics 16784-01 Spool Quartz
  105. Gasonics 17069-01 Panel Cover
  106. Gasonics 17622-01 Plate Diffuser, Lamp, Quartz, IPC
  107. GASONICS 23070 Needle Assy w/Fitting
  108. Gasonics 2343-01 Rev-1 Gas Line
  109. Gasonics 2930A16A Microwave Signal Board
  110. GASONICS 39-2013 GE 1000W QUARTZ LINE THERMAL PROCESS LAMP
  111. GaSonics 73-0068 Elevator Alignment Tool w/ 94-2730 Wafer Jig
  112. Gasonics 73333-05 Kit Door Cylinder, Clippard UDR-17-2-M
  113. Gasonics 73797-05 PWB Assembly SCR Control Broad, PCB, C12294,
  114. GASONICS 810-23427184 CONTACTOR PLATE
  115. GASONICS 89-1048-01 PCB HIPOX POWER CONTROL 90-1048-01
  116. Gasonics 90-1001-01 PC Board Assy, Alarm Hipox, PWB 89-1001-01
  117. GaSonics 90-1002-02 Valve Control PCB Assembly
  118. Gasonics 90-1033-02 Abort Reset Over Temp Card, PCB, FAB 89-1033-01
  119. GaSonics 90-1033-02 Abort Reset Over Temp PCB Card
  120. Gasonics 90-1036-01 MFC/MFM Interface
  121. Gasonics 90-1036-01 MFC/MFM Interface Board
  122. GaSonics 90-1036-01 MFC/MFM Interface Board
  123. Gasonics 90-1036-01 MFC/MFM Interface PCB Revision C
  124. Gasonics 90-1036-01 MFC/MFM Interface PCB Revision F
  125. Gasonics 90-1036-01, 16495-71REVF, MFC/MFM Interface, PCB, Controller
  126. GASONICS 90-1079 Industrial PCB Plasma Failure Detection Board Card Unit 89-1100
  127. GaSonics 90-2570 Controller Board PCB Rev. A FabMotion
  128. Gasonics 90-2588 Rev-4 Dual Set Point SCR Controller 89-2571 Rev-B
  129. Gasonics 90-2588 Rev-5 Dual Set Point SCR Controller
  130. Gasonics 90-2607 Controller Board PCB Rev. F
  131. Gasonics 90-2607 Display Decoder Board PCB Rev. A
  132. Gasonics 90-2607 PCB Controller Board —
  133. Gasonics 90-2607 PCB Controller Board Rev E Aura 2000-LL
  134. Gasonics 90-2607 PCB Controller Board Rev H Aura 2000-LL
  135. Gasonics 90-2608 PCA Load Lock Interface Board PCB Rev B
  136. GaSonics 90-2608 PCA Loadlock Interface PCB Board (Asher System)
  137. GaSonics 90-2608 PCA Loadlock Interface PCB Board Rev. A A-2000LL
  138. GaSonics 90-2608 PCA Loadlock Interface PCB Board Rev. C A-2000LL
  139. GaSonics 90-2608 PCA Loadlock Interface PCB Board Rev. D A-2000LL
  140. Gasonics 90-2608 Rev.B PCA LOADLOCK INTERFACE BOARD
  141. GaSonics 90-2609 Display Decoder PCB A89-005-01 Rev. A A-2000LL
  142. Gasonics 90-2609 Display Decoder PCB Rev B Aura 2000-LL
  143. GASONICS 90-2650 / 902650 (RQAUS1)
  144. GaSonics 90-2650 Controller Board PCB A90-005-02 Rev.L – Tested & working
  145. GaSonics 90-2650 Controller Board PCB Rev. A
  146. GaSonics 90-2658 Controller Board PCB A89-005-01 Rev. A A-2000LL
  147. GaSonics 90-2658 Controller Board PCB A89-005-01 Rev. C A-2000LL
  148. GaSonics 90-2658 Industrial PCB Printed Circuit Controller Board Module Unit
  149. Gasonics 90-2658 PCB Controller Board Rev B Aura 2000-LL
  150. Gasonics 90-2658 Rev. A PCB Controller Board
  151. GaSonics 90-2670 PCA LED and Interface Panel PCB A89-013-01 A-2000LL
  152. GaSonics 9104 Quartz Chamber Plasma Asher 15698-02, ENI OEM-12B-06 RF Generator
  153. GaSonics 94-1175 Loader Elevator Top Indexer for Aura 2000-LL, Hine Design
  154. GaSonics 94-2807 48L Control Board PCB 09316-805 Aura 2000LL
  155. GASONICS 95-0275 , MICROWAVE POWER SUPPLY, GENERATOR
  156. Gasonics 95-1260 Industrial 9″ Display Computer System Control Panel Unit PARTS
  157. Gasonics 96-3041 Waveguide Failure Detection Board
  158. GASONICS A01-187-01 FLAG,DOOR SENSOR PKG 3
  159. Gasonics A02-062-01 Rev D Panel, Pneumatic, Standard
  160. Gasonics A06-010-01 Asher Plasma Tube for AE1000 / AE2001
  161. Gasonics A-2000LL HEATER LAMP DETECT, A90-040-01 REV F
  162. Gasonics A-2000LL PCA LIFTER, 48V CONTROL BOARD, 94-2807
  163. Gasonics A-2000LL PCA ROBOT ARM 20 VACUUM, 94-2805, ASYST ASSY 778-1I
  164. Gasonics A-2000LL PROCESS CHAMBER LIFT ASSY, 94-1118, ASYST 04290-201
  165. GaSonics A-2000LL Wafer Loader Transfer Arm
  166. GaSonics A-2000LL Wafer Loader Transfer Arm Missing End Effector
  167. Gasonics A60-002-03 Transformer A95-046-02
  168. Gasonics A60-010-01 Rev-D Model 6300 Transformer PS-7010-00 Quality Transformers
  169. Gasonics A78-006-01 O-Ring
  170. GaSonics A89-013-01 Control Panel PCB LED & Interface PCA G0-2670
  171. GaSonics A90-005-01 Controller PC Board
  172. Gasonics A90-005-01 Rev-D Controller Board
  173. Gasonics A90-005-02 Controller Board
  174. Gasonics A90-005-02 Industrial PCB Printed Circuit Controller Board Module #2
  175. Gasonics A90-005-02 Industrial PCB Printed Circuit Controller Board Module #3
  176. Gasonics A90-005-02 Industrial PCB Printed Circuit Controller Board Module #5
  177. GaSonics A90-005-02 Industrial PCB Printed Circuit Controller Board Module Unit
  178. GaSonics A90-005-06 Controller Board PCB A89-005-01 FabMation Aura A-2000LL
  179. Gasonics A90-011-01 Display Panel
  180. GaSonics A90-031-01 PLASMA/LAMP Failure Detection Circuit Board
  181. GaSonics A90-031-01 PLASMA/LAMP Failure Detection PCB Rev. C Aura A-2000LL
  182. GaSonics A90-031-03 Industrial PCB Plasma/Lamp Failure Detection Cards
  183. GaSonics A90-031-03 PCB Plasma/Lamp Failure Detection
  184. GaSonics A90-031-03 PLASMA/LAMP Failure Detection PCB Rev. A
  185. GaSonics A90-031-03 PLASMA/LAMP Failure Detection PCB Rev. C
  186. GaSonics A90-031-03 PLASMA/LAMP Failure Detection PCB Rev. E
  187. GaSonics A90-031-03 PLASMA/LAMP Failure Detection PCB Rev. H
  188. GaSonics A90-031-03 PLASMA/LAMP Failure Detection PCB Rev. J
  189. Gasonics A95-027-01 Air Ion Devices Power Supply
  190. GaSonics A95-053-02 & A95-205-01 Lamp Power Box Aura 2000-LL
  191. GaSonics A95-053-02 Lamp Illuminator Power Box Assembly
  192. GaSonics A95-053-02 Lamp Illuminator Power Box Assembly
  193. GaSonics A95-060-01 & A95-056-01 Endpoint Detector
  194. GaSonics A95-107-01 LED and Interface Control Panel
  195. GaSonics A95-107-01 LED and Interface Control Panel Rev. F
  196. GaSonics A95-107-01 LED and Interface Control Panel Rev. H
  197. GaSonics A95-107-01 LED and Interface Control Panel Rev. J
  198. GaSonics A95-107-01 LED and Interface Control Panel Rev. L
  199. GaSonics A95-107-01-HV LED and Interface Control Panel
  200. GaSonics A95-107-01-R-D LED and Interface Control Panel Aura 2000-LL
  201. GaSonics A95-108-02 LED and Interface Control Panel PCB Rev. F A89-013-01
  202. GaSonics A95-108-02 LED and Interface Control Panel PCB Rev. H A89-013-01
  203. GaSonics A95-108-02 LED and Interface Control Panel PCB Rev. J A89-013-01
  204. GaSonics A95-108-02 LED and Interface Control Panel PCB Rev. J A89-013-01
  205. GASONICS A95-108-02-E-G Operator interface panel
  206. GaSonics A95-108-02-R-D LED and Interface Panel PCB A89-013-01 A-2000LL
  207. GaSonics A95-108-02-RE-E LED and Interface Control Panel PCB A89-013-01
  208. GaSonics A95-108-02-R-G LED and Interface Panel PCB A89-013-01 A-2000LL
  209. Gasonics A95-122-01 Load Lock Door Assembly Rev. G Aura 2000-LL
  210. GASONICS A95-146-01 weldment load lock to bulkhead 1/4FVCR
  211. Gasonics A95-151-01 Rev-B Gas Weldment Line
  212. GaSonics A95-205-01 Lamp Illuminator Module Rev. B A90-53-02 Aura 2000LL
  213. GaSonics A95-205-01 Lamp Illuminator Module Rev. C A90-53-02 Aura 2000LL
  214. GaSonics A95-205-01 Lamp Illuminator Module Rev. F
  215. GaSonics A95-205-01 Lamp Illuminator Power Box Disassembled A90-039-02
  216. GaSonics A95-205-01 Lamp Illuminator Power Box Incomplete A90-039-02
  217. GASONICS A95-219-01 wafer cooling station
  218. GaSonics A95-219-01 Wafer Cooling Station 200mm End Effecter
  219. Gasonics Alignment Tool PEP E1A
  220. Gasonics Aura 1000 / Tested to power on controls
  221. GASONICS AURA 2000 LL PLASMA STRIPPER, ASYST 2.3 THETA ARM, P/N 94-2806, NOS
  222. GASONICS AURA 2000 LL STRIPPER HNL A93-021-05/D Magnetron Waveguide MODULE
  223. GASONICS AURA 2000 LL STRIPPER, END EFFECTOR THETA ARM, 02-1322
  224. GASONICS AURA 2000 LL STRIPPER, HNL A93-021-04/B Magnetron Waveguide MODULE
  225. GASONICS AURA LAMP CURRENT SENSORS A90-039-02
  226. GASONICS AURA,SIGN, PLATE, PANEL 14’x10′
  227. Gasonics Bellows Assembly 100314911 A20-038-01 NW16,3.94
  228. Gasonics Bellows Tube Assembly 100314911 NW16 3.94
  229. Gasonics Branson / IPC L-3510 486 MOTHERBOARD, 95-0288
  230. Gasonics Branson / IPC L-3510 Display Receiver PCB. PWA 16473-01
  231. Gasonics Cajon A93-032-01 G321-4-GX-2 Aura 1000 Gas Line SS Flex Tube Pyrex Tip
  232. GaSonics Data Technology DTC2280 16-bit ISA IDE Control Card
  233. Gasonics Display Master CGA, 16924-01, Yamaha YDM6420 RA1 DISPLAY CGA006804
  234. GaSonics DTC2280 95-0289 Data Technology 16-bit ISA IDE Control Card PCB
  235. GaSonics Etcher / Novellus Chamber, Water, Cooler Part # A01-132-01
  236. Gasonics International 12-300000-30 Scorpion DC Section- Microwave Power Supply
  237. Gasonics International DISPLAY DECODER 90-2609 REV. A #212047-BB5
  238. Gasonics International PCA, LOADLOCK, INTERFACE BD 90-2608 REV. A #212045-BB5
  239. Gasonics International PCA, LOADLOCK, INTERFACE BD 90-2608 REV. B #212046-BB5
  240. GASONICS International PCA, Universal Digital BRD, 90-2586, Board
  241. GASONICS International PCB Printed Circuit Board A90-005-02 Controller Board
  242. Gasonics International PCB, CONTROLLER BOARD 90-2658 Rev. A #212042-BB5
  243. Gasonics International PCB, CONTROLLER BOARD 90-2658 Rev. C #212041-BB5
  244. Gasonics INTL, PCA, MICROWAVE GEN INTFC, MINI-CONTROLLER, 90-2516
  245. GaSonics IPC A90-014-01 Display Decoder PCB A89-014-01 A-2000LL
  246. GaSonics IPC Display Decoder 90-2609
  247. Gasonics L-3510 Asher Display DRIVER, PWA 16498-01
  248. GASONICS LAMP CONTROLLER A3000 17447-01 REV D
  249. Gasonics MFC/MFM Interface Board PCB 90-1036-01
  250. Gasonics MFC/MFM Interface Board PCB 90-1036-01
  251. Gasonics Novellus 06-2694 Chamber Plasma Plus Quartz Uni-Insert GDP 99-00013-A
  252. Gasonics Novellus Quartz Spool PEP+ Metron
  253. Gasonics Novellus Quartz Spool PEP-1 Metron
  254. GaSonics Novellus Ring EMI Shield Magnetron A01-003-01
  255. GaSonics OT&E 7321 Transformer, 208 Volts L-L, 480 Volts L-L @ 125 Amps Line
  256. Gasonics PCA A90-033-01 Rev-A TC Amp & Cold Junc. Comparator
  257. Gasonics PCB Controller Board 90-2607 Rev. H PCB Controller Board
  258. Gasonics PCB Controller Board A90-005-02 Rev. R
  259. Gasonics PEP 4800DL – Parts Unit / Good Chamber / Astex / Some Controls
  260. Gasonics PEP AC power box, breaker box 3500 series
  261. GASONICS PEP PLASMA QUARTZ TUBE 16783-001 REVB
  262. GaSonics Pinhole Detecator (120 Vac) 98-0403-00 Operating Manaual
  263. GaSonics Plasma Asher 3010 Floppy Disc Drive 16321-01D
  264. Gasonics Plasma Asher 3010 Floppy Drive, P/N 16321-01D
  265. Gasonics Plasma Asher A-3000 Single Channel WatchDog PCB. 90-1061
  266. Gasonics Plasma Asher A-3010 Digital Lamp Control Module
  267. Gasonics Power Supply 13389-01
  268. Gasonics Vacuum Feedthrough Feedthru
  269. GaSonics VHP Breaker Enclosure, QTE 6929, 60-0033, PCP 95-0317, A-365 3208LP
  270. GaSonics,  / PM 732, PM732 / AUTOMATCH, 12390-02
  271. Gasonics, AceCo, ASSY WAFER NEST PC, p/n A95-218-01, S33-1403
  272. GaSonics, Controller PC Board, p/n A90-005-01
  273. Gasonics, DONUT QTZ 9.5IN, 8IN, p/n 6932000
  274. GASONICS/ IPC 2730 JUNCTION AVE MATCHING BOX P/N 12390-02 PM 732 AUTOMATCH FREE
  275. GASONICS/ IPC 31172 HUNTWOOD AVE MATCHING BOX P/N 16801-01 PM 732 AUTOMATCH FREE
  276. GASONICS/ICP PCA A3000 LAMP CONTROLLER REV.D
  277. GaSonics/IPC 90-1055-01 REV. A Interface I/O Driver
  278. GaSonics/IPC A90-039-02 Aura Lamp Current Sensors Reseller
  279. GaSonics/IPC A90-040-01 Heater/Lamp Detect Board PCB
  280. GASONICS-IPC 15367-01 GLASS ROD
  281. GASONICS-IPC 17391-01 A3000 CHAM. HTR. PWR. INTERFACE BOX
  282. GASONICS-IPC 71824-05 GEAR ALUMINIUM
  283. GASONICS-IPC 80-V01-09-07 RING QUARTZ LID CENTERING
  284. GASONICS-IPC 870A0021 O-RINGS FOR ETCH KIT, SEMI-ANNUAL; KIT
  285. GASONICS-IPC 90-2588 Dual Setpoint SCR Controller
  286. GASONICS-IPC A78-005-01 O-RING SILICON-CHAMBER-UP, SIZE #267S70
  287. GASONICS-IPC A78-008-01 O-RING-SILICON-CHAMBER-BO SIZE #259S70
  288. GASONICS-IPC A78-009-01 O-RING SILICON-DOOR SIZE #250S70
  289. GASONICS-IPC A78-029-01 O-RING TEFLON COATED-(SS) SIZE #213TES
  290. GASONICS-IPC A90-031-03 PCB, PLASMA/LAMP FAILURE DETECTION
  291. GASONICS-IPC A90-042-01 PCB, A3000 LAMP CONTROLLER
  292. GASONICS-IPC A95-062-01 ARM II,ASSY,W/PCA,A94-062-01:MOTOROLA
  293. Hardware GRAINGER 19-2652 NOVELLUS NYLON BUSHING FOR GASONICS ASHER DOOR (PKG 10
  294. Heater Jacket Kit WATLOW YSW-200-9806 GASONICS
  295. Hine 853-4290-002 Process Chamber Elevator GaSonics 94-1118 06763-005
  296. Hine 853-4290-002 Process Chamber Elevator GaSonics 94-1118 06763-805
  297. Hine Design 02423-001 Arm Control Board PCB 06764-001 GaSonics A-2000LL
  298. Hine Design 02423-001 Arm Control Board PCB 06764-002 GaSonics A-2000LL
  299. Hine Design 02423-001 Arm Control Board PCB 778-2I GaSonics Aura A-2000LL
  300. Hine Design 04290-101 Load Lock Elevator GaSonics 94-1119
  301. Hine Design 04290-201 Process Chamber Elevator Gasonics 94-1118
  302. Hine Design 200mm Chamber Robot Assembly Gasonics Aura A-2000LL
  303. Hine Design 778-2I Arm Control Board GaSonics Aura 2000-LL
  304. Hine Design 853-4290-001 Load Lock Elevator GaSonics 94-1119 06763-005
  305. Hine Design 853-4290-001 Load Lock Elevator GaSonics 94-1119 810-2140-005A
  306. Hine Design 860 Vacuum Arm Assembly Missing Screws GaSonics A-2000LL
  307. Hine Design 860 Vacuum Arm Assembly No End Effector GaSonics A-2000LL
  308. Hine Design 885-2423 Arm Control Board PCB 778-1I GaSonics Aura A-2000LL
  309. Hine Design Inner Chamber Transfer Robot Assembly Gasonics Aura A-2000LL
  310. Hine Design Inner Chamber Transfer Robot Gasonics Aura A-2000LL
  311. Hine Design Left Wafer Indexer Gasonics Aura 2000-LL
  312. Hine Design Right Wafer Indexer GaSonics Aura 2000-LL
  313. Isolation valve Gasonics A2000 Aura. varian L6281701. NW-16-A/0. LVC00578
  314. LAM Gasonics Novellus 17688-01 Rev-B Quartz Shower Head Gas Distribution Plate
  315. Lamp GASONICS 24PSB LAMP, PILOT LIGHT PN 40.0048 (PKG 14)
  316. MDC 687000 LIFTER BEARING FOR ASHER (GASONICS)
  317. MOOG 001-6618-02, DC Motor, Gasonics 3510 Robot Assy Motor
  318. Nor-Cal 950209-2 Isolation Valve, Gasonics 22-0138, KF-50, NW50
  319. Nor-Cal ESVP-200-99 Isolation Valve, Bellows, Gasonics 94-3101
  320. Novellus / Gasonics, PC Board – CONTROLLER BD W/4.11 EPROM, p/n 90-2658
  321. Novellus / Gasonics, PC Board – MFC / MFM INTERFACE, p/n 90-1036-01
  322. Novellus 73-0068 GSNX  Elevator Alignment Tool Left Side Pin GaSonics
  323. Novellus 73-0068 GSNX  Elevator Alignment Tool Right Side Pin GaSonics
  324. Novellus 90-2735 Interlock BD A2000 PCB Rev A & Rev B
  325. Novellus 90-2735 Interlock BD A2000 PCB Revision B
  326. Novellus 90-2736 Dual Setpoint SCR Controller PCB Ver. B GaSonics A-2000LL
  327. Novellus 90-2736 Dual Setpoint SCR Controller PCB Ver. C GaSonics A-2000LL
  328. Novellus 90-2736 Dual Setpoint SCR Controller PCB Ver. D GaSonics A-2000LL
  329. NOVELLUS A01-328-01 Gasonics Cover Top Process Chamber
  330. NOVELLUS A95-122-01 Gasonics Load Lock Door External Assy.
  331. Novellus A95-145-01 Gasonics Flushmount door assembly with broken Glass
  332. NOVELLUS GASONICS 01-6129 ARM DOOR CLOSURE RIGHT
  333. Novellus Gasonics 06-0091-01 Quartz Plasma Chamber
  334. Novellus Gasonics 06-2694 Quartz Plasma Chamber PEP+
  335. Novellus Gasonics 06-2694 Quartz Plasma Chamber PEP+
  336. NOVELLUS GASONICS 3510 Z-BOT 1 BROOKS AUTOMATION ROBOT 1-0000-27
  337. Novellus Gasonics 90-2686 PCA, MAIN SIDE DISTRIBUTION BOARD
  338. Novellus GaSonics 94-1172 Rotator, Receive Asyst
  339. NOVELLUS Gasonics 95-4406 860,VACUUM,ARM,EFFECTOR,RND,QSS ROBOT / WAFER
  340. NOVELLUS GASONICS 96-2372 CABLE ASSY SMIF
  341. NOVELLUS GASONICS A01-6128 ARM DOOR CLOSURE LEFT
  342. NOVELLUS GASONICS A01-6131 SHAFT MAIN DRIVE
  343. Novellus Gasonics A95-122-01 Load Lock Door Assembly ( Semiconductor Part)
  344. NOVELLUS Gasonics A95-219-01 Station Wafer Cooling
  345. NOVELLUS Gasonics A96-110-01 Cable RF on Indicator
  346. NOVELLUS GASONICS I/O PCB 16945-02
  347. Novellus Gasonics PEP Iridia DL Plasma Asher
  348. NOVELLUS GaSonics Photo Diode End Point Detector A95-056-01 rev.c
  349. Novellus Gasonics, Endpoint Detector — A95-056-01
  350. NOVELLUS GaSonics: Photo-Diode End Point Detector A95-056-01
  351. NOVELLUS SYSTEMS / GASONICS A90-031-03 PCB, Plasma/Lamp, Failure Detection
  352. NOVELLUS SYSTEMS / GASONICS A90-031-03 PCB, Plasma/Lamp, Failure Detection
  353. Novellus, Gasonics, DISK, DIFF QTZ QLW 200MM, p/n 6931800
  354. Novellus, Gasonics, PC Board – L.L.P.C, LIFTER, p/n 94-2807
  355. Novellus, Gasonics, PLATE, SHOWERHEAD QTZ QLW 200MM, p/n 6931900
  356. Novellus, Gasonics, TUBE, QUARTZ, PLASMA THICK, Model GS-A1056, p/n NM0001-0980
  357. Novellus, Gasonics, WINDOW, QTZ, 10IN 8IN, p/n 6932100
  358. Novellus/GaSonics 94-1172 Rotator, Receive Asyst PN: 04600-002 w/Arm Control
  359. Novellus/gasonics 95-3154 Microwave Controller Plug-in Module Assembly
  360. Novellus-Gasonics 01-2835 pin dowel 0.187 x 0.75L W/4-40X
  361. Novellus-Gasonics 01-2843Pin 0.187dia x 1.453 L SS
  362. Novellus-Gasonics A01-012-01 CHAMBER BOTTOM AURA 1000
  363. Novellus-Gasonics A95-035-00 Door Nest
  364. Novellus-Gasonics A95-171-01 Load Lock Assy Kwik Flange Fitting
  365. O-Ring Viton 50.50″ID x .275″Novellus/Gasonics 78-2931
  366. O-Ring Viton 50.50″ID x .275″Novellus/Gasonics 78-2931
  367. PCB GASONICS 90-2402 SPR GASBOX RF INTERFACE MINI CONTROLLER PCB REV E
  368. PCB NOVELLUS Gasonics 90-2735 PCA, interlock board
  369. PCB PLASMA / LAMP FAILURE DETECTION Novellus GASONICS A90-031-03
  370. PCB SBC Controller Gasonics Vortex86DX/SX European Plasma Technology 81511122
  371. Phasetronics PTR1000-120-KB Control PCB, 36-0083, Gasonics 73494-01
  372. Planar Model 943-0046-01 Rev D, Gasonics L-3510 Display 95-0296, 801-0131-01
  373. PLANAR P/N 943-0046-02 REV A LCD Assembly PCB, for Gasonics 3510, P/N 95-0296
  374. Potter & Brumfield W92-X112-1 Circuit Breaker, Gasonics 73185-39
  375. Potter Brumfield KRPA-11DG-24 Relay, Gasonics 70964-03, 424316
  376. Quality Transformer And Electronics 60-2031 Sace Isomax S4-S5 Sace S4 Gasonics
  377. Robot NOVELLUS Gasonics 0770-727470 SHAFT,ROBOT,WRIST
  378. Robot NOVELLUS Gasonics 95-4406 860 VACUUM,ARM,EFFECTOR,RND,QSS 0
  379. Robot Novellus-Gasonics 02-1322 END,EFFECTOR,THETA AURA 2000 ASYST 04220-001
  380. Robot Novellus-Gasonics 95-4406 860,VACUUM,ARM,EFFECTOR,RND,QSS ASYST 04220-001
  381. Seki Denko PL1500-03 Optics cable ceof 1.1963 Gasonics pn 94-3050
  382. Sensor FABCO AIR PRL-11 Novellus-Gasonics 95-2971 Assy pins down
  383. Sensor Novellus 38-0210 Gasonics switch home sensor
  384. Sensor Novellus 93-0122 Gasonics position sensor
  385. SERVO DRIVER, (PWM MOTOR)NOVELLUS Gasonics A94-1168 810-2850
  386. SMC NCDRA1BS100-90-A67 Pneumatic Rotary Actuator, NOS, GASONICS 2000LL
  387. Spring Novellus-Gasonics A17-017-01 Door SS PKG 10
  388. Thermo Couple (TC) type S 2 position Zone 3 Novellus 70-0019 Gasonics
  389. Thermo Couple (TC) TYPE S 2 zone IAS 62585 GASONICS 70-0017
  390. Tubing NOVELLUS GASONICS A95-150-01 Assy Load Lock Purge Line Weldment
  391. Valve CKD 3PA110-P11 Novellus-Gasonics 22-2786 Solenoid
  392. Valve NOVELLUS A01-357-01 Gasonics DOOR,CHAMBER
  393. Valve NOVELLUS A95-121-01 Gasonics Loadlock interior chamber door assembly
  394. Valve Pneumatic panel assy, load lock Gasonics A94-042-01
  395. Wafer TC ASSEMBLY,A2000 JIG NOVELLUS Gasonics 94-2730
  396. Washer GASONICS A19-001-01 WASHER NYLON 1/4 (PKG 10)

SS380EB

The Novellus GaSonics Waveguide is  an anodized aluminum waveguide which directs the Magnetron’s watts of 2.45 GHz microwave energy to the plasma tube for the sole purpose of generating the plasma essential in the production of Electrically Neutral Monatomic Oxygen to remove resist.The waveguide includes a tuning slug and a dummy load. The tuning slug is used to put maximum power at the plasma tube and reduce the reflected power at the magnetron. The dummy load, a silicon carbide wedge that is utilized as the load for the microwave for the first few cycles. After that time, the gasses become the sufficient resistive load for the microwave.

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