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Diffusion Furnace

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Description

Diffusion Furnace

ID-SS380EB20221123-2

Location: USA

  1. 2-Stack 8″ Diffusion Furnace System including Load Station. Gas Cabinet and ARGUS Control System.  As New with very limited operation time.  Tube 1 (top) has 5 MFC’s and tube 2 has 2 MFC’s.  Cantilever loaders with SiC paddles and new quartz process tubes included
  2. 4-Stack 6″ diffusion furnace system complete including 5 zone furnace, horizontal laminar load station/Diamond cantilevers, source cabinet with 5 MFC’s per tube level and control tower with 7355X process controllers.  Included are new quartz tubes, doors and SiC paddles per tube level. Presently configured for Wet/Dry Oxidation, Anneal, Anneal and dry oxidation and Anneal with N2/H2 but can be re-configured for any atmospheric process.

Condition: Used. Complete, Working. Refurbished. Customization is optional.

Valid Time: Subject to prior sale. This item is only for end user

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