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AMAT Endura 5500

Description

Applied Materials AMAT Endura 5500

AMAT Endura 5500

Specification : Wafer Size: 200mm/ Robot: HP(buffer and Transfer) / Loadlock: Narrow Body / Chamber: A – Pass Thru, B – Cooldown, C – PreClean PIK II, E,F – Orienter/Degas, 1 – Widebody AlCu, 2 – Watercool MCA+, 3 – Widebody TiN, 4 – Watercool MCA+ / 9600 Compressor, Neslab III

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