TYTAN 4600 ATMOSPHERIC PLCVD

Description

Model: TYTAN 4600 ATMOSPHERIC PLCVD, TYTAN MINI SERIES for diffusion, oxidation and LPCVD applications

REQUIRED UTILITIES:

For safe and stable operation of the system, the following facilities are required:

Electrical power supply:
- Power input: All standard line voltages, 3 phase, 50 or 60 Hz
- Control power: 5 kVA
- Maximum power per tube (w/o vacuum pump): 10.2 kVA
- Maximum system power (w/o vacuum pump): 50 kVA for fully
  populated 4 stack system w/o vacuum pump
Process gas pressure: 20 to 40 psi (or 1.4 to 3 bar)
Aux. N2/CDA: 80 to 100 psi (or 5.5 to 6.89 bar)
Exhaust system
- Scavenger exhaust: 250 CFM (7,000 LPM)
- Source cabinet exhaust: 250 CFM (7,000 LPM)
Cooling water: 2 to 4 GPM (7 to 14 LPM) at 15 to 20 C