Description
Refurbished Surface Technology Systems STS Multiplex ICP Plasma Etcher
SemiStar Corp. offers a refurbished Surface Technology Systems (STS) / SPTS Multiplex ICP Plasma Etcher based on current inventory and original equipment configuration. STS, later known as SPTS Technologies and now associated with KLA through the SPTS product line, is widely recognized for semiconductor plasma etch, silicon etch, dielectric etch, MEMS process development, and advanced semiconductor R&D applications.
The STS Multiplex ICP platform is designed for flexible ICP plasma etch applications including silicon etch, dielectric etch, oxide etch, nitride etch, chlorine-based plasma etch, and semiconductor process development. Available systems may be configured differently depending on original application, chamber configuration, gas chemistry setup, RF configuration, and wafer handling capability.
This available STS Multiplex ICP Plasma Etcher includes an electrostatic chuck configuration, single wafer loadlock, turbo pumping system, remote gas cabinet, and chlorine gas capability at refurbished condition.
Refurbished systems are supplied based on current inventory and original equipment configuration. Installation, startup assistance, and warranty may be available depending on system condition, final configuration, and project scope.
Photo shown is for reference only. Actual system appearance and configuration may vary.
Available System Configuration
| Item | Configuration |
|---|---|
| Manufacturer | Surface Technology Systems (STS) |
| Model | STS Multiplex ICP Plasma Etcher |
| Serial Number | 05943 |
| System Type | Multiplex ICP |
| Wafer Size | 4 inch standard |
| Chuck Type | Electrostatic Chuck (E-Chuck) |
| Main Etch Chamber | ASE chamber, approximately 72” L x 24” W x 48” H |
| Loadlock | Single wafer loadlock |
| RF Power Configuration | ENI ACG-3 and ENI ACG-10B |
| Low Electrode Chiller | Neslab CFT-75 |
| Turbo Pump | Leybold Turbo Pump |
| Gas Cabinet | STS remote gas cabinet with air canister and accessories |
| Gas Lines | 5 gas lines with 4 MFCs including Cl2 at refurbished condition |
| Computer | Computer and monitor included |
| Electronics Rack Layout | Standard layout proposed |
Typical Applications
- ICP plasma etch process development
- Silicon etch
- Dielectric and oxide etch
- MEMS process applications
- Chlorine-based plasma etch applications
- Semiconductor R&D
- University and research institute process development
- Advanced semiconductor materials research
Typical Configuration Items to Confirm
- Wafer size and substrate type
- Process gases and chemistry requirements
- Chlorine compatibility requirements
- Electrostatic chuck cooling requirements
- Facility exhaust and gas handling requirements
- Turbo pump and vacuum configuration
- Installation scope and warranty availability
Related STS / SPTS Inventory
SemiStar may also have other STS / SPTS Multiplex plasma etch systems available, including Bosch Process DRIE, HRM deep silicon etch, AOE advanced oxide etch, and M/PLEX metal etch configurations. Please contact SemiStar for current inventory and configuration details.
Important Notes
- Refurbished equipment availability is subject to prior sale.
- Refurbished systems are supplied based on current inventory and original equipment configuration.
- Actual configuration, process capability, installation scope, warranty, and delivery schedule must be confirmed by quotation.
- SemiStar does not provide spare parts or service support for STS systems not sold by SemiStar.
- All OEM names, trademarks, and model names belong to their respective owners.
- All website information is for reference only and is not a purchase specification. Final configuration, scope, price, and terms are based on SemiStar’s official quotation.
Request a Quote for STS Multiplex ICP Plasma Etcher
Please contact SemiStar with your target application and required configuration. Helpful information includes wafer size, substrate material, etch material, process gases, target application, facility limitations, budget, and expected purchase timeline.
Contact SemiStar
SS380 OEM-24-1-MSP-225
